IDX-OM-O004E

Reference 6.3 Outer dimensions [IDF15E1] Unit: mm 603 41 54 300 AIR OUTLET VENTILATION 16 AIR OUTLET THERMOMETER EVAPORATION WITH LAMP SWITCH C1 R AIR INLET RC1 87 DRAIN SEPARATOR 578 VENTILATION VENTILATION [AC200V] TERMINAL BLOCK 396 DRAIN TUBE LENGTH0.8m (O.D.10 43 15 270 13 4x 380 101 258 314 [AC100V] LENGTH1.9m POWER SUPPLY CORD [AC200V] (17) POWER SUPPLY CABLE ENTRY RUBBER GROMMET 6.4

Single Axis Electric Actuator Series LJ1H

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

AZ1000

2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery pessure (kPa) -35 500 -48 400 Connections inch A (mm) -61 300 FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) -75 200 5.22 (132.6) -88 100 4.00 (101.6) 0 -101

Series: 7 (VP700), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 10 Stations, Symbol: 1, Port Size: 04 (1/2), Thread Type: T (NPTF)

Series: VP700, Exhaust Type: Common Exhaust, Pilot Type: External Pilot, Stations: 10 Stations, Symbol: 1, Port Size: 1/2, Thread Type: NPTF

Please contact us for the latest version.sales@ocaire.com, VXZ2240-04N-5TZ W/DIODE *LQA, VALVE, VXD/VXZ 2-WAY MEDIA VALVE, 21, VXD/VXZ NO SIZE RATING, 1.84976 lb, Apparent power (VA)Temperature rise (C) Note) ModelInrushEnergized Frequency (Hz)VXZ22506533100

Please contact us for the latest version.sales@ocaire.com, CLIP FOR VCS41-4G-10-04N-N, VALVE, VC* BODY PORT 1/2 NPT, .00000 lb, ModelClassNote 1)Port sizeNote 1)Orificediameter (mm?)

Please contact us for the latest version.sales@ocaire.com, O-RING FOR VXD2140H-04N-5G, VALVE, VXD/VXZ NO SIZE RATING, .00044 lb

This is a legacy product, and replaced byVBA40A-04N

Fieldbus system EtherCAT compatible SI Unit

Port 1 Port 4 Port 3 Port 2 Port 1 1 Reserved (fixed value: 0) Reserved (fixed value: 0) Input process data Output process data 2 to 129 2 to 39 2 to 33 2 to 65 Process data is assigned to each port based on the process data mapping size setting Process data is assigned to each port based on the process data mapping size setting 40 66 66 130 Port 1 status (PQI) Reserved (fixed value: 0) 41

EXxx-OMW0014CN

US2 LED . 6-5 US2 LED US2 OFF US2 OFF ON US2 ON 41 No.EX-OMW0014CN-A 6.4.4. LINK/ACT LED . 6-6 LINK/ACT LED LINK/ACT 1/2 ON 1/2(XF1/XF2)Ethernet OFF 1/2(XF1/XF2)Ethernet ON 1/2(XF1/XF2)Ethernet OFF 1/2(XF1/XF2)Ethernet Flash LED (1Hz) 6.4.5. FO LED . 6-7 FO LED FO 1/2 OFF 2dB (1 Hz) 02dB ON 0dB FO LED (5.2 ) 6.4.6.

EXxx-OML0010CN

[4.Parameter Setting] Waring 1. 3. 4. 1. 34 2. 34 3. 35 4. 41 -33No.EX-OML0010CN-C 1. a) b) c) d) 2.

Digital pressure switch for energy-saving control ejector

(page 41, "3,"). 2, After the security code is entered and the indication changes to [UnL], Press and hold the and buttons simultaneously for 5 seconds or longer. [000] is displayed and the new security code should be entered. For how to input the security code, refer to "How to input and change the security code".

Digital Flow Switch

[May 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012-2019 SMC Corporation All Rights Reserved No.PF-OMO0005-F

PFxx-OMO0004CN

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.

PFxx-OMS0001CN

OUT1 [CoL] [] , ON OFF ON OFF [F 1] OUT1 -36No.PF-OMS0001CN-A [F 2] OUT2 OUT2 (29 )(30 ) OUT2()[---] <>OUT2 [F 2] [oUt2][]() OUT2 [---] [oU2] [] [2ot] [] 38 39 40 41 -37No.PF-OMS0001CN-A a.

PFxx-OMX0002

[December 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020-2022 SMC Corporation All Rights Reserved No.PF-OMX0002-B

Digital Flow Monitor

[March 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017-2022 SMC Corporation All Rights Reserved No.PF-OMU0007-D

Digital Flow Switch (Integrated display type)

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2018 SMC Corporation All Rights Reserved No.PF-OMG0010-H

4-channel Flow Monitor (Remote type monitor unit)

[August 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2019 SMC Corporation All Rights Reserved No.PF-OMH0003-F