Compact Vacuum Unit

(Refer to the figure below.) (0.42) KJL04-M5 0.63 PD port PV port Fig. 2 [inch] w q e Recommended fittings when the unit is mounted on the wall and the ports released to the atmosphere at the bottom r (0.547) (0.42) (0.894) Vacuum exhaust port (Pressure sensor/ Vacuum pressure switch mountable) KJL04-M5 KJH04-M5 KJW04-M5 Fig. 3 Take care not to drop the O-ring when mounting (e) and (r).

F/ISE

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MW printing MW 16400DN Printed in Japan.

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R [Option] How to Order Manifold 03 SD6Q VV8 01 N 1 1 N 5 W1 Size 01 02 Size 26 mm Size 18 mm CE compliant Nil Q CE compliant Stations 1 1 station Option Nil None 16 16 stations Special wiring specifications (Except double wiring) K Cylinder port size Direct exhaust with built-in silencer S Symbol

Air Cylinder

3 r i !0 !6 o !1 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Qty. Note Kit no.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

Miniature Regulator Series ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

•

r StJpply + TlIfm..ar r -RIld P()" 'f ~ Te-m"O

AME

Accessory (Option) Applicable model Bracket assembly With cap bolt and spring washer AME150 AME250 AME350 AME450 AME550 AME650 AME850 BM51 BM52 BM53 BM54 BM55 BM56 BM57 AME 250 03 R B HA Option specifications AT R IN-OUT reversal direction Body size Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 ID Nil Bracket B Nil AMG Port

MLU

Please use them as guidelines. +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 9 11 13 16 0.2 0.4 0.2 0.4 0.2 0.4 0.2 0.4 142.5 150.5 8 10 10 14 9 11 13 16 159 169 CD-MU03 171 181 CD-MU04 205.5 221.5 CD-MU05 Single clevis (Double clevis bracket) Double clevis (Single clevis bracket) DX -01 -03 CX -02 -04 DY+0.4 +0.2 R (CJ) R (DJ) CDH10 DDH10 2-DT 2-CT DZ

5 Port Air Operated Valve Series VFA3000 1

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

Booster Regulator Series VBA1110 to 4200 1

Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

Compact Cylinder with Lock Series CLQ

Type A mounting bracket part numberYA-03 JointYU-03 2 x O depth of counterbore Material: Stainless steel (mm) Bore size (mm) B D E J M O Part no.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Compact Guide Cylinder

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2024 SMC Corporation All Rights Reserved Specifcations are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

FEP Tubing (Fluoropolymer)

RUSSIA SMC Pneumatik LLC. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2004 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing HV printing IW 120KS Printed in Japan.

c

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QQ printing QQ 7850SZ Printed in Japan. D-DN

2-Color Display

R Power-saving function Power consumption is reduced by turning off the monitor. (Reduce power consumption by up to 20%.)