CL

to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45 GR 4 7 7 7 PG 22 27 27 29 GQ 4 7 7 8 GL 6 9 9 11 NN H2

Air Cylinder

Width across flats MG MN MI Width across flats B2 MK H2 ML + Adjustment 4 Stroke MH + Stroke + Adjustment ZZ + 2 x Stroke + Adjustment Dimensions (mm) Symbol Stroke range H2 MN ZZ MG MH MI MK B ML Bore size Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 40 50 63 80 60 70 85 102 116 6 8 8 10 12 M10 x 1.25 M14 x 1.5 M14 x 1.5 M16 x 1.5 M20 x 1.5 180 197 205 253 267 19 24 24 27 32 45 49 49

CY1

CY1S (slider type) Special bearing Symbol 14 CY series mounting dimensions -X211 CY1B CY1S X211 Bore Stroke Magnetic holding force CY series mounting dimensions Mounting dimensions have been matched to those of the CY series for maintenance applications.

Digital Flow Switch (Integrated display type)

Hysteresis mode: [H_2] Window comparator mode: [ H2] The snap shot function can be used. (Refer to page 64) Press the SET button to set. Move on to delay time setting. Delay time setting Press the UP or DOWN button to select the delay time. Delay time set range: 0.00 to 60.00 [s] Press the SET button to set.

Series AK1000

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

With rear end lock: CBM2B Bore size -HN Stroke Manual release non-locking style (Additional symbol: N) With front end lock: CBM2B Bore size -RN Stroke Manual release locking style (Additional symbol: L) With double end lock: CBM2B Bore size -WN Stroke With rod boot (mm) HN (MAX) Stroke range Symbol DL B2 D H2 HR B1 A Eh8 F I K MO NA P S H1 H NN AL G MM N ZZ Bore (mm) 20 25 32 40 0 0.033 0

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m x (a2 + b2) / 12 + m x H2 = 0.4 x (0.102 + 0.062) / 12 + 0.4 x 0.042 = 0.00109 kgm2 Inertial moment Kinetic energy 6 Confirm that the load's kinetic energy is within the allowable value. 1 / 2 x x 2 allowable energy = 2 / t (: Terminal angular velocity) : Rotation angle (rad) 1/ 2 x 0.00109 x (2 x ( / 2) / 0.3)2 = 60 mJ Allowable energy OK t : Rotation time (s) Allowable kinetic

Title not found

XB6 Hearesistanlcylinder xBg Low-speed ctlinder: 101o 50mm/s XE13 LoFspeed .ylinder:5 to 1omm/s XB19 HEh-speed cylnder XBl l Long*lroke cy nder XCla NPTlinishpipingporl XC22 Fiuoro.ubber sal No1) l,lade to order opt ons are avai able for Senes CXS staidad type on y. (Long stroke option XB11 s also a% lable lor CXSW) FeGr lo calloq ES20-53E and Best Pneumall6 ?

Title not found

(Ba bushns only) ,u When the psron is lracting, atr is erhausled through bolh A and A unli p ston sea H pass a r passage A. xB6 Heal-resislafrcYifder XBg LN speed cy nder 101050mns XBl3 Low-speed cy nder 5lo lomnvs XB19 H gh-speed cylinder XB1 1 Long-slroke cyl nder XC18 NPTlinish piping porl XC22 F uoro rubber sea Note) Madelo Order oplions are av?

