VZ3000

3A Applicable connector assembly DXT192-52-1-A (For 2 position single) DXT192-52-2-A (For 2 position double, 3 position) 1: 100 VAC, 3: 110 VAC, 4: DC 1(P) port 12 12 stations G Rc 1/8 NPT 3/5(R) port Rc 1/8 How to Order Flat ribbon cable type 43P VV5Z3 43P 05 C4 Stations 1(P), 3/5(R) port thread type 4(A), 2(B) port size 4(A), 2(B) port 03 3 stations C4 For How to order applicable connector

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

P, R port thread type Stations SV 04 4 stations Applicable blanking plate assembly SYJ3000-21-3A (With dust cap) Nil Rc : : 00F G SZ 12 12 stations P port 1/8 1/8 00N NPT R port 00T NPTF SY Applicable solenoid valve Refer to page 1-5-15. Type 32P How to Order SS5YJ332P 07 C4 SYJ A, B port M5 x 0.8, C4 Applicable connector assembly Refer to page 1-5-15.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

(Example) SYJ3120-5M-M3 VJ3000-13-1 -+ Single Double Rated voltage 5 port DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

VZ100/300/500

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

4/5 Port Air Operated Valve Series SYJA3000

2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 SS5YJ7-20 Body ported SYJ72 for internal pilot SS5YJ7-21 SS5YJ7-40 SS5YJ7-41 SS5YJ7-42-C6 SS5YJ7-42-C8 Base mounted SYJ74 for internal pilot Note) Value at manifold base mounted, 2 position single operating

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

Port sizes range from 1/8 to 1/2 with Rc(PT), NPTF and G(PF) thread types available. Various options also available.

LEC-OM071xx

*5 reference unit/s 10 1st Linear Deceleration Constant *1 Pn80D 2 1 to 65535 100 Setup Immediately*5 reference unit/s2 1.

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Signal Cable color S Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

LEC-OM02904

PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S

JXCx-OMT0062

speed] 1 *1) 1 mm/s (0023)h Return-to-origin acceleration and deceleration [ORIG ACC/DEC] 1 *1) 1 mm/s2 (0024)h Creep speed 1 Fixed value 1 mm/s Origin sensor [ORIG sensor] Upper-level byte 0 to 2 1 mm/s2 (0025)h ORIG switch direction [ORIG SW DIR] Lower-level byte Fixed value (0026)h Undefined parameter 21 1 Fixed value 40 - JOG motion data addresses (motion parameter items) Controller

-fl Seies

S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

S!"jqt+r , _^99!j,, r , .-i9!3r r-) tL--sq:L,d r+ ,_!t, r I 5.d"." 1l^:eqBi5, , lL--9s!L,. r+l ,.i9!4rr t I L_l-g!!",o r+l .-^AAr r L.^t9!3, , , ,..' ".' lt+e!',' L , .sL-.1f.:q%,1 , tL jq!"s L+, tLl9!"s L+l ,-;e!j., /..js!i2'L r . , , , , " " , 1 1 + n " , , r 6 * , . " , 1 f 4 : e ! 3 q , , t l ! g ! ! , , + r l r c o M . 2 { + l .r!9!

XLDV Series

Valve side Chamber Bellows side Vacuum pump Recommended direction of pumping 11 XL-OMM0005-A 7 Parts Replacement Procedure Replacement procedure Division 1 Model High Vacuum Angle Valve Step 1 Step 2 Step 3 Step 4 Step 5 Step 6 3 Screw for fixing valve S assembly Bottom of gas release 1 2 Valve S seal assembly 4 Solenoid valve for main pumping 1(P) SUP Solenoid valve for initial pumping 1

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Perpendicular connector 2: Lateral connector P: Positive common N: Negative common 1 2 1 2 P N SZ3000-42-2A-DSZ3000-42-1A-D For D-sub connector D side 1 2 1 2 P N SZ3000-42-4A-DSZ3000-42-3A-D For flat ribbon cable 26 pins D side Note) The assembly part numbers with power supply terminals are 24 VDC specifications

3 Port Solenoid Valve

0.024 0.008 0.016 V114 V114A V124 Note 1) V124A Note 1) Note 1) For both V124 and V124A, pressure from port 3 and exhaust from port 1.

VZ1000

Flat Ribbon Cable Type 21P Applicable solenoid valve How to Order 1 3 5 6 4(A), 2(B) port Stations VV4Z1 05 21P VZ1120MOZ-M5 Applicable blanking plate assembly DXT170-25-3A Applicable connector assembly DXT170-127-A 1: 100 VAC, 3: 110 VAC, 4: DC P, R port thread type 03 3 stations 3(R) port Nil Rc G NPT 12 00F 12 stations 00N Refer to page 3-3-7 regarding how to order applicable connector

Air Cylinder NCM Series Stainless Steel Cylinders

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .