SYJ3000/5000/7000

Refer to page 1-7-4.)

Modular F.R.L. Units

units: psi, F *7 *7 *7 *7 *7 *1 Drain guide is NPT1/4. *2 Drain guide is G1/4. *3 A bracket is not assembled and supplied loose at the time of shipment.

HRX-OM-R005

Accessories [Drain pan set] . 6-3 6.4.1 Optional Accessories [Drain pan set] . 6-3 6.4.2 Optional Accessories [Drain pan set] setting and checking . 6-4 Chapter 7 Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid

VFR

Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

HRX-OM-O021

Accessories [Drain pan set] . 6-3 6.4.1 Optional Accessories [Drain pan set] . 6-3 6.4.2 Optional Accessories [Drain pan set] setting and checking . 6-4 Chapter 7 Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A 0.51 D C 1/4-28 UNF B 0.16 JM-025 0.44 3/4", 7/8" JM-03 0.50 0.19 5/16-24 UNF 0.50 1 1/16" JM-045 0.69 0.79 0.26 7/16-20 UNF 1 1/4", 1 1/2" JM-04 0.56 3/8-24 UNF 0.65 0.23 1 1/4", 1 1/2" (Non-rotating) JM-05 0.75 1/2-20 UNF 0.32 0.87 2" 6-14-20 21 Series NCM Mounting Bracket Accessory Material: Rolled steel P dia.

0.4

19 6 18 5 17 4 16 3 15 2 14 1 Station 1 VQ 1/2 VQ 1/2 Station 2 VV5Q11 VQ 4/5 Station 3 Station 4 Stations VQC 1/2 D side U side Station 5 VQC 4/5 Station 6 Station 7 VQZ Connector terminal no.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Title not found

dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q (16j3i) 50mfr Y-O5A (38) (27) ( 1 2 + 0 0 7 0 ) (1 5) (27] (60) (28) 0 6 3 o 0 1 2 o @39 3ir ( 1 6 1 5 0 0 4 7 + 0 0 0 3 1 0 6 1 1 0 M 1 8 x 1 5 0.59 1 0 6 236 63mr Y-O5A (27\ (28) (1 5) (27\ ( 1 2 + 0 0 7 0 ) (38) (60) 0 6 3 a o 1 2 0 @39 M22x1 5 o75 1 1 0 0 7 1 + 0 0 0 3 2 1 7 1 4 6 1 4 2

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

SMC Pneumatic Clean Series

13 7 7 7 5 4 4 1/4 1/8 1/8 163 131 129 26-0.033 0 17.5 35.5 32-0.039 0 10 8 M32 x 2 82 36 21.5 41.5 20 Air Cylinder CM2 2122CM2/ 1011Specific Product Precautions Be sure to read before handling.

Series VQ Base Mounted Metal Seal/Rubber Seal

VQ 1 1 1 0 Y 5 LO (Example) Series Manual override D-sub connector kit with 3m cable VV5Q12-08C6FU2-D VQ1110-5LO VQ1210-5LO VQ1310-5LO VVQ1000-10A-1 VQ0 0 1 B C 1 setManifold base No. 4 setsValve No. (Stations 1 to 4) 4 setsValve No. (Stations 5 to 8) 2 setsValve No. (Stations 7 to 8) 1 setBlank plate No.

Cylinder with Lock

1 !3 io@1!4w@2 !8q@3$1@5@8$2#8#5@7#1@4@9#7 #0$0 !5!6 er uy t !9 #4@6!7!2 #6 #3#2#9 $3 80, 100 Component Parts Component Parts No. Description Material Qty.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(Stations 1 to 2) 4 setsValve part no. (Stations 3 to 6) 1 setValve part no. (Station 7) 1 setBlanking plate part no.

Basic Type/Direct Mount Type

LD 3.5 4.3 5.4 5.4 7 7 8.6 8.6 T 17.5 19 20.5 21.5 24 26 30 32 X 15 18 22 28 35 40 50 60 M 4 5 5 6 7 8 10 10 TC 14 17 20 22.5 28 33 42 48 Y 39.5 54.5 64 72 79 93 113 121 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25 40 40 50 60 60 70 Z 76 94 107 117 130 148 176 188 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 WS 8 7 7 7 7 7 10 10 PW 26 32 38

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

MXS

1 !2 !3 !4 !5 !6 !7 !8 !