Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

-NORYL - $0.50 F-2815-071-B80-NORYL - $1.35 F-2815-071-B85-NORYL - $1.35 .008 Lt.

PS-OMH0005CN

) 48(ZS-26-D) 48 (ZS-26-D) () (ZS-26-01) (ZS-26-B) 90 IP65(48IP40) 1/41/2 0.58 mm -13No.PS-OMH0005CN-D 2 -14No.PS-OMH0005CN-D FG () AWG No.

PSxx-OMS0004CN

-2No.PS-OMS0004CN-D / 1 1.5 *3) *3)1 1 [] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4

HRX-OM-M005

Alarm1 Water Leak Detect FLT 01 Alarm2*1 02 Alarm3 RFGT High Press FLT 03 Alarm4*1 04 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

EtherNet/IP TM Compatible Fieldbus System

Service Class Inst Attr ID Values ID ID Reset 01 h [Identity Object] 1 h 01 (Type1 reset) 37 No.EX-OMS0014-A < Properties tab > Network information including the GW unit MAC address and communication speed are displayed. 38 No.EX-OMS0014-A Specification Specifications Basic Specifications Item Specifications Power supply voltage range Power supply for input and control: 24 VDC 10% Power

Precision Regulator

IR1000 : G33-2-01 G33-P2-N01-X30 IR1010 : G33-4-01 G33-P4-N01-X30 IR1020 : G33-10-01 G33-P10-N01-X30 Set pressure Thread type NIL:Rc N:NPT 0: 0.005~0.2MPa 1: 0.01~0.4MPa 2: 0.01~0.8MPa F:G 4. Marking on product Product name plate Production lot no. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS. 1.0 1.0 1.0 1.0 MPa MPa MPa MPa OUTPUT PRESS. OUTPUT PRESS. OUTPUT PRESS.

VEX-OMT0003

Screw tightening torque VO307K: 1.35 to 1.45 Nm V11 : 0.14 to 0.17 Nm Parts for manifold 02 03 04 02 03 04 04 06 10 01 02 10 12 01 02 14 20 Description VEX312VEX322VEX332VEX342VEX350VEX370VEX390Bracket (with bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A Foot bracket (with bolt and washer) VEX1-18-2A VEX3-32-2A Silencer for pilot exhaust port (PE) AN120-M5 AN103-01 AN210-02 Note 1