SMC Corporation of America
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50,75 50,100 50,100,150 Max. work load [kg] *1 *3 2 8 12 Horizontal Vertical 1.5 3 6 6 12 10 20 Pushing force 35% to 70%[N] *2 *3 18 to 36 37 to 74 69 to 138 91 to 182 174 to 348 109 to 218 210 to 420 Max. speed[mm/s] *1 *3 400 200 100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

[OUT] Bit/Byte / Address ID No. 0 IN0 bit 0,1 1 IN1 bit 0,1 2 IN2 bit 0,1 3 IN3 bit 0,1 0 4 IN4 bit 0,1 5 IN5 bit 0,1 6 bit 0 7 bit 0 0 HOLD bit 0,1 1 SVON bit 0,1 2 DRIVE bit 0,1 3 RESET bit 0,1 1 4 SETUP bit 0,1 5 JOG(-) bit 0 6 JOG(+) bit 0 7 FLGTH bit 0 ID1 0,1 2 1 No. 063 1ABS() 2 INC( 3 1 )0: ( ) 4 H 2 065500 mm/s 5 L 6 H 7 4 2147483647 0.01mm 8 9 L 10 H 2 065500 mm/s2

Vibration resistance for 2 hours in each direction X, Y and Z respectively (De-energized) Impact resistance 147 m/s2 3 times in each directions of X, Y and Z respectively (De-energized) Standard CE marking, UL (CSA), RoHS Weight 300 g 1: All unused connectors must have a seal cap fitted. -25No.EX-OMS0027 Dimensions -26No.EX-OMS0027 End plate Model Indication and How to Order EX600-ED End

Applying an excessive impact (more than 300 m/s2) may damage the product and cause malfunction. (2) Observe the proper tightening torque for mounting. If the screws are tightened in excessive of the specified torque range (0.2 to 0.4 Nm), it may damage the cylinder/actuator, mounting screws, mounting brackets, and sensor etc.

Do not drop, hit or apply excessive shock (100m/s2) to the product. The inner parts can be damaged leading to malfunction even if the sensor body is not damaged. 2. The tensile strength of the lead wire with connector is 35N. Exceeding this value can cause breakage. Be sure to hold the body when handling. 3. Avoid repeatedly bending or stretching the lead wire with connector.

resistance Impact resistance 147 m/s2 is given 3 times for each direction X, Y and Z Operating environment No corrosive gas -12No.EX##-OMU0020-A 3.

Table 8-15 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 HRZ Series 8.7 Compliance 8-25 HRX-OM-I051 Chapter 8 Appendix Serial No. Model: Judgment 8.8 Thermo Chiller Daily Inspection Sheet Circulating fluid supply port cap Looseness IN press.

Table 8-7 Compliance EMC Directive 2004/108/EC Low Voltage Directive 2006/95/EC CE Marking Machinery Directive 2006/42/EC SEMATECH S2-93, S8-95 SEMI S2-0703, S8-0701, F47-0200 UL E229305 / UL1995 8.7 Compliance HRW Series 8-14 HRX-OM-K003 Chapter 8 Appendix 8.8 Thermo Chiller Daily Inspection Sheet Serial No. Model: Judgment Circulating fluid supply port cap Looseness IN press.

Please install a load to give an output current of 80 mA or less. 6 - Wiring diagram (Input signal 1Brow n S1 2W hi t e S2 3Bl ue S3 4Bl ack S4 Power supply DC24V+/-10% 5G ray Pow er suppl y Note: Common is no polarity. The power supply can connect the direction of the plus or minus either.

Caution Do not drop, bump or apply excessive impacts (1000m/s2 or more for solid state auto switches) while handling. Although the body of the auto switch may not be damaged, the inside of the auto switch could be damaged and cause malfunction. 2. Observe the proper tightening torque for mounting an auto switch.

[IS400-2 (Float switch only)] 1000 cm3 tank 121538-1A-S1 IS400-1 Metal bowl with level gauge 121538-1A-S2 IS400-2 Note) Bowl O-ring (or seal) is included for the AL20 to AL60.

Required gripping force = 0.01 kg x 10 x 9.8 m/s2 = Approx. 0.98 N or more Pressure 0.6 MPa 4 0.5 Gripping method: External gripping Gripping force N 3 (Note 1) 0.4 0.3 2 1.25 1 0 30 20 10 Gripping point L mm Selecting the MHC2-6D. The gripping force of 1.25 N is obtained from the intersection point of gripping point distance L = 25 mm and pressure of 0.4 MPa.

Required griping force = 0.15 kg x 20 x 9.8 m/s2 = Approx. 29.4 N or more 80 60 30 40 20 0 Gripping point L mm Length of gripping point: 30 mm Selecting the MHF2-12D The gripping force is obtained from the intersection point of the gripping point distance L = 30 mm and a pressure of 0.4 MPa.

Example) For setting the gripping force to be at least 20 times the workpiece mass: Required gripping force = 0.3 kg x 20 x 9.8 m/s2 60 N Further allowance should be provided when great acceleration or impact is expected during workpiece transfer.

Required gripping force = 0.1 kg x 20 x 9.8 m/s2 () 19.6 N or more 0 10 20 30 40 50 60 Gripping point L (mm) Selecting MHZ2-16D. A gripping force of 24 N is obtained from the intersection point of gripping point distance L = 30 mm and pressure of 0.4 MPa.

W : Weight (kg) F : Load (N) FE : Load equivalent to impact (N) a : Average speed (mm/s) M : Static moment (Nm) : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) At impact: = 1.4 a 1.4 100 = 1.4 a (mm/s) FE = agW Note 4) ME = FEL1 = 0.05agWL1 (Nm) 1 3 Note 4) Average load coefficient (This coefficient

W : Weight (kg) F : Load (N) FE : Load equivalent to impact (N) a : Average speed (mm/s) M : Static moment (Nm) : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) At impact: = 1.4 a 1.4 100 = 1.4 a (mm/s) FE = agW Note 4) ME = FEL1 = 0.05agWL1 (Nm) 1 3 Note 4) Average load coefficient (This coefficient

W : Mass (kg) F : Load (N) FE : Load equivalent to impact (when stopper collides) (N) a : Average speed (mm/s) M : Static moment (Nm) : Collision speed (mm/s) L1 : Distance to the center of load gravity (m) ME : Dynamic moment (Nm) g : Gravitational acceleration (9.8 m/s2) At impact: = 1.4 a 1.4 100 = 1.4 a (mm/s) FE = agW Note 4) ME = FEL1 = 0.05 agWL1 (Nm) 1 3 Note 4) Average load coefficient

Dual-Double Rod Type CXSW 39 Series CXS Auto Switch Common Specifications Auto Switch Common Specifications Type Solid state switch Reed switch Leakage current 3-wire: 100A or less; 2-wire: 0.8mA or less None Operating time 1ms or less 1.2ms Impact resistance 1000m/s2 300m/s2 Insulation resistance 50M or more at 500VDC (between lead wire and case) Withstand voltage 1500VAC for 1 min.