CQS

Description Minimum operating pressure 0.07 0.07 0.05 0.05 Standard stroke Stroke range Bore size Allowable Kinetic Energy (J) Stroke range 1 to 29 12, 16 20 25 12 16 Bore size (mm) 1 to 49 20, 25 Standard 0.055 0.09 0.022 0.038 Part no.: CQSWB25-47D CQSWB25-50D with 3 mm width spacer inside. B dimension is 79 mm.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up

MLGP

A + Stroke 20Data Common Dimensions: MVGPM/MVGPL B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) ID IE IF IG IH J K L 20 25 32 9.5 10 9 79.5 10 10 12 32.5 8.5 9 9 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 83 93 112 6 7.5 9 24 30 34 M5 M5 M6 32 18 21 24 3 20, 30, 40, 50, 75, 100, 125 150, 175, 200,

“JF80-22-150” is the part number of the old floating joint, the J series. The J series (J□, JF□, and JL□) was discontinued in 1990 and became the current JA series. The mounting dimensions of JA series joints are not interchangeable because J series joints were of the compact type.

Type: Quick Exhaust Valves, Body Material: [Resin] PBT, Input Side, Port Type P (P1): One-Touch Couplings, Output Side Port Type A: One-Touch Couplings, Exhaust Side Port Type R: One-Touch Couplings, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 0.48, Applicable Tube O.D. d (inch): 1/4, Applicable Tube O.D. d (mm): -, EXH port: With Exhaust Port Fitting

Type: Quick Exhaust Valves, Body Material: [Resin] PBT, Input Side, Port Type P (P1): One-Touch Couplings, Output Side Port Type A: One-Touch Couplings, Exhaust Side Port Type R: One-Touch Couplings, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 0.8, Applicable Tube O.D. d (inch): 1/4, Applicable Tube O.D. d (mm): -, EXH port: With Exhaust Port Fitting

Nozzle Diameter: ø1.0mm, Vacuum Pressure: -89 kPa, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4"

Nozzle Diameter: ø0.5mm, Vacuum Pressure: -89 kPa, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4"

Nozzle Diameter: ø0.7mm, Vacuum Pressure: -89 kPa, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4"

Nozzle Diameter: ø1.0mm, Vacuum Pressure: -48 kPa, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4"

Nozzle Diameter: ø0.5mm, Vacuum Pressure: -48 kPa, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4"

Nozzle Diameter: ø0.7mm, Vacuum Pressure: -48 kPa, SUP: One-touch Fitting ø1/4", VAC: One-touch Fitting ø1/4"

Number of Ports: 2 Port, Piping Direction, Bar Height: Side Ported, Short, Tube O.D.: ø1/4", Actuator Type: Cross Roller Plunger, Suffix: -, Indicator: -, Bracket: -

HEC_W-E

J o 0001 Serial No. Manufacturing month o: January U: July P: February V: August Q: March W: September R: April X: October Manufacturing year S: May y: November J: 2005 T: June Z: December K: 2006 L: 2007 . . . 4-1 Unit Overview 4.3 Model No. label Model No. label is attached to the unit and indicated as shown below.

High Vacuum L Type Valve

H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0007 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLC-50-2 70 185 79 46 11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90

XL-OMV0002

H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm

PFxx-OMA1007

(page 139) -140No.PF-OMA1007-B Standby regulator type NO specification AMS20/30/40/60B-R/N/F#D Part number P A B C D E J M L AMS20B-#D 1/8 1/4 301.8 214.7 85.1 66.8 25.6 46.2 24 40.1 AMS30B-#D 1/4 3/8 348.3 214.7 102.1 86.5 29.1 46.2 30 40.1 AMS40B-#D 3/8 1/2 395.8 214.9 119.4 91.5 32.6 46.2 36 40.1 AMS60B-#D 3/4 1 491.8 214.8 118 125 42.1 46.2 46 40.1 : Dimension D is the dimension

STAINLESS STEEL CYLINDER

Please refer to "Fig.1 Allowable lateral load applied to rod end ". ( Page 10) Table 2 Allowable kinetic energy CG5 N A Formula E= ( m/ 2 )v2 Bore size( mm ) E max ( J ) E max ( J ) 20 0.28 0.42 E Kinetic energy ( J ) m : Load mass ( Kg ) v Max. piston speed ( m/s ) 25 0.41 0.65 32 0.66 0.91 40 1.2 1.8 50 2.0 3.4 EE max ( J ) Should be satisfied. 63 3.4 4.9 80 5.9 11.8 100 9.9 16.7 Warning