Series VQ Base Mounted Metal Seal/Rubber Seal

Max. 16 stations. (Specify a model with 9 to 16 stations by using a manifold specification form.)

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 18 22 26 32 3 4 5 6 13 14 17 23 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

IZx-OMT0049

B C D IZT4-130 21 1300 4 25 19 90 IZT4-160 26 1600 6 27 21 75 Metric IZT4-190 31 1900 8 29 24 73 10 37 27 71 IZT4-232 38 2320 3/16" 26 20 90 IZT4-250 41 2500 1/4" 27 21 75 Inch High voltage cable length L2 5/16" 29 24 73 Symbol L2(mm) 3/8" 36 27 71 1 1000 2 2000 3 3000 End bracket /IZT40-BE1 Intermediate bracket/ IZT40-BM1 End bracket /IZT40-BE2 Intermediate bracket/ IZT40-BM2 With High speed

ASR

31 57.7 10 155 178 17 36.5 65.6 6 158 181 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R1/4 21 24.8 92.2 72 55.8 50.8 25.6 49.8 44.8 19 149 172 21 32.6 61.7 10 151 174 22 34.4 63.5 12 20.9 165 188 17 36.5 65.6 6 168 191 18.5 37.5 66.6 8 18.5 23.4 48.5 24.3 20.4 53.5 R3/8 21 24.8 93.8 73.6 57.4 52.4 25.6 51 46 20.2 159 182 21 32.6 61.7 10 161 184 22 34.4 63.5 12 20.9 292 310 21 32.6 74.8

AC

SAC2000, #16 SAC2503, #16 SAC4000, #16 B120 B220 B320 B420 B220 55 34 25 19 50 30 33.5 20 10 15.4 5.4 2.7 2.3 AW AR3000, 3050, 3060 ARP3000, AW3000, 3050 AWM3000, AWD3000 B320 53 40 21 13.5 66 41 42.5 25 1.5 8 6.5 3.25 2.3 AMR AR4000, 4000-06, 4050, 4050-06, 4060, 4060-6 AW4000, 4000-06 AW4050, 4050-06 AWM4000, AWD4000 AWM B420 70 54 27 18 80 50 52.5 30 2 10.5 8.5 4.25 2.3 AWD ITV VBA VE

ARM10/11

L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

ARM10/11

L 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 VEX AMR NO. L 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 ITV NO.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Hv Auto Switch Proper Mounting Position Solid state auto switch Bore size (mm) 2-color indication solid state auto switch Reed auto switch B C A B Hv A B C A B Hv A B Hv A B C D-A9 D-A9V D-M9 D-M9V D-F8 D-M9W A B Hv D-M9WV A 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Step Motor Controller

Refer to the dimensions on page 52 for the mounting dimensions. (35) (25) L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5 385.5

Compact Cylinder with Air Cushion Series RQ

Y-G04 32, 40 10 18 IY-G04 42 14 22 30 M14 x 1.5 12 14 16 22 30 M14 x 1.5 12 14 36 41.6 10 18 42 +0.5 +0.3 +0.070 0 50, 63 I-G05 Y-G05 50, 63 14 22 IY-G05 56 18 28 40 M18 x 1.5 16 20 20 28 40 M18 x 1.5 16 20 44 50.6 14 22 56 +0.5 +0.3 +0.070 0 80 I-G08 Y-G08 80 18 28 IY-G08 71 21 38 50 M22 x 1.5 21 27 23 38 50 M22 x 1.5 21 27 56 64 18 28 71 +0.5 +0.3 0.3 0.5 +0.084 0 +0.084 0 100 I-G10 Y-G10

HRX-OM-X010

1.7.3 System disposal . 1-16 1.7.4 Label . 1-16 1.8 Material Safety Data Sheet (SDS) . 1-16 1.8.1 Galden HT135 . 1-17 1.8.2 FluorinertTM FC-3283 . 1-29 1.8.3 Galden HT200 . 1-38 1.8.4 FluorinertTM FC-40 . 1-50 1.8.5 Ethylene glycol aqueous solution 60% . 1-58 1.8.6 Refrigerant R410A . 1-64 1.8.7 Refrigerant R448A . 1-76 Chapter 2 Name of Each Section . 2-1 2.1 Name of Each Section (1) .

