Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: DT (Out 1: NPN; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Return Unit Flow Switch Unit Specifications: F (Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °F)

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: M (Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: N (NPT)

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)

Stations: 5 Stations, A, B Port: 04 (Side 1/2), SI Unit: 0 (w/o SI Unit), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 04 (Side 1/2), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Valve; Stop Valve: None), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: 2 (Out 1: Analog 4 to 20 mA; Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Return Unit Flow Switch Unit Specifications: G (Remote Sensor: L/min/gal/min; °C; Integrated Display: gal/min; Accumulated Flow: gal; Temp.: Â

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m)

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 20 (2 to 16 L/min), Return Unit Components: P (w/o Flow Adj.

DOC1020530

Command bit setting of Controlword Bit 3 Bit 1 Command Transition No. Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

tTV2000/3000

M 1 2 x 1 Cable connection threads suP (1) 2-Ro(PT) 114,318, 1/2 Port size Mounting hole L-bracket tNt-398-0-6 (optional) 2-Rc(PT) 1/4,3/8, 1/2 SUP port, OUT port Eleclno-Pltoulnalic Relulatnn rTUz000/3 lt'iler ilile $ruciliciliotts 2 through I station manifold.

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23