High Pressure Coolant Valve

mounting Same as back side 8 locations J B G Bracket (Option mark: B) H I 15 R S K L M E T: Long hole for mounting P O A F D Q 4 positions C Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 2) 1/8, 1/4 28.5 1/8 20.5 40 11 67.4 44 26.5 65.5 M28 x 1 30 28.5 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 1/4, 3/8 0 27.5 1/8 21.3 53 9.8 71.9 44 28 64.5 M32 x 1.5 30 27.5 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 1/4, 3/8 3.5 29.4 1/8 24.8 53 10.5 85.6 44 30.7 66.4 M38 x 1.5 41 29.4 40 45.8 6.5 8 53 2.3 31.1 38.5 19 7 1/4, 3/8, 1/2 3.5 33.8 1/8 28.9 70 10.5 91.7 44 35.8 70.8 M42 x 1.5 50

AMD

AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Rotary Cylinder Series MRQ Size: 32, 40 1

2 !3 !4 !5 !6 !7 !8 !

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Compact

E _ 6 9 " . q l 1 2 3 4 5 Load (kgl 6 7 8 I IE tleunic Auuat I||oilelSdodi||g trlollloil Criteria of Accelerating Speed (Horizontal Orientation) LXSH5BC .of /.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 Rated flow (l/min (ANR)) 750 1500 2200 3500 6000 12000 300 (1) Port size (Nominal size B) 1/8 ,1/4 ,3/8 1/4 ,3/8 ,1/2 3/8 ,1/2 ,3/4 1/2 ,3/4 ,1 3/4 , 1 1, 11/2 11/2 , 2 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note 1) Max. flow capacity at a pressure of 0.7MPa. It varies depending on operating pressure.

IDX-OM-M051

. i 3 i 2 5 Warning related to pneumatic circuit. i 4 i 2 6 Location of hazard label . i 4 i 2 7 Caution related to refrigerant . i 5 i 2 8 Caution related to handling . i 6 i 2 9 Other labels . i 6 i 3 Waste disposal . i 7 i 4 Limited warranty and Disclaimer / Compliance Requirements . i 8 Chapter 1 Name and Function of Parts 1 1 Part number of product . 1 1 1 2 Options of product . 1 2

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

VVX31/32/33

<* 1 LVA Orifice size 1 2 3 4 5 6 77 6 6 0 6 LVH Rated voltage 1 2 3 4 7 8 ,, 9= 5,'., ?

Steam Valve

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634 Steam Valve: 2 Port Valve For SteamVND Series Model Port size Flow rate characteristics Weight (kg) Orifice dia.

Modular Type Lubricator Series AL

1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

Compact Vacuum Ejector Series ZQ

ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01 02 1 station 2 station B Both sides ... ... 08 8 station Note) Number of stations varies according to nozzle nominal size during simultaneous operation.

ZQ

to Order ZZQ1 08 B B S Manifold Pilot exhaust port location Number of stations Note) 01 02 1 station 2 station B Both sides ZX ... ... 08 8 station Note) Number of stations varies according to nozzle nominal size during simultaneous operation.

LECA6_C

INP ONOFF 1,2 AREA 1,2 ONOFF AREA ONOFF 43 - 11. 11.1 L E C A L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12 A 10m GND A-1 13 A B-2 7 B 15m A A-2 6 C 20m B B-3 9 B A-3 8 Z B-4 11 Z A-4 10 3 10.5 14.2 2 1 5.6 23.7 A1 2 (7.0) 1 3 3 4 B1 12.7 2 1 18 A4 B4 (6.7) 15 16 11 30.7 44 - 11.2 () L 1 1.5m U 1 1 3 3m V 2 2 W 3 3 5 5m Shield 8 8m Vcc B-1 12

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Model AMG150 AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 Model Note) Rated flow (l /min (ANR)) 300 750 1500 2200 3500 6000 12000 Port size (Nominal size B) , , , , , , , , , , , 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.