Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, D-sub connector reduces installation labor for electrical connection, D-sub connector - 25 pin, Select top or side receptacle position to meet available space requirement, 6 port sizes available, VV5Q51/55 BASE MT 1/2, VALVE, VV5Q51/55 MANIFOLD, RM, VV5Q51/55 BASE MT 1/2, 15.68037 lb

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure, VV5Q51/55 BASE MT 1/2, VALVE, VV5Q51/55 MANIFOLD, RP, VV5Q51/55 BASE MT 1/2, 13.93321 lb

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, D-sub connector reduces installation labor for electrical connection, D-sub connector - 25 pin, Select top or side receptacle position to meet available space requirement, 6 port sizes available VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 6.468 lb. RM.

Base mounted plug-in manifold for VQ5*0* valve, Terminal box connection, Maximum 12 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 9.60398 lb. RM.

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, D-sub connector reduces installation labor for electrical connection, D-sub connector - 25 pin, Select top or side receptacle position to meet available space requirement, 6 port sizes available VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 6.468 lb. RM.

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, 6 port sizes available, Direct electrical entry, Valves wired individually, Optional IP65 enclosure VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 8.47929 lb. RM.

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, D-sub connector reduces installation labor for electrical connection, D-sub connector - 25 pin, Select top or side receptacle position to meet available space requirement, 6 port sizes available VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 6.90348 lb. RM.

Base mounted plug-in manifold for VQ5*0* valve, SI unit for connection to valves, Choice of many types of SI units, Maximum 9 stations available as standard, 6 port sizes available, Optional IP65 enclosure VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 16.3142 lb. RP.

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, 6 port sizes available, Direct electrical entry, Valves wired individually, Optional IP65 enclosure VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 8.184 lb. RM.

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, D-sub connector reduces installation labor for electrical connection, D-sub connector - 25 pin, Select top or side receptacle position to meet available space requirement, 6 port sizes available VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 9.25941 lb. RM.

Base mounted plug-in manifold for VQ5*0* valve, Maximum 12 stations available as standard, 6 port sizes available, Direct electrical entry, Valves wired individually, Optional IP65 enclosure VV5Q51/55 MANIFOLD. VV5Q51/55 BASE MT 1/2. VALVE. VV5Q51/55 BASE MT 1/2. 6.17294 lb. RM.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

1..3 Reserved 4 (Ch0&1 in) Monitor over range 0: disable, 1: enable 2 5 (Ch0&1 in) Monitor under range 0: disable, 1: enable 6..7 Analogue data format 0: offset binary, 1: signed magnitude, 2: 2s complement, 3: linear scaled Channel parameter Channel 0 to 1 0..2 (Ch0 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in)

Micro Mechanical Valve Series VM1000

T.T. 6 2 x M20 x 1 Lock nut Thickness 6, Width across flats 27 Max. 10 Symbol 2 port 56 (A) 2 23 R port (3 port only) 52 33.5 12 10 1 (P) (108) 3 port (A) 2 22 13 12 10 32 1 (P) 3 (R) 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 30 25 F .O.F .* 56 N P .T. 3.5 mm O.T. 2 mm T.T. 5.5 mm 40 16 Series VM200 Series VM200 Toggle lever VM220-02-08A VM230-02-08A Panel mounting hole T.T. 6 2

VQ5000

S ] Interface regulator ARBQ5000-00-1 A B P D U Refer to pages 2-6-34 to 2-6-38 for detailed dimensions of each option.

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

T

Color Color Page Page M Metric size (mm) Inch size (inch) Metric size (mm) Inch size (inch) 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 1 8 5 32 4 ( ") 5 16 8 ( ") " 3 16 " 3 8 " 1 2 " 1 4 " (3.2) " (3.2) 6 10 12 16 6 10 12 16 General tubing 1.5 MPa max. at 20C Use in spatter generating atmosphere flame resistant material H Black Black 15-6-10 Nylon Tubing Series T White

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

VS 8-2/VS 8-4

Single wiring 5 6 7 8 9 10 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 1 2 3 4 5 6 7 8 9 10 1 2 3 4 NEW CONCEPT N.C. valve N.C. valve N.C. valve N.O. valve N.O. valve N.O. valve 5 6 7 8 9 10 1 2 3 4 R2 B R1 A P IP65 enclosure compliant kit (Lead wire) M 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 5 (R1) 3 (R2) 5 (R1) 3 (R2) 5 (R1) 3 (R2) 1 2 3 4 4 (A) 2 (B) 4 (A) 2 (B) 4 (A

CXS

(6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Thread type Nil Port location 6 to 25 M thread Rc 1/8 NPT 1/8 G 1/8 P Port location 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 pcs. 1 pc. n pcs.