VZ100/300/500

sbar)] Body ported For internal pilot VV3Z3-20-1 VZ32 1 8 0.47 0.43 0.13 0.74 0.32 0.19 M5 x 0.8 1 8 M5 x 0.8 0.71 0.98 0.71 1.00 0.68 1.00 0.52 0.36 0.49 0.37 0.35 0.27 0.21 0.25 0.2 0.26 0.17 0.25 0.81 0.92 0.80 0.96 1.00 1.00 0.28 0.24 0.23 0.25 0.25 0.30 0.20 0.22 0.19 0.24 0.24 0.26 VV3Z3-40-2 1 8 1 8 Base mounted For internal pilot 1 8 M5 x 0.8 VZ34 1 8 1 8 VV3Z3-40-1 1 8 1 8 C4 C6

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

SB 8 8 9.5 11 11 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 YB 8 8 10 12 12 WB 2 2 2 2.5 3 VB 4 4 5 6 6 UB 10 10 12 16 16 TB 8 8 10 10 12 SC 7 7 8 8 8 SA 4.2 4.2 5.1 6.6 6.6 O 4.5 4.5 5 5.5 6 Q 11 12 14 17 20 R 44 52 63 78 98 VA WA 4H9 4H9 5H9 6H9 6H9 YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 ZA Model +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

7ND9071en

(s) 6 0.3 18 1/4 6 mm or 1/4" 1.6* 1.6* 6 mm or 1/4" 1.0* 1.0* 9 0.6 37 1/4 6 mm or 1/4" 2.0 2.0 11 1.1 67 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm

Modular Type Air Filters Series AF

Modular Type Air Filters Series AF Air Filter Series AF Filtration (m) Model Options Port size AF10 M5 x 0.8 AF20 1/8, 1/4 AF30 1/4, 3/8 Bracket AF40 1/4, 3/8, 1/2 5 Float type auto drain AF40-06 3/4 AF50 3/4, 1 AF60 1 Page 328 through to 336 Mist Separator Series AFM AFM20 1/8, 1/4 AFM30 1/4, 3/8 Bracket 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Page 338 through to 344 Micro

KK/KK13

Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

HRX-OM-W060

. 7-8 7.4.2 Replacing the DI filter . 7-8 7.4.3 Consumables . 7-10 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRL100/200/300-A-20 . 8-1 8.1.2 Refrigerant with GWP reference. 8-2 8.1.3 Communication specifications . 8-2 8.2 Dimensions . 8-3 8.2.1 HRL100-A-20 . 8-3 8.2.2 HRL200-A-20 . 8-4 8.2.3 HRL300-A-20 . 8-5 8.3 Flow Diagram . 8-6 8.3.1 HRL-A-20 . 8-6 8.4 Cooling Capacity

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Electric Grippers

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) (6.3) Actuator side (14) (18) (Terminal

HRX-OM-R016

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

24

1 !7 !1 !8 12 to 25 Over 100 stroke 50 or more !

Air Slide Table

6 15.5 MXQR 6 6 7 2.5 19 8 7 M2.5 x 6 14.5 12.5 M2.5 x 8 7 8.3 M5 x 0.8 M 15 MXQR-CS 6-X11 25.5 5 MXQR-CS 8 18 B 7 8 3 22 9 MXQR 8 7.5 16.6 14.6 8 9.8 M6 x 1 15 MXQR-CS 8-X11 M3 x 8 M3 x 10 28 F 25 MXQR-CS 8-X12 38 5 MXQR-CS12 22 E G MXQR12 M8 x 1 M4 x 12 M4 x 12 9.5 12 4 29 14 11 20.5 18.5 11 13 15 MXQR-CS12-X11 32 C MXQR-CS12-X12 25 42 MXQR-CS16 5 23 Table mounting parts MXQR16 M10 x 1

Fieldbus System

One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.: 10, 3/8" One-touch fitting [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" Applicable tube O.D.: 4, 5/32" : 6, 1/4" : 8, 5/16" Note 1) These figures show the SS5Y5-M11SQA-05D-C86.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

R2 R1 P 15.5 Rc 1/8 External pilot port 19.5 (21) 19.5 (21) Rc 1/8 PE port Rc 1/8 PE port 19.5 (21) 19.5 (21) 31 31 5-Rc 1/4, 3/8 31 G1/2 31 1(P), 4(A), 2(B), 5(R1), 3(R2) port 5-Rc 1/4, 3/8 Electrical entry 1(P), 4(A), 2(B), 5(R1), 3(R2) port : 3 position ( ): Rc 3/8 2-5-6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

MB

1 !2 !3 No. !4 !5 !6 !7 !8 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

: Hold 2: Clear / PD Out invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2 / 2 / 2 / 2 1: 4 / 4 / 4 / 4 2: 8 / 8 / 8 / 8 3: 16 / 16 / 2 / 2 4: 32 / 2 / 2 / 2 Process data mapping Port1/Port2/Port3/Port4 (Input and Output) 4 0..7 0 L+ control Port 1 0: L+ ON, 1: L+ OFF 1 L+ control Port 2 0: L+ ON, 1: L+ OFF 5 2 L+ control Port 3 0: L+ ON, 1: L+

HRX-OM-R026

(-)8 Mod bus Communication speed 19.2 (-)8 Slave address ---(1)8 Communication speed ---(9.6)8 communication BCC ---(ON)8 protocol Simple Data length ---(8BIT)8 Parity check ---(NON)8 Stop bit length ---(2BIT)8 Response delay time ---(0)8 Communication range ---(RW)8 Contact input signal 1 RUN Contact input signal 1 type ALT Contact input signal 1 delay timer (time delay) of reading ---(0

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

HRX-OM-K003

Flow Chart . 8-8 8.3.1 Part 1 . 8-8 8.3.2 Part 2 . 8-8 8.4 Offset Function . 8-9 8.4.1 Example of offset function . 8-10 8.5 BAND/READY function . 8-12 8.6 Anchor Bolt Mounting Position . 8-13 8.7 Compliance . 8-14 8.8 Thermo Chiller Daily Inspection Sheet . 8-15 Product Warranty . 8-19 HRW Series TOC-3 HRX-OM-K003 Table of Contents HRW Series TOC-4 HRX-OM-K003 Chapter 1 Safety Chapter 1