SMC

16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143 MXS Air slide table 1322Dimensions / MXS16 1322Axial piping (16) MXS16-P 132253.3 Maximum 6.5 Operating port 2-M5 x 0.8 26 12 23.5 12 Other dimensions are the same

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model ZX 10 13 16 20 25 32 40 50 10 16 25 40 10 13 16 20 25 32 40 50 4 6 8 6 8 2. 6 4. 8 7 9 7 9 ZPT-B4 ZC(D)UKC10 ZC(D)UKQ10 19. 5 19. 5 19. 5 19. 5 20. 5 20. 5 ZR 36. 5 36. 5 36. 5 36. 5 37. 5 37. 5 DQ HQ HP 2. 6 4. 8 7 9 12 21 44 15 21 42 18 12 24 45 18 25 46 7 9 12 25 46 15 18 29 50 ZM ZPT-B5 ZC(D)UKC16 ZC(D)UKQ16 19. 5 19. 5 19. 5 19. 5 21. 5 20. 5

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Guide Cylinder Series MGG

54 35 6.6 100 70 130 M10 x 1.5 depth 18 65 30 26.5 35 109 75, 100 125, 150 200, 250 300 M6 x 1 depth 12 19 118 80 11 depth 8 35 100 16 16 60 35 6.6 106 80 73 135 M10 x 1.5 depth 18 35 29 40 129 M8 x 1.25 depth 16 22 150 100 14 depth 10 40 120 19 19 75 50 9 134 95 93 170 M12 x 1.75 depth 21 45 32 50 152 M10 x 1.5 depth 20 22 170 120 17 depth 12 45 150 21 25 90 56 11 152 115 103 194 50 37

VQ5000

Stations D side U side SOL.A 1 ( ) ( + ) Black None SOL.B 14 ( ) ( + ) Yellow Black 1 station 1 14 SOL.A 2 ( ) ( + ) Brown None 2 15 SOL.B 15 ( ) ( + ) Pink Black 2 stations 3 16 4 SOL.A 3 ( ) ( + ) Red None 17 5 SOL.B 16 ( ) ( + ) Blue White 3 stations 18 6 19 SOL.A 4 ( ) ( + ) Orange None 7 SOL.B 17 ( ) ( + ) Purple None 4 stations 20 8 21 SOL.A 5 ( ) ( + ) Yellow None 9 22 SOL.B

Plug-in/Plug Lead: Single Unit

Refer to How to Order Manifold. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 D-sub Connector Cable Assembly (Option) Electric Characteristics Multi-core vinyl cable 0.3 mm2 x 25C Item Characteristics Cable length (L) Assembly part no.

High Power Cylinder Series RHC

51 6 7 16 14.5 10 32 18 8 200 to 700 20 19.5 6 49.5 56.5 70 44 27 53 9 7 16 18 12 36 22 8 200 to 700 25 19.5 6 51.5 55 72 50 33 55 9 7 19 18 12 44 22 9 200 to 1000 32 21 8 51.5 56 84 60 36 66 9 9 21 20.5 16 53 24 11 200 to 1000 40 NN ND NF NE NC K NB JD NA JC WH N ZZ P 1/4 I MM S H Bore size (mm) M22 x 1.5 15.0 13 33.5 5.5 5 30 30.5 26 43 22 252 26 44 M8 x 1.25 192 20 1/4 M24 x 1.5 19.6

HRX-OM-Q026

PV SV 16. Set communication speed (serial communication protocol) with [] key or [] key, and press [SEL] key to enter.