XLF Series

Material Valve size 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V External seal (3) Special AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Special AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional sealant material symbol after the model number, except for the standard

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

XLG Series

Material Valve size 63 80 100 160 Standard AS568-043V AS568-045V AS568-050V AS568-167V External seal (3) Special AS568-043 ** AS568-045 ** AS568-050 ** AS568-167 ** Standard AS568-233V B2401-V85V AS568-349V B2401-G155V Valve seal (2) Special AS568-233 ** B2401-V85 ** AS568-349 ** B2401-G155 ** Note1) List the optional sealant material symbol after the model number, except for the standard

XMA/XYA Series

Material 63 80 External seal 3 Standard AS568-043V AS568-045V Specific AS568-043 ** AS568-045 ** Valve seal 2 Standard AS568-233V B2401-V85V Specific AS568-233 ** B2401-V85 ** Note1) List the optional seal material symbol after the model number, except for the standard seal material (FKM: compound no. 1349-80). Note2) Refer to the Construction on the page 9 for the construction numbers.

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: N (Auto Switch NPN), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: P (Auto Switch PNP), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

Compatible Robot: 043 (YASKAWA Electric, MOTOMAN, HC10(S)DTP & HC20(S)DTP), Switch Selection: N (Auto Switch NPN), Valve Option: Basic Type, Robot Connection Cable: With connector cable, Protective Cover: D (with protective cover), Manual Changer: E (with main plate assembly)

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

High Vacuum L Type Valve

AS568-030 AS568-035 AS568-039 Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal 1 (2) Special B2401-V15 B2401-V24 B2401-P42 AS568-227 Standard B2401-P4V B2401-P5V B2401-P6V B2401-P8V Valve seal 2 (3) Special B2401-P4 B2401-P5 B2401-P6 B2401-P8 Description Valve size Valve size Material Part indication No. 63 80 Standard AS568-043V AS568-045V External seal (4) Special AS568-043

High Vacuum Angle Valve

Material Valve size 16 25 40 50 63 80 Exterior seal r Standard AS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Special AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Valve seal 1 w Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Special B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Valve seal 2 e Standard B2401-P4V B2401

XM, XY

Material 16 25 40 50 63 80 DAS568-025V AS568-030V AS568-035V AS568-039V AS568-043V AS568-045V Standard XMA XYA XMC XYC XMH XYH XMD XYD Exterior seal e AS568-025 AS568-030 AS568-035 AS568-039 AS568-043 AS568-045 Special XSA B2401-V15V B2401-V24V B2401-P42V AS568-227V AS568-233V B2401-V85V Standard Valve seal w B2401-V15 B2401-V24 B2401-P42 AS568-227 AS568-233 B2401-V85 Special XVD XLD40-2-

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02

Compact Vacuum Unit Ejector/ Vacuum Pump System

For ejector selection, refer to pages from 877 to 898 in Best Pneumatics No.4, Vacuum Equipment Model Selection, on SMCs website (URL http://www.smcworld.com). 42 - Doc. no.

Vacuum Unit Ejector / Vacuum Pump System

Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

Digital Pressure Sensor

M5, R(PT) 1/8, R(PT) 1/4 Mounting bracket .M5 style only 3.6-1 Digital Pressure Sensor GS40 How to Order GS40 X202 Digital Pressure Sensor PSE ZSE4 ISE4 Port size Optional M5 (Female) R(PT)1/8 R(PT)1/4 5m-long lead wire X202 M5 01 02 ZSE5 ISE5 ZSE6 ISE6 Accessories B None Bracket (M5 style only) ZSE3 ISE3 GS PS Specifications ISA Model GS40-M5 GS40-01 GS40-02 ZSE1 ISE1 Air or inert gas Fluid

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

VQ4000

Bottom piping Enclosure How to replace pilot valve ass'y (Voltage) Note 2) Refer to p.1.11-42 and p.1.11-43 for part no. of pilot valve ass'y Refer to p.1.11-3 for How to Replace.

VER2000/4000

AXT503-23A G36-10-01 AXT510-32A G36-10-01 Flow control interface Pressure gauge Model Selection Applicable cylinder bore size: 25 to 125 For model selection, refer to Selecting Electro-pneumatic Proportional Valve on page 706. 704 Series VER2000/4000 5 Port Electro-Pneumatic Proportional Valve How to Order Port size Nil Without sub-plate 02 03 1 4 3 8 ARJ VER2000 02 Series VER2000 AR425