Cylinder with Lock Series CNS

E1 NX CLS 25 +0.084 0 28 +0.084 0 32 +0.1 0 I-12 I-14 I-16 125 140 160 32 0.1 0.3 36 0.1 0.3 40 0.1 0.3 54 46 100 M30 x 1.5 27 33 L1 U1 54 48 105 M30 x 1.5 30 39 CLQ 60 55 110 M36 x 1.5 34 39 RR1 RLQ MLU MLGP ML1C Clevis Pin/Knuckle Pin l L 5 5 Material: Carbon steel (mm) Applicable bore size (mm) Applicable cotter pin Dd9 Dd9 L l Part no.

Compact Cylinder/Guide Rod Type Series CQM

0 38 10 5 60 58.5 4.5 28 0.2 19.8 7 34 5.5 9 10 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 46 10 10 5 69 67.5 5 33 0.2 23.3 7 40 5.5 9 7 M5 x 0.8 M6 x 1.0 14 +0.2 0 58 12 6 86 84.5 7 42 0.2 29.7 8 50 6.6 11 14 8 M6 x 1.0 M8 x 1.25 19 D-X Individual -X Technical data 799 Series CQM Dimensions 63 to 100 2 x HB through 2 x HA through Auto switch V 2 x P 2 x N through 2 x 2 x OB counterbore with depth

Lubricator

Dimensions 33 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

EN EU CH H6 ER (Max.) 32 ES5032 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 ES5040 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 ES5050 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 ES5063 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 ES5080 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 100 ES5100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 139 Accessories CP96 Series Dimensions: Piston



ITV VEX1 33 A B Minimum size IC Non-grease Seal materials (NBR, FKM) only for VEX1A B33 VBA VE VY1 G Minimum size PPA AL Air operated type Manual handle type 14-6-1 2 Series VEX130 3 Application Example Accurate Pressure Setting Relief Type Regulator Rapid tank internal pressure adjustment and precise pressure setting Sensitivity within 0.2% F.S.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

L1 L2 H M E A 11.5 LQ1L1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18 15 1/8" 10 11.5 LQ1L4C-M LQ1L4B-M LQ1L4A-M LQ1L3D-M LQ1L3C-M LQ1L3B-M LQ1L3A-M LQ1L2F-M LQ1L2E-M LQ1L2D-M LQ1L2C-M LQ1L2B-M LQ1L2A-M 1/8" 16.5 27 20.5 14 15 14.5 1/4" 1/4" 23 20 35 17 26.5 20 3/8" 3/8" 28 21 24 45 33 25 1/2" LQ1L4D-M LQ1L5D-M LQ1L5C-M

TL/TIL

Type Length Type Fluorine ion Type Al Fe Ni Na Ca 50 Ft. (16 m) Roll 100 Ft. (33 m) Eluting amount 0.1 or less Eluting amount 4.5 0.3 0.2 7.1 1.3 Please refer to the Series and Specifications above, as the tubing length differs dependant on each size.

VCA

Area: (800) 258-9200-www.stevenengineering.com VX3 = 280 25 VXA U side D side Stations 1 2 3 4 5 n VN LVC LVA For manual override J2 LVH W T R N Z M LVD Manual override 16 LVQ 1 1 LQ L 2 2 2 2 LVN n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J3 P = K (Pitch) J1 TI/ TIL 2-1/2 (VCA30), 3/4 (VCA40) IN port (Front ported) PA PAX L Dimension (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33

VCL

0.2 10 2.1 50 0.1 3 0.35 8.4 2.0 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 4 0.60 14 1.1 5 0.85 20 0.7 VCL4 2.0 4 7 1.4 33 0.3 10 2.1 50 0.12 Note 1) Refer to page 17-2-32 in model selection regarding port size and orifice size combinations.

VNC

50 33 50 0.7 0.5 1 2 VC 3 4 1.0 0.8 VDW 1.4 1.2 1 VQ 1 4 1 2.4 2.2 VX2 5.2 5.0 32 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 2 1 3.8 3.6 VX3 7.0 6.8 40 JIS Symbol Valve type Operation N.C.

V

(mm) 0 stroke Stroke end 2~8 0.8 1.2 10~32 1 3 40, 50 2 5 H O W T O O R D E R S E E N E X T P A G E F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G F L AT T Y P E Flat Flat with rib ZPT10 U C 10 12 12 21 32.5 55.5 68.5 3 1.7 E:M5x0.8 E:M3x0.5 Model A B C Y ZPT13 U C 13 15 12 21 32.5 55.5 68.5 3 1.8 D F D F ZPT16 U C 16 18 12.5 21.5 33 56 69 3.5 1.2 ZPT02U 2 2.6 1.2 3 6 5 8 0.8

Series SY100 3 Port Solenoid Valve Rubber Seal

Blank Plate Assembly Combination with Solenoid Valve and Gasket Manifold Base Parts No.: SY100-77-1A Body ported Base mounted Cross round head screw SY100-33-1 (M1.7 X 13, Matt nickel plated) Cross round head screw SY100-33-2 (M1.7 X 7, Mat nickel plated) Blank plate A SY100-77-1 Gasket VJ100-20-1 VJ100-6-2 Gasket VJ100-6-1 Gasket Applicable base Sub-plate SS3Y130 type SS3Y131 type SS3Y1S41

Series SYJA300 3 Port Air Operated Valve

Refer to p. 0-33 to 0-36 for Safety Instruction and common precautions.

Vacuum System Peripherals:

Section code Note) Mounting SUP/EXH block assembly When the location is non-standard, indicate both SUP/EXH block assembly part no., quantity and manifold part number. 13-14-33 33 Date issued: Photo copying this page is recommended.

VCA

219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry Grommet: G Conduit: C DIN connector: D Conduit terminal: T A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30 36 X 71 74 Y 101 104 Z 65.5 71 55 62 26 31 17 19 19.5 21 33

VFA3000

Caution Refer to p.0-33 to 0-36 for Safety Instruction and common precautions. 3.2-13 VFA3000 Dimensions/Body Ported 2 position single: VFA3122-F 01 02 SlA VlA SlA VlA VM/VR VH 2 position single: VFA3130-01 02 3.2-14 VFA3000 Dimensions/Body Ported 2 position double: VFA3230-01 02 3 position closed center/exhaust center/pressure center: VFA3 30-X1 01 02 3 4 5 3.2-15 VFA3000 Dimensions/Base

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

silencer) ZX Model ZR Maximum suction flow rate (/min (ANR)) Air consumption (/min (ANR)) Connection (One-touch/Screw-in) Max. vacuum pressure Model Nozzle diameter (mm) (kPa) Body type Weight (g) ZM ZH05B 0.5 Type S Type L Type S Type L Type S/Type L 5 8 13 12 20 23 6/Rc 6/Rc 24 34 46 40 70 78 8/Rc 10/Rc 5 8 13 12 20 23 24 34 46 40 70 78 55 75 95 65 110 150 85 135 185 SUP VAC EXH 28 28 33

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG The above values are the maximum allowable values for moment and load.

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable