Clamp Cylinder Series CK1

Auto switch model Auto switch 40 50 9 4 7 11 63 40 50 63 -X D-A93 D-M9B D-M9BW D-B54 8 3.5 5.5 10 8 4 6.5 10 D-A93 D-M9B D-M9BW D-B54 Note) qBMA2-040 wBJ3-1 Note) qBMA2-050 wBJ3-1 Note) qBMA2-063 wBJ3-1 Individual -X BA-04 BA-05 BA-06 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

ATX-OM-F003E

Product part number Auto drain number Normally closed Normally open HAW2-04C/D AD402-04C-6-A AD402-04D-6-A HAW7-06D AD402-04D-6-A HAW22/37-14D AD600-06 HAW55/75-20D AD600-06 HAW110-30D AD600-10 2) The drain piping, if conducted, should have an inside diameter of at least 10mm and a maximum length of 5m.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

HRX-OM-X010

P2 (D-sub 9P female) Serial RS-485 communication cable P1 (D-sub 25P female) Contact signal cable Figure 3-12 Signal line mounting 3.3 Procedure for Installation HRZ Series 3-14 HRX-OM-X010 Chapter 3 Transporting and Installation 3.3.6 Installation of circulating fluid and facility water piping Regarding the circulating fluid and facility water pipings, consider carefully the suitability

Drain Separator for Vacuum Series AMJ 1

w e r e Component Parts No.

Drain Separator for Vacuum Series AMJ

Discharge Q B ZM Drain guide (-J) ZH ZU Maintenance space 40 R ZL P Rc 1/8 Drain 1/4 female thread without valve function ZY Hexagon width across flats 24 ZQ AMJ5000 L A F ZF Bracket (Option) G K M ZP D J C E ZCU OUT IN AMJ Misc. 2port size Q B Maintenance space 20 Rc 1/8 Drain (mm) A B Note) C D With drain guide R Note) Bracket mounting dimensions Model Port size Q E F G H J K L M 169 (

VH Series, 4 Way Hand Valve

(R) C +0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 type VH300 type VH400 type 8 Panel Mount/Dimensions Series VH (mm) / Panel mount type Dimensions VH41 -N02/N03/N04 VH41 -N06 Scale: 35% 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 107.5 19 102 46.6 46.6 88 81 94 148 144 97 97 67 1.5 65 1.5 123 105.5 25

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Air Suction Filter With One-touch Fittings Series ZFB 1

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

VEX-OMV0001

VK300-82-2-07 DC6V 6V VK300-82-4-51 () VEX1300-03 DC12V 12V VK300-82-4-06 G36-4-01 DC24V 24VD VK300-82-3-05 DC48V 48VD VK300-82-3-53 2 AC DC24V DC12V VEX1-11-2 DIN LED NL: LED (VEX110112011301 ) D R R R () (3.57) IP65() 7 VEX-OMV0001 VEX1 Series DIN (VEX110112011301 ) (VEX150117011901 ) 1) (G) DIN (D) () 2) 3) 4) 1) 2) 1)0.5Nm15% 2)68mm 3)Y (+) 1) (-) () 2) 3) 1)0.5Nm20%

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

VEX5

1(P), 2(A) Body size Ratedvoltage(Onlywithsolenoid) 1 2 3 4 1 2 100 VAC 50/60 Hz 04 06 10 10 12 14 20 1 2 3 (Ex.)

AR20-B to AR60-B

How to Order AR 30 B q 03 t y K r BE Option/Semi-standard:Selectoneeachfora to g. Option/Semi-standardsymbol:Whenmorethanone specification is required, indicate in alphanumeric order. Example)AR30K-03BE-1NR-B w e Made to order (Refer to pages 77 to 79 for details.)

Stations: 5 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 6 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 06 (Side 3/4), SI Unit: QW (DeviceNet), P, R Port Size: 06 (3/4), P, R Port Location: D Side, Thread: T (NPTF)