Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Round head screw (M3 x 8), 4 pcs. (2)End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tight screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4x20) with washer, 1 pc.

Compact Cylinder with