Mechanically Jointed Rodless Cylinders

pages 40 to 44.)

EX120/121/122

7 6 5 4 4 5 6 7 1 1 to to to to to to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No

HRX-OM-X010

Table 3-5 Facility water temperature range Installation conditions Facility water temperature range(deg C) Ambient Relative temperature(deg C) humidity(%) 70 29 to 30 60 27 to 30 35 50 24 to 30 40 20 to 30 30 15 to 30 70 24 to 30 60 22 to 30 30 50 19 to 30 40 15 to 30 30 11 to 30 70 20 to 30 60 17 to 30 25 50 14 to 30 40 11 to 30 30 10 to 30 70 15 to 30 60 13 to 30 20 50 10 to 30 40 30 70

0.4

SOL.A 17 16 () (+) 21 25 24 Gray Red 23 Station 11 13 3 SOL.B () (+) 22 18 23 Black White 24 SOL.A 12 4 () (+) 23 26 Station 12 White None 25 19 22 SOL.B () (+) 24 11 5 21 20 White None 26 COM. 10 9 8 7 6 (+) () 25 COM. M27 female thread (+) () 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.

HRX-OM-R026

-A-40. 9-10 9.4.3 HRSH090-W-20-HRSH090-W-40. 9-11 Pump capacity . 9-12 9.4.4 HRSH090-A-20/40-HRSH090-W-20/40. 9-12 9.5 Types of hazard labels . 9-13 9.5.1 Locations of Hazard Labels . 9-14 9.6 Compliance standard . 9-15 9.7 Sample DoC. . 9-16 9.8 Daily Check Sheet . 9-17 Chapter 10 Product Warranty . 10-1 HRSH Series HRX-OM-R026 Contents HRSH Series HRX-OM-R026 Chapter 1 Safety Instructions

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11 19 20.6 6 Size Port size DIN terminal DIN terminal without connector M12 connector J K L J K J K Specific Product Precautions 20 1/8 48.3 55.3 67 48.3 31.3 47 41.1 1/4 46.8 46.8 45.5 3/8 49.8 49.8 48.5 30 1/4 47.8 58.3 70 47.8 34.3 46.6 44.1 3/8 50.8 50.8 49.6 20 JSX Series JSX20, 30

Plate Cylinder with Lock Series MLU

Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

Rotary Clamp Cylinders

Heavy duty type Series MK2 20, 25, 32, 40 50, 63 See MK-Z Double guide type Series MK2T 20, 25, 32, 40, 50, 63 Standard Series MK 12, 16, 20, 25 32, 40, 50, 63 See MK-Z Improved non-rotating accuracy and rotation angle! Rotation mechanism uses 2 guide rollers. Non-rotating accuracy: 0.90.5 (Clamp part) Rotation angle: 9010905 Values for 32, 40.

Filter Regulator

Structural Drawing and Replacement Parts 11-12 7. Bowl Assembly Specifications 13-20 8. Assembly of Optional Parts 21-22 9. Operation and Adjustment 23-25 10. Trouble Shooting 26-27 11. How to Replace the Components 28-40 11-1. Diaphragm Assembly Replacement 28 11-2. Bowl Assembly Replacement 29-31 11-3. Element Replacement 32 11-4. Valve Assembly Replacement 33-35 11-5.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

13 13 8 10 10 53 8 9 40 7.5 21 25 to 500 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 7.5 21 25 to 500 (mm) Bore size (mm) LH LS LT LX LZ MM NA NB P S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5

Air Cylinder Series MB

Without air cushion Foot/(L) Bore size (mm) LS ZZ Cushion valve Port 32 40 50 63 80 100 134 138 156 156 184 188 168 176 198 201 240 244 LY 4-LD LH LT 125 294 222 (mm) Foot X Y X Y LX LS ZZ Bore size (mm) Stroke range X Y LD LH LT LX LY LZ ZZ + Stroke LS + Stroke LZ 32 40 50 63 80 100 22 24 27 27 30 32 9 11 11 14 14 16 7 9 9 12 12 14 30 33 40 45 55 65 128 3.2 3.2 3.2 3.6 4.5 4.5 32 38 46 56

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

R Port Rc (PT)1/8 40/41 Type How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714-l SYJ714M-l SYJ724-l SYJ724M-l R Port Rc (PT)1/8 R Port Rc (PT)1/4 Valve model P Port Rc (PT)1/8 01 Rc (PT)1/8 A port side P Port Rc (PT)1/4 Stations 40 Type 40 Applicable blank plate ass'y SYJ700-10-2A 2 stations 02 41 Type 41 .. ..

Modular F.R.L. Unit

AC20, AC20A AC25, AC25A AC30, AC30A AC40, AC40A Note) 40 40 28 11 11 1/8, 1/4 AKM2000 1/8, 1/4 53 48 34 14 13 AKM3000 AKM4000 70 54 42 18 15 1/4, 3/8 How to Order Note) Not applicable to AC40-06.

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

SQ1000/2000

A 23 6 () 11 Station 8 SOL.

C92

136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10 16 20 15 15 7 10 11 11 11 12 20 25 10 10 10 10 14 14 26 31 32 40 50 63 80 100 125 160 C92S B-Stroke W Bore (mm) AM D EE G H J KK K KW M N S SW VD WH ZZ B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 12 16 20 20 25 30 32 40 G1/8 G1/4 G1/4 G3/8 G3/8 G1/2 G1/2 G3/4 13,5 15,5 17 17 22 19,5 25 30 58 64,5 77 80,5 92 97

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral load MIW8 MIS8 MIW12 MIS12 0.7 MPa 70 0.7 MPa 30 0.6 MPa RE A B 0.6 MPa 0.5 MPa 60 REC 0.4 MPa 0.5 MPa 0.3 MPa 0.4 MPa Lateral load F (

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 40 L = 240 mm L = 200 mm L = 160 mm L = 120 mm L = 80 mm L = 180 mm L = 140 mm L = 100 mm L = 60 mm 30 50 20 10 Workpiece weight (kg) Workpiece weight (kg) Workpiece weight (kg) 5 10 10 5 5 1 1 1 0.5 5 40 30 20 10 5 40 30 20 10 5 40 30 20 10 Transfer speed V (m/min) Transfer speed V (m/min) Transfer speed V (m/min) 10-11-6 6 Series MIW/MIS Escapements Model Selection Allowable lateral

High Vacuum Angle Valve

50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Electric Actuators

40 40 40 0 0 0 0 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 0 0.44 0.88 0.32 1.76 2.2 0.0 0.88 1.76 2.64 3.53 4.4 Work load [lb] Work load [lb] Work load [lb] Work load [lb] 0 50 100 150 200 250 300 200 0 50 100 150 200 250 300 200 Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] Overhang: L2 [mm] 160 160 L2 120 120 80 80 40 40 Horizontal mounting Wall mounting 0 0 0 0.44