Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: C (Complex Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size: 1 (ø0.7), 1st Selection

Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Leadwire: Y (2m Switch/Sensor Only), Unit Options: KW (with Unit Options K & W), 1st Nominal Nozzle Size:

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm2) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628

Clamp Cylinder with Lock

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2007 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LT printing LT 13500DN Printed in Japan.

Pressure Specifications: 1 [-101 to 10kPa (for vacuum)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5)

Pressure Specifications: 1 [-101 to 10kPa (for vacuum)], One-touch Fitting Type: 04 (ø4mm, KJH04-M5), Option, Case Holder: B (With PPA-B)

Title not found

Specifications ZSE30F (Compund pressure) ISE30 (Positive pressure) -100~100kPa Rated pressure range 0~1MPa -101~101kPa Set pressure range -0.1~1MPa 0.2kPa Set pressure resolution 0.001MPa Applicable fluid Air, Non-corrosive/Non flammable gas Power supply voltage 12~24VDC (With mis-wiring protection) Current consumption 35mA or less (At current output:60mA or less) Switch output NPN or PNP

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Process Pump

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OY printing OY 7150SZ Printed in Japan. D-DN

EX120/121/122

EX9 EA 03 Mounting specification 03 04 Direct mounting DIN rail mounting EX9-EA03 EX9-EA04 66 66 Mounting hole for 2 x M4 12.5 60 12.5 10 10 60 13.2 13.2 18 6 75 75 18 6 1678 Series EX250 Integrated Type/ For Input/Output How to Increase Input/Output Blocks, Procedure Drawing u y t q e w r EX Parts List Note No. Description Part no.

Compact Cylinder

L m t d l 32, 40 50, 63 NT-04 NT-05 IY-G04 IY-G05 10 C-type for shaft M14 x 1.5 M18 x 1.5 8 11 22 27 25.4 31.2 14 C-type for shaft 10 0.040 0.076 14 0.050 0.093 41.6 50.6 9.6 13.4 36.2 44.2 1.55 2.05 1.15 1.15 Simple Joint / 32 to 63 2 x D Joint and mounting bracket (A/B-type) part no.

Pressure Switch/Reed Switch Type

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OT printing OT 7150SZ Printed in Japan. D-KS

Refrigerated Thermo-chiller

Min. 0.5s 1s 2s 0.05s 0.1s 0.2s 0.01s 0.02s 100 200 400 600 1000 2000 4000 130 300 500 700 1500 3000 Current (% for chiller main breaker volume) 101 Series HRZ Specific Product Precautions 3 Be sure to read this before handling. Refer to back pages 1 and 2 for Safety Instructions and back pages 3 to 6 for Temperature Control Equipment Precautions.

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

NCM

SMC Corporation of America SMC Corporation Akihabara UDX15F , 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard, Noblesville, Indiana, 46060, U.S.A.

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: D [with Common Release Pressure Supply (PD) Port], Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: without Option, 1st Nominal Nozzle Size

Stations: 04 (Stations), Wiring: F (D-sub Connector), Manifold Options: without Option, Exhaust: H (High Noise Reduction Silencer Exhaust), Pressure Switch for Vacuum/Pressure Sensor: C (Digital Pressure Switch for Vacuum, 0 to -101, PNP 2 Outputs, with Unit Selection Function), Leadwire: Y (2m Switch/Sensor Only), Unit Options: K (Vacuum Break Flow Adjusting Needle, Screwdriver Operation

Stations: 04 (Stations), Wiring: L (Individual Wiring or None), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: A (Digital Pressure Switch for Vacuum, 0 to -101, NPN 2 Outputs, with Unit Selection Function), Leadwire: L (Standard Leadwires, X2), Unit Options: without Option, 1st Nominal Nozzle Size: 4