HRX-OM-K003 Alarm Code.01 to 08, 10 to 19, 22, 24, 29, 30: Eliminate the error cause. Press the [RESET] key on the operation display panel or power cycle the main breaker to enable error recovery to take effect. Alarm Code.09: Eliminate the error cause.
1 Quick Exhaust Valve Series AQ Model Excellent exhaust characteristics Large flow capacity Compact and lightweight A wide selection of models Port size Effective area (mm2) Weight (g) Model IN OUT OUT EXH M5 x 0.8 AQ1500-M5 AQ1510-01 AQ2000-01 AQ2000-02 AQ3000-02 AQ3000-03 AQ5000-04 AQ5000-06 2 4 25 35 40 60 105 135 2.8 5.8 25 40 42 70 115 180 25 45 110 105 215 205 690 650 1 8 1 8 1 4
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
Port size (A port) Option M5 M5 x 0.8 01 1 8 Nil None With bracket (Not assembled) P, R port: M5 Note1) Applicable only for DIN terminal type Note2) For other rated voltages, please consult with SMC. F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.
Port size (P, A and B port) Rated voltage M5 01 M5 x 0.8 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 8 R1, R2: M5 Option 24 VDC 12 VDC Nil None With bracket (Not assembled) 240 VAC, 50/60 Hz For other rated voltages, please consult with SMC. F Option Part No. Description Part no.
3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12 2 01 Pilot solenoid Operation type Option 1 External pilot solenoid 2 Internal pilot solenoid Nil None Thread type Nil Rc F G N NPT T NPTF Body size Port size B Bracket (VEX312 only) Body size Port size Port 1(P), 2(A), 3(R) 12 01 1/8 02 1/4 Rated voltage
Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R [Option] How to Order Manifold 03 SD6Q VV8 01 N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations 1 1 station Option Nil None 16 16 stations Special wiring specifications (Except double wiring) K Cylinder port size Direct exhaust with built-in silencer S Symbol
For vacuum/ compound pressure ISA2 ZSE30A 01 N M Option 3 Note) Calibration certificate Nil Y K T Note) Operation manual ISE35 Symbol Rated pressure range ZSE30A ZSE30AF 0 to 101 kPa 100 to 100 kPa PSE Piping specifications IS 01 Note) All texts in both English and Japanese.
(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.
No.ZL3-OM00601-B 5 Silencer assembly (for ZL6) ZL6-SC1-A Silencer assembly (including sound absorbing material) * Sound absorbing material is not sold separately. 6 Port block assembly (common for ZL3/ZL6) ZL3-EP1-1 -A 1) 1) Thread type Nil Rc F G N NPT Port block assembly 7Pressure gauge (common for ZL3/ZL6) Pressure gauge GZ33-K1K-01-X56 (Displayed in kPa) GZ33-K1K-01-X56 (Displayed in
G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5) 6) 7) 20 No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -
OLR MC 01 OLR MC 01 PTC CM MC OLR PTC CM PTC MC TDR PTC CM CM FM1 PRS C11 PRS MC FM1 FM1 PRS FM1 PRS P TDR MC P FM2 TDR P C12 P FM2 FM2 TDR FM2 TDR PRS C11 FM1 MOV MOV MOV M For Option M P C12 FM2 MOV M For Option M M For Option M M For Option M M For Option M CM PTC PTC C01 FM1 PRS C11 FM2 TB C12 ILS MC GFCI OLR TDR MOV EDV IDU Series 13-5 13 3 IDX-OM-W023 13 T IDU15E1
(Refer to pages 371 and 372 for details.) 2 4 0 F 06 06 AQ Model Applicable tubing O.D.
AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
Other parameter settings Item Page Default setting [F 3] Response time page 29 Digital filter:1 s Delay time: 4 ms [F 4] Display resolution page 32 Depends on the specification of the special product [F 5] Auto-preset function page 33 Manual [F 6] Fine adjustment of display value page 35 0% [F 7] Power saving mode page 36 OFF [F 8] Security code page 37 OFF [F 9] Setting of low-cut function
OUT1 ON : Green OUT1 OFF: Red [F 2] Setting of OUT2 Page 37 Same setting as [F 1] OUT1.
0 Differential pressure check mode, pressure range, display unit 31 F 1 Setting of OUT1 37 F 2 Setting of OUT2 40 F 3 Digital filter setting 42 F 4 Auto-preset function 43 F 5 Auto-shift setting 45 F 6 Fine adjustment of display value 47 F10 Sub display setting 48 F11 Display resolution setting 54 F14 Zero cut-off setting 55 F80 Power saving mode 56 F81 Security code 57 F90 Setting of all
Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st 1 300st st: Stroke (mm) 200st 100st 0 0 20 40 60 80 100 120 Allowable end load F (N) MGGL 50Stroke
(mm) 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 20 30 40 50 0 0 10 20 30 40 50 60 70 0 0 10 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGM 40Stroke 6 (Slide bearing type) 5 800st 700st 4 600st 3 500st 2 300st 400st st: Stroke (mm) 1 200st 100st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM 50Stroke 8 (Slide bearing
(N) 10 Allowable end load F (N) Allowable end load F (N) MGGM40Stroke 6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000 st 5 900 st 4 800 st 700 st 3 600 st 2 400 st 500 st st: Stroke (mm) 100 st 200 st 300 st 0 1 0