IR30-OM00013

Rc1/8 [2 ] 0.64 (1) (0.1MPa) (2) IR3000:0.2MPa (3)2 ON-OFF () (4) 4- (C) (C) (A) (A) (C) (A) (C) BLEED SUP OUT SU P N/ M Pa/ ( S) N N m 1 1 M Pa/m ( ) m 2 M Pa M Pa (A) /N (B) / ( ) m 2 ( A ) m 2 5- I R 3 0 0 1 SUP OUT 2 3%F.S. 3 R B(P36203018) G 2 3 RcF N IR3000G43-2-01 G43-P2-N01-X30 IR3010G43-4-01 G43-P4-N01-X30 IR3020G43-10-01 G43-P10-N01-X30 02:1/4 03

IR20-OM00008

(B),2 (C),(B)(A), () (B)(C) (A) BLEED (B) (C) OUT SUP SUP. 1 1 M Pa/ m ( B) m 2 N / m m m M Pa M Pa/ m m M Pa B m /N (A) ) ( N N m / N ( C) m 2 N ( A) m 2 N -5- 3. 1 SUP OUT 2 %F.S 3 4 R B(P36202028) G 2 3 Rc,F N IR2000G43-2-01 G43-P2-N01-X30 IR2010G43-4-01 G43-P4-N01-X30 IR2020G43-10-01 G43-P10-N01-X30 021/44 Rc NNPT FG 00.0050.2MPa 1: 0.010.4MPa 20.010.8MPa

Pneumatic Positioner IP300/IP3100

'to 28" (10-85mm) (0.3" to 3.4" std.)5.9max.l Linearitv* Within 1 1% Within + 2% Hvsteresis Within 1% Repeatability* Within 0.5% Within 1% Sensitivity Within 0.1% Within 0.5% Within 0.2% Within 1% Within 0.2% Within 1% Air Consumption (lvlax.) less than 0.25 SCFM @ 20 osi 0,7 SCFM @ /u osl 0.25 scFM @ 20 osi 0.7 SCFM @ 70 psi 0.25 SCFIVI @ 20 Dsi 0.7 SCFM @ 70 DSi Supply Pressure Variation

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Models suitable to satisfy the requirement of 100 (N) are CY332 or CY340. 50 100 20 30 40 50 10 Usable range 10 5 5 Usable range 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10111213 7 8 9 1 01 11 21 3 1 41 5 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3B25 500 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder

Speed Controller: Standard Type Series AS In-line Type 1

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

One-touch Fittings Series KQ2

13.7 15.4 14.29 7 20 3.5 10 11 20 12 21 4.4 12 22 35 16 24 36 31 29 38 64 34 43 69 10-32UNF 12.7 2.3 9.3 15.6 1 16 5 32 23 22 11.11 1 8 1 4 1 8 1 4 16 10.4 10 18 3 26 25 24 26 14.29 11.11 22.5 26.5 15.1 23.5 27.5 29.5 24.5 28.5 30.5 26.5 29.5 31.5 35.5 31.5 33.5 37.5 NPT 3 16 3.5 16.5 11.4 10 19.5 14.29 10-32UNF 2.3 18.1 13.6 12 16.1 7 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 1

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

165.5 187.5 198 5 124.5 154 175 185.5 4 113 142.5 162.5 173 3 101.5 131 162.5 173 2 90 119.5 150 160.5 1 78.5 108 137.5 148 L1 L2 L3 L4 586 Series 10-SQ2000 5 Port Solenoid Valve Plug-in Unit [Option] How to Order Manifold 10 SS5Q23 08 FD2 D CE-compliant Nil Q CE-compliant Clean series Stations 01 1 station 1(P), 3(R) port size 16 Note) 16 stations 1(P), 3(R) port 10 One-touch fittings

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Pad diameter (mm) 10 10 Vacuum entry port (Refer to Table (1) for applications.)

LEF-OM002xx

Condition 1) 30mm position Step no.0 Step no.0 (Move Method: Relative) Position10Relative) C Attainment point 50[mm] 0 10 20 30 40 50 Stroke[mm] Condition 2) 30mm position Step no.1 Step no.1 (Move Method: Relative) Position-10Relative) C Attainment point 10[mm] 0 10 20 30 40 50 Stroke[mm] 28 - Operating procedure and input / output signals for each operation The input / output signal

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

3.6 0 20 30 +10 3.6 1 +1 +20 + 4.9 6.4 0 30 50 1 +1 +20 4.9 6.4 +25 +40 +49.9 51.4 50 +25 +40 49.9 51.4 9 Lateral Vacuum Entry Series ZPR Without Buffer/Female Thread How to Order ZPR 10 F GS 06 B5 Pad diameter (mm) Mounting thread diameter/female thread (Refer to Table 1 for applications.) 10 10 13 13 16 Vacuum entry (Refer to Table 1 for applications.) 16 20 20 25 25 32 32 Table 1 Vacuum

ZSE5/ISE5

1.02kgf/cm2j -O.1MPa 1MPa 11 O.2kgf/cm2j MPa, PSI kgflcm2. bar Unit setting mmHg, kPa, PSI kgflcm2 , bar MPa:O.01, PSI:1 kgf/cm2:O.1, bar:O.1 Min. setting range mmHg:10, kPa:2, PSI:O.2 kgf/cm2:O.02, bar:O.02 A variety of switch output modes Note1) J HysteresIs mode Adjustable (2digit or more) Adjustable (3digit or more) Applicable to a hysteresis mode, window comparator mode.and reversed

70pvpump

Valve Type/ Air Operated Type (External Switching Type) Series PB1000 How to Order VC 1 0 1 01 PB 1 VDW VQ Body size Option/Part no.

AS

AS Series How to Order 2 2 0 01 06 W2 AS 1F Body size 2 1 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard 3 4 Metric size Applicable tubing O.D. Note) Elbow 06 08 10 12 6 8 10 12 Control type Meter-out Meter-in 0 1 Note) For applicable tubing O.D. selection, refer to the Model on page 603.

EXxx-OMS0026CN

Enable 1 Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary 3 PLC Sign & Magnitude 2s complement 2 None 2AVG 2 4 4AVG 4 8AVG 8 Enable 0.5 5 Disable Enable 0.5 6 Disable Enable 7 Disable Enable 8 Disable 1 -49No.EX-OMS0026CN -10..+10 V -10.50+10.45 V -10.45+10.50 V -5..+5 V -5.25+5.22 V -5.22+5.25 V -20..+20 mA

ZR

indication Nozzle dia./1.0, 1.3, 1.5 mm 10 13 15 Thickness 1.2 ZR1 1-K1M-E Circuit diagram 1 1 Spacer A is used to leave space for maintenance (for replacement of filter element etc.) on side mounting.

High Power Cylinder Series RHC

area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum

100

L Flow Rate Characteristics 100 90 80 70 60 50 40 30 20 10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value

Series AK1000

1) 0.09 1 x 10-10 Pam3/sec NPT female, Compression 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.6 lbs (1.18 kg) 2) 1) 14 to 194F (10 to 90C) for Vespel and PEEK seat.

KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7