MQQ

CAT.ES20-156 A Compact Low Friction Cylinder (Metal Seal Type) Series MQQ 10, 16, 20, 25, 28 Lateral Load Resisting Low Friction Cylinder (Metal Seal Type) Series MQM 6, 10, 16, 20, 25 Series MQM Series MQQ eds spe ow ds d l spee an rm rict w f ion c lo igh ifo act ylind un er f mp or o h Co w t Q lo MQ or isti ng lo res ad w frictio r f l lo de lin n cy era Lat M MQ Low Friction Cylinder

Battery-less

10 2 x 5 14.5 0.2 0.2 24 +0.033 0 26H8 ( ) 114.2 3 3 127 133 240 (Motor cable entry: Basic type) 230 (Motor cable entry: Entry on the left side) Dimensions [mm] 5H8 ( ) depth 5.5 24 Model H1 H2 H3 LER50 16 5.5 15.5 LERH50 26 15.5 25.5 +0.018 0 2 x M10 x 1.5 x 20 2 30 163 Controllers JXCm Series For details, refer to page 182 and onwards.

ZP

H2 H2 L1 M1 M1 M1 D Pad side Pad side Pad side ZP2V-A01ZP2V-AN1ZP2V-A5ZP2V-A8ZP2V-AG1Vacuum generator side D Vacuum generator side M2 M2 L3 L2 H1 Vacuum generator side L2 L33 H1 M2 H1 (L4) (L4) No.0.8 No.0.8 (L4) No.0.8 H2 H2 L1 L1 L1 H2 M1 M1 M1 Pad side Pad side Pad side ZP2V-B01ZP2V-BN1ZP2V-BG1ZP2V-B5ZP2V-B61 The place at the vacuum generator side where the tool is applied. 2 The place

Series AP500

Vespel is a registered trademark of DuPont. 19 Intermediate flow (Tied-diaphragm) Two Stage Regulator for Ultra High Purity Series AP2700 For UHP gas delivery High inlet pressure type: Max. 3500 psig (24.1 MPa) Flow capacity to 150 slpm (NF3) to 900 slpm (H2) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Minimizes supply pressure effect by

KR

Bulkhead Connector: KGE Effective area (1) (mm 2) H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the value. Press the button to set. [F 2] Setting of OUT2 completed.

Direct Solenoid

Cy RATINGS: h.Ll.: All h@sirg p.rr3 glunlrun di dri.gB, sp@l a.d ses 4:loF st hr6s, passivald ud n6t FdrEd b na2 Rrd$dl C. Sbvo Oing. BUB N, spaa dldn, sho.* pd tl|s[!li6 4!bd. ' UL 429 TesliN P.oeduc t ",xl " DEcco=" sole.oid. 19.3 lrlrArls. Cv ratings vary with the pipe size which feeds the valve. Actual Cv ratings on vaJious sub-plates are as follgws: th" Cv 0.8 1/."

Digital Flow Switch

Hysteresis [ H2] and [the current set value] are displayed in turn. Press the or button to change the set value. Press the button to set. [F 2] Setting of OUT2 completed. Return to function selection mode. : The set value and hysteresis settings limit each other. : The display colour is defined by OUT1 and cannot be changed with any OUT2 settings. -41No.PF-OMO0005-F c.

Digital Flow Switch (Remote type monitor unit)

Input of set values P2dH P2AH n2AH P2AL n2AL Setting of P2L/n2L P2H/n2H Setting of tnL/tPL Setting of P_2/n_2 Setting of tn/tP n2dH P2dL n2dL tnH/tPH H_2 H_t H2 Ht (Page 37) (Page 39) (Page 37) (Page 39) (Page 38) 4. Completed [F 2] Setting of OUT2 is completed. -35No.PF-OMN0012-H 1.

Digital Flow Switch

Hysteresis [H2] is displayed on the main display. [The current set value] flashes on the sub display. Press the or button to change the value. Press the button to set. [F 2] Setting of OUT2 completed.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Light turns on when power is input POWER POWER POWER Transmission indicator Normal: Blinks, Abnormal: Blinks slowly SEND Transmission indicator Normal: Blinks, Abnormal: Turns off or on Transmission indicator Normal: Blinks, Abnormal: Turns off or on SEND SEND Simple wiring standard system S-LINK system Simple wiring H system Send unit: SD-120 S-LINK controller: SL-CU1 Send unit: SD-H2