Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

Rotary Cylinder Series MRQ

(Max. 12) Width across flats 12.2 2 x M5 x 0.8 (Plug, Back side) Rotating port (Max. 7) 113 (Rotating angle 180: 144.5) Auto switch Linear motion Rotary motion 4 x M5 x 0.8 depth 7 Linear port 2 x Rc1/8 2 x Rc1/8 A port Rotating port B port Auto switch 116 + Stroke (198 + Stroke) In addition to Rc 1/8, G1/8 and NPT 1/8 are also available.

Water-cooledThermo-chiller

Specifications Cooling Capacity/Heating Capacity/ Pump Capacity Page 108 Page 109 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products P Ethylene Glycol Type How to Order/Specifications Cooling Capacity/Heating Capacity/ Pumping Capacity Page 110 Page 111 P Clear/Deionized Water Type How to Order/Specifications Cooling Capacity/Heating Capacity/ Pumping Capacity Page 112 Page 113

76

F (C) Correction factor 58.0 (0.4) 0.9 1.06 72.5 (0.5) 36 to 77 (2 to 25) 0.93 1.02 87.0 (0.6) 86 (30) 0.96 1 101.5 (0.7) 90 (32) 1 116 (0.8) 0.99 95 (35) 1.03 130.5 (0.9) 0.98 104 (40) 1.06 145 to 232 (1 to 1.6) 0.92 113 (45) 1.09 1 Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140F (60C) (Max. ambient

SMC Pneumatic Clean Series

-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26 88 64 62 62 42.5 34.5 30 24 47.3 37 37 30 21.5 15 15 15 46.5 37.5 33.5 28 7 5.5 5.5 5 1/8 143 113

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator

Compact and Lightweight

(65.1 g lighter) Weight L-bracket mounting DIN rail mounting Current model ZH20DA-10-12-12N ZH20D-12-16-16 23.3 g 88.4 g Variations Model Nozzle nominal size [mm] Vacuum pressure reached [kPa] Maximum suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Type S Type L Type S Type L ZH05DA 0.5 6 13 13 ZH07DA 0.7 12 28 27 ZH10DA 1.0 26 52 52 ZH13DA 1.3 40 78 84 ZH15DA 1.5 66 58 78 113

Rotary Cylinder Series MRQ Size: 32, 40 1

Width across flats 12.2 (MAX. 12) CRB2 2-M5 x 0.8 (Plug, Back side) Port size (Rotary motion) CRBU2 CRB1 113 (Rotating angle 180: 144.5) MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 Auto switch MSQ Linear motion Rotary motion 4-6.6 through MRQ

RHC

switch is shipped independently, BBA3 or BBA4 screws are attached. 10-6-7 7 Series RHC Theoretical Output OUT IN (N) Operating pressure (MPa) Operating direction Bore size (mm) Rod size (mm) Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 314 63 94 126 188 220 251 283 314 157 OUT 20 10 236 47 71 94 142 165 189 212 236 118 IN 491 98 147 196 295 344 393 442 491 246 OUT 25 12 378 76 113

Compact Cylinder

.: C55B32-47 Example IN 113 189 264 25 Makes 47 stroke tube OUT 147 245 344 IN 181 302 422 Weight 32 OUT 241 402 563 IN 317 528 739 Unit: g Without Auto Swtich 40 OUT 377 628 880 Cylinder stroke (mm) Bore size (mm) IN 495 825 1150 10 60 80 100 125 150 5 15 20 25 30 35 40 45 50 50 OUT 589 982 1370 20 228 254 306 357 422 487 124 111 137 150 163 176 189 202 215 IN 841 1400 1960 25 292 323 386

[Features]· 5-Port Solenoid Valve Optional Parts for SV1000/SV2000/SV3000/SV4000 Series [Please Refer to the Following Pages of the Catalog]· P. 113 Cassette Base, Admission / Exhaust End Block Assembly· P. 113 Cassette Base, Admission / Exhaust Block Assembly· P. 117 Tie-Rod Base, Admission / Exhaust End Block Assembly· P. 117 Tie-Rod Base, Admission / Exhaust Block Assembly· P. 122 Relay

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 3 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 6 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 8 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 2 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 10 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Model: 3 (VPA300), Exhaust Type: 42 (Individual Exhaust), Stations: 4 Stations, Symbol: 3, Port Size: 02 (1/4), Thread Type: T (NPTF)

Manifold Type: Base Mounted, Bar Manifold, External Pilot Capable, Individual Wiring, Valve Stations: 18 Stations, A, B Port: NPTF1/4, Q: -

Manifold Type: Base Mounted, Bar Manifold, External Pilot Capable, Individual Wiring, Valve Stations: 11 Stations, A, B Port: NPTF1/4, Q: -

Manifold Type: Base Mounted, Bar Manifold, External Pilot Capable, Individual Wiring, Valve Stations: 15 Stations, A, B Port: NPTF1/4, Q: -