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Ref er t o set t i ng procedure bel ow w hen hardw are m ode i s sel ect ed ( condi t i on at t he t i m e of shi pm ent : The sw i t ch i s i nst al l ed on t he l ef t H W ) AD D RESS set sw i t ch 1 9 0 9 0 1 H ardw are m ode can set node address by t he 2 2 8 8 sw i t ch on t he ri ght . 7 7 3 3 Address set t i ng range i s 01 t o 99.

-2030 E-lt4l 1ol1 8l lTd[Z Fa [d [d trEtrtrtrMtrEM (lnterface Connector) Viewed from cable side not PIN side. hput (+) COM Point Input A Point Input B J Point Input C Point lnput D Bank Input #1 6 Bank Input #2 7 Bank lnput *3 Emergency Stop Input I Alarm Reset Input 1 0 1 2 Point Output A 13 Poirn Output B Point Output C 1 4 Point Output D 16 READY Output 1 7 BUSY Output '18 Origin Move

(Example: If the Pressure switch with output impedance of 1k is connected to the A/D converter to detect the analogue output of 5 V, the detected voltage by the A/D converter becomes 5(V) 1(M)/(1(k) + 1(M)) 4.995(V), and there is an error of approximate 0.005 V.) Output impedance R The pressure range in which the Pressure switch satisfies the specifications.

-100 kPa 100 kPa For positive pressure -0 to 1 MPa 0 1 MPa -0.1 MPa -13No.PS-OMG0004-D Dimensions PSE54(A)M3 M5 PSE54(A)-M3 PSE54(A)-M5 A 10.8 11.5 B 3 3.5 PSE54(A)01 N01 PSE54(A)R04 R06 PSE54(A)-R04 PSE54(A)-R06 A 4 6 B 18 20 PSE54(A)-IM5 PSE54(A)-IM5H -14No.PS-OMG0004-D Revision history A: For B: Complete revision C: Limited warranty and Disclaimer and measurement laws are added.

-2No.EX-OMS0026CN / 1 1.5 *3) *3)1 1 -3No.EX-OMS0026CN () () () () -4No.EX-OMS0026CN / () * UL ,UL1310 Class2 -5No.EX-OMS0026CN * IP67 / * () SI SI () ()SI SI * IP67 M12(M8) ( ) () -6No.EX-OMS0026CN CE * (17 ) PLC PLC * -7No.EX-OMS0026CN SI 1 SI 32 10 (SI ) U SI 6 5 4 D 3 2 1 0 SI ON/OFF PNP NPN PNP NPN PNP NPN EX600 D -8No.EX-OMS0026CN 100BASE-TX 100MbpsLAN

VH*-OMX0068-A PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-R,Z)-D VHS30-(F,N)02~(F,N)03(-R,Z)-D VHS40-(F,N)02~(F,N)04(-R,Z)-D Contents Page 1. Safety Instructions 1~5 2. Application 6 3. Specifications 6 4. How to Order 7~8 5. Construction / Parts List 9 6.

Part name Qty (1) Electric Actuator 1 (2) Controller 1 (3) Power supply plug 1 (4) Actuator cable 1 (5) I/O cable (Not use in this section) 1 (6) Teaching box 1 Controller setting kit (7) 1 [The controller setting software, The communication cable, USB cable and conversion unit are included.] Table 2.

Example) In case of Step no.1 Position: 0 + In position: 1 = [INP] is outputted from the value of 1. -22- Example of step data input (1) < Positioning operation INPoutput signal, AREAoutput signal > a b c d e f g h i j k Step data no.0: Positioning operation (It moves from Position: 0[mm] to Position: 100[mm]) Condition 1) The AREAoutput signal is not used.

Bolts Size Belt Belt tension Part number (N) LEF16 LE-D-6-1 9.8 pull LEF25 LE-D-6-2 19.6 LEF32 LE-D-6-3 49.0 LEF40 LE-D-6-4 98.1 Bolts Size Tightening torque 6.Motor cover is installed. (Only "With motor cover") (Nm) M2.5 0.3610% M3 0.6310% M4 1.510% M5 310% The fingernail of "Grommet" is inserted in the hole of "Pulley box". Grommet 43 - 7.

1.38 (35) 3.35 t85) 2 5 2 (641 0 7 9 t20\ 1.57 440) 0.39 1 1 0 ) 0.67 i17J d 1 0 !

1.38 (35) 3.35 t85) 2 5 2 (641 0 7 9 t20\ 1.57 440) 0.39 1 1 0 ) 0.67 i17J d 1 0 !

. 1 6 Branch port C(COM C) 7 Branch port D(COM D) 8 Display window Displays the status of the power supply and the communication with the PLC. 2 9 Protective cover This protective cover should not be opened. 10 Grounding terminal (FE) Used for functional grounding.

) Rc 1/8 P port (Air supply port) 2-4.2 (Mounting hole) 1 1 1 Ejector Bracket A Bracket A 10.2 10 13 15 D1 D2 D3 ZR1 SMC PRESSURE SWITCH RESET SET Attachment D Suction filter Digital pressure switch (73.3 for D2, D3 types) 81 71.3 61 SMC PV PD Filter block D 3 96 13-3-26 26 Series ZR Large Size Vacuum Module: Ejector System Nozzle dia./1.8, 2.0 mm 18 20 ZR1 1-E Note) 1 Dimensions for mounting

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Example) In case of Step no.1 Position: 0 + In position: 1 = [INP] is outputted from the value of 1. -18- Example of step data input (1) < Positioning operation INPoutput signal, AREAoutput signal > a b c d e f g h i j k Step data no.0: Positioning operation (It moves from Position: 0[mm] to Position: 100[mm]) Condition 1) The AREAoutput signal is not used.

DC24V 24V SY100-61-3-05 N N DC12V 12V SY100-61-3-06 AC100V 100V SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V

depth 4 6.4 12 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14 15.2 10.7 4.5 * For splash proof use (IP65), insert an air tube into the atmospheric release port. 1.5 01: R 1/8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)

Confirm that the SI unit and manifold are securely locked together, and slide the SI unit downwards. -26No.EX-OMB0014-H How to replace the EX121/122 Series SI unit Removal 1. Loosen the mounting bracket screw. 2. Remove the SI unit by unhooking claw 2 then claw 1. Mounting 1. Hook claw 1 to the upper side of the DIN rail and claw 2 to the lower side. 2.

Note) AS-FP Metric size Inch size Meter-out Meter-in 0 1 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 AS-FM 04 06 08 10 12 AS-D AS-T With One-touch fitting ASP Thread type M3 Port size Note) For applicable tubing O.D. selection, refer to the Model on page 484. Use 1/8" tube.

Bit offset Item Notes 0 CH1: OUT1 output 0: OFF 1: ON 1 CH1: OUT2 output 0: OFF 1: ON 2 CH2: OUT1 output 0: OFF 1: ON 3 CH2: OUT2 output 0: OFF 1: ON 4 CH3: OUT1 output 0: OFF 1: ON 5 CH3: OUT2 output 0: OFF 1: ON 6 CH4: OUT1 output 0: OFF 1: ON 7 CH4: OUT2 output 0: OFF 1: ON 8 CH1: Diagnostics 0: OFF 1: ON Out of CH1 display range (When HHH and LLL are displayed). 9 CH2: Diagnostics 0: