Electric Actuator/Slider Type

Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

One-touch Fittings

57.4 45.4 9 18.4 L M L D L L M Q Q D 2 x N 2 x O Q Q Different Diameter Cross: KQ2TX Applicable tubing b Applicable tubing O.D.

Electric Grippers

LEHZ(J)10(L) LEHZ(J)16(L) LEHZ(J)20(L) LEHZ(J)25(L) M4 x 0.7 1.4 LEHF10 LEHF20 LEHF32 LEHF40 30% (F.S.) 25% (F.S.) 20% (F.S.) Bolt Max. tightening torque [Nm] Model LEHS10(L) LEHS20(L) 30% (F.S.) 25% (F.S.) 20% (F.S.) LEHS32 LEHS40 LEHS10(L) LEHS20(L) LEHS32 LEHS40 M3 x 0.5 0.9 M3 x 0.5 0.9 5.

Air Slide Table Series MXQ

(mm) B A 2 2.5 4 5 5.5 10 Model MXQ 6 (L) MXQ 8 (L) MXQ12 (L) MXQ16 (L) MXQ20 (L) MXQ25 (L) (1) 3 132

Table of Contents

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Made to Order

Cylinders Mechanically Jointed Rodless Cylinder Stroke adjusting unit Bore size Type Model 10 16 20 25 32 40 L H L H L H L H L H L H L H L H L L L H L H L H L H L H L H L H L H 50 RJ1412H RJ1007H RJ1412H RB1007 RB1412 -XB22 MY1B-Z MY1H-Z RB1412 RB2015 Standard RJ0806H RJ1007H RB0806 RB1007 -XB22 RJ0805 MY1B Standard RB0805 RJ0806H RJ1007H RJ1412H RB1007 RB1412 RJ1412H -XB22 MY1M MY1C RJ1007H

Series PF2W Digital Flow Switch For Water

Sensor 1 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 500 L/min Flow rate range 1 L/min 10 L/min PF2A510 0.5 L/min 10.5 L/min 5 L/min 50 L/min PF2A550 52.5 L/min 2.5 L/min 10 L/min 100 L/min PF2A511 105 L/min 5 L/min 20 L/min 200 L/min 210 L/min 10 L/min PF2A521 50 L/min 500 L/min 525 L/min 25 L/min PF2A551 Sensor Flow rate range Static Electricity

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

L: Plug lead type L plug connector, With lead wire With light/surge voltage suppressor Plug lead unit manifold VV4QD15-05M51 set Manifold base part no.

3

Sensor Flow range 0.5 L/min 2 L/min 5 L/min 20 L/min 40 L/min 250 L/min 140 L/min 100 L/min 350 L/min 0.5 L/min 4 L/min PF3W704 PF3W504 0.35 L/min 5.5 L/min 5.5 L/min 0.35 L/min 2 L/min 16 L/min PF3W720 PF3W520 1.7 L/min 1.7 L/min 22 L/min 22 L/min 5 L/min 40 L/min PF3W740 PF3W540 3.5 L/min 3.5 L/min 55 L/min 55 L/min 10 L/min 100 L/min PF3W711 PF3W511 7 L/min 7 L/min 140 L/min 140 L/min

Compact Cylinder with Lock Series CLQ

M6 x 80 L M10 x 100 L M5 x 55 L 65 80 100 55 CL1 -15D -15D x 70 L x 85 L x 105 L x 60 L 70 85 105 60 -20D -20D x 75 L x 90 L x 110 L x 65 L 75 90 110 65 MLGC -25D -25D x 80 L x 95 L x 115 L x 70 L 80 95 115 70 -30D -30D x 85 L x 100 L x 120 L x 75 L 85 100 120 75 10.5 CNG -35D -35D 7 12.5 17 x 90 L x 105 L x 125 L x 80 L 90 105 125 80 -40D -40D x 95 L x 110 L x 130 L x 85 L 95 110 130 85

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

6 CQ2A32-L-PS CQ2A40-L-PS CQ2A50-L-PS CQ2A63-L-PS CQ2A80-L-PS CQ2A100-L-PS 32 40 50 63 80 100 Set of left nos. !4, !5, !6 Seal kit includes !4, !5, !6. Order the seal kit, based on each bore size. Nickel plated For only CDQ2A 32 to 63 7-6-124 125 7-6-125 126 Series CQ2 Dimensions: 32 to 50 The dimensions are the same with or without an auto switch.

Table of Contents

Output transistor OFF OFF Hexagon socket head bolt (M3 x 6) Tightening torque: 0.290.01Nm Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L Be sure to use the attached mounting screws.

Membrane Air Dryer

Symbol Type Nil Rc N F NPT Port size G 100 30 50 60 75 Port size Symbol Nil H L L S L S L S Nil H L 02 03 04 $ $ $ $ $ $ $ $ $ $ $ $ 1/4 3/8 1/2 $ $ $ $ $ $ $ $ $ $ $ $ Component equipment 100 30 50 60 75 Component equipment Nil H L L S L S L S Nil H L Mist separator AFM40 AFD40 Micro mist separator Micro mist separator regulator AWD40 Replacement Parts (Element for mist separator, micro

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

IZx-OMT0049

For IZTC41-L (controller), IZTP41-L and IZTP42-L are applicable. IZTP41-L and IZTP42-L can be mixed. Transistor input/output type and IO-Link type cannot be mixed. Table2.

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

4-channel Flow Monitor ( compatible)

min L/min L/min 0 to 0 to 0 to Accumulated flow display/ Set flow range 0 to 999,999,999 L 9,999,9 99.99 x 99,999, 999.9 L 0 to 999,999,999 L 99,999, 999.9 L 0 to 999,999,999 L 103 L Accumulated flow display/ Min. setting unit 1 L 10 L 0.1 L 1 L 0.1 L 1 L Accumulated pulse flow rate conversion value 0.1 0.5 1 2 5 L/pulse 0.05 L 0.1 L 0.5 L 1 L 2 L 0.05 L 0.1 L 0.5 L L/pulse L/pulse L/pulse

Base Mounted Metal Seal/Rubber Seal Series VQ

VQZ VQD Except L kit Except L kit Except L kit P. 2-4-177 P. 2-4-166 For S, G kit, please contact SMC.

5

Bore size (mm) Dd9 L l m d Part no.

o

Please use an appropriate dryer to ensure dry air, preventing the valve from frgezing. o df-filM dT-T\-h^ l l r l r \ l l l r l r \ l N.O. N.C.