Tie-rod Type Hydraulic Cylinder

9 i q @2 e y @3 @0t!6 !7 w !1 !0!3 @1 !4 !2 u !5 o CHK CHN CHM CHS CH2 @2 CHA CHA Related Products 40 DDescription Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

SYJ300/500/700

+ -+ -+ R P R P P port 1/4 R port 1/4 P port 1/8 R port 1/8 Note) If there are more than 6 stations for type 20, or more than 9 stations for 21 type, supply air to both sides of P port and exhaust air from both sides of R port.

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

MGP

Nm = 0.7375 ftlb 1kg = 2.2046lb 20 Compact Guide Cylinder With Air Cushion Series MGP Model Selection Selecting Conditions Vertical Horizontal l l m Mounting orientation m Maximum speed (mm/s) Graph (Slide bearing type) Graph (Ball bushing type) 400 200 400 200 1 7 , 1 8 1 , 2 3 , 4 1 5, 1 6 21 , 22 1 9 , 20 5 to 9 1 0 to 1 4 Selection Example 1 (Vertical Mounting) Selection Example 2 (Horizontal

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H E A B L1 L2 M F G 2 LQ1R1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 12 15.5 1/8" 10 4 8 18.5 11.5 LQ1R4C-M LQ1R4B-M LQ1R4A-M LQ1R3D-M LQ1R3C-M LQ1R3B-M LQ1R3A-M LQ1R2F-M LQ1R2E-M LQ1R2D-M LQ1R2C-M LQ1R2B-M LQ1R2A-M 1/8" 19.5 4 16 14 15 6 12 28 16.5 22 1/4" 1/4" 19 25 5 17 20 9 18 36.5 23 21 27 3/8" 3/8" 23 29 6 21

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

VCC

Proper tightening torque Nm Tightening Torque for Piping Connection threads Rc 1/8 7 to 9 Rc 1/4 12 to 14 G 1/4 9 to 11 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc. Operating Environment Warning 1.

C95

Ball retainer Brake shoe Brake spring Brake shoe holder Taper ring Air pressure Exhaust Air pressure supply Lock switch lever Brake piston Locked condition Unlocked condition 1.11-24 Series C95N Construction #3 $9 !3!4 @3 #5 t @7 $5 !5 @4!8@0!7!9 i@2 q r y #0$0 $2 w $3 #8 @9 A C CJ1 CJP CJ2 B CM2 Section A !2 !2 !22 $1 e $8 o $7!1@1!6 @5 u!

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) O P AJ AI AH AG AB AA V U T S N M L A K J I B AP AK AL Rc 1/8 20 95 82 125 112 11 12 48 82 12 26 45 25 80 60 55 30 108 99 6.6 25 9 75, 100, 125, 150, 200 M6 x 1 depth 9 Rc 1/8 25 108 92 150 134 13 16 57 100 13 31 54 35 100 70 65 35 130 30 109 9 9 M6 x 1 depth 13 75, 100 125, 150 200, 250 300 Rc 1/8 32 118 102 150 134 16 16 65 114 16 38 60 35 106 80 73 40 135

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) X X X X X 1.2-72

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40R Type Applicable solenoid valve SYJ514R-l SYJ524R-l How to Order SS3YJ5-40R-05 -01 R Port Rc (PT)1/8 X Port (External pilot) Applicable blank plate ass'y SYJ500-10-3A M5 X 0.8 A port side P Port Rc (PT)1/8 Stations M5 X 0.8 M5 2 stations 02 P Port Rc (PT)1/8 Rc (PT)1/8 01 .. .. 20 stations 20 R Port Rc (PT)1/8 A Port M5 X 0.8, Rc (PT) 1/8 Note) If more than 9 stations

Vacuum

.1, .r"iF. stde .orri"tg) 9 i!

RLQ

For detailed specifications, refer to page 9-15-1.

ISO Standard Hydraulic Cylinder

6 @9 @8 !4 !3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

AC Servo Motor Driver (SSCNET /H Type)

Pr.1 Setting value Set value set by PLC program (Unit) 0:mm 1 to 20(x10-2mm/min) 1:inch 1 to 20(x10-3inch/min) 2:degree 1 to 20(x10-3degree/min) (Note 1) 3:PLS 1 to 50(PLS/s) (Note 1) The command speed range by setting Pr.83 Speed control 10 x multiplier setting for degree axis" to valid: 1 to 20(x10-2degree/min). -64- Pr.9 Acceleration time 0, Pr.10 Deceleration time 0 Pr.9 Acceleration

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ

MHZ

9@0@1 Seal kit CR FKM Si Material Dust cover @2 Finger assembly rty!1!3 Mounting thread wo!0!

CNS

For detailed specifications, refer to page 9-15-1.

High Vacuum Angle Valve, XL Series

pressure to 1 x 10-6 {760 to 7.5 x 10-9} Operating pressure Pa {Torr} Conductance l/s Note 1) 5 14 45 80 160 200 1.3 x 10-10 {1 x 10-9} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s Internal 1.3 x 10-11 {1 x 10-10} at ordinary temperatures, excluding gas permeation {Torr l/s} External Operating time s Note 2) 0.08 0.15 0.35 0.4 0.54 0.7 Flange type KF (NW), K (DN) KF