CXS

22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 8-28-26 26 Series CXSJ Dual Rod

CLS

60 67 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 43 43 43 48 48 60 19 19 19 24 24 29 14 20 20 25 25 30 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 145 75 18 145 136 115 90 90 90 115 115 140 16 58 110 M14 x 1.5 110 190 100 230 Up to 1400 1401 to 1600 3 5 30 46 114 161 78 18 160 110 146 128 212 16 64 110 M14 x 1.5 112 255 Up to 1400 1401 to 1600 130 182 95 23

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

Compact Slide Series MXH

0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (6) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (12) Load Eccentricity 200 mm 1 10 10 0.1 Mass m (kg) 1 1 Mass m (kg) Mass m (kg) 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Thermo-con

: 95F (35C) 600 1200 Ambient temperature: 86F (30C) 500 1000 Ambient temperature: 59F (15C) 400 800 Ambient temperature: 59F (15C) 300 600 200 400 100 200 0 0 0 0 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 10C 20 30 40 50 60 70 40F 60 80 90 110 130 150 Circulating fluid temperature Circulating fluid temperature Pump Capacity (Thermo-con Outlet) The pressure on the y-axis shows the discharge

76

Note) Air flow capacity (scfm [ANR]) Applicable air compressor (kW) 50 Hz Model Power supply voltage (Frequency) Port size 60 Hz IDF1E 3.53 4.24 0.75 Single-phase 100 VAC (50 Hz) Single-phase 100/110 VAC (60 Hz) IDF2E 7.06 8.30 1.5 Rc3/8 IDF3E 11.3 13.1 2.2 IDF4E 18.4 20.1 3.7 Rc1/2 Single-phase 100/200 VAC (50 Hz) IDF6E 26.5 29.0 5.5 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDF8E 43.1

Table of Contents

Note 2) The flange can be mounted on the rotary actuator at 60-degree intervals.

MXH

MTS MY CY Long strokes up to 60 st are standardized.

Prevents Micro-Bubbles

87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

60 44 18 25 14 17.5 9.5 18 9 47 160 8 44 77 10 20 M14 x 1.5 30 22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19

e-Rodless Actuator

E-MY2H/M2 E-MY2H/M3 50 60 50 60 50 60 30 30 30 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 4 4 4 3 3 3 E-MY2H16 E-MY2H16 2 2 2 E-MY2H16 1 1 1 100 200 300 400500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load weight / E-MY2H E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 50 60 60 50 50 30 30 30 20 20

AZ1000

30 0.21 0.34 50 0.28 20 0.14 40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 2) The flange can be mounted on the rotary actuator at 60-degree intervals.

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

IIIIIIIIII

PP-700-5 PP-700-15 PP-700-30 PP-700-60 PP-700-100 1 1 1 3 5 5 15 30 60 100 30 60 60 120 120 0.2 0.3 0.3 0.5 0.7 0.4 0.6 1.0 2.0 3.5 PPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (PSI) FM = FLUSH MOUNT PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

80 95 105 110 130 D-A5m D-A6m n 60 + 55 (n 4) /2 n = 4, 8, 12, 16 80 + 55 (n 4) /2 n = 4, 8, 12, 16 95 + 55 (n 4) /2 n = 4, 8, 12, 16 105 + 55 (n 4) /2 n = 4, 8, 12, 16 110 + 55 (n 4) /2 n = 4, 8, 12, 16 130 + 55 (n 4) /2 n = 4, 8, 12, 16 1 60 70 85 105 110 115 140 2 (Different surfaces, Same surface) 60 70 85 105 110 115 140 D-A59W n 60 + 55 (n 4) /2 n = 4, 8, 12, 16 70 + 55 (n

CRB2/CRBU2/CRB1

Auto switch unit + 2 switches Angle adjuster 9 10 19 25 25 19 10 9 30 46.5 30 50 60 46.5 60 50 30 30 30 203 47 90 150 203 150 90 47 30 3 Series CRB2 A shaft can be replaced with a different shaft type except for standard shaft type (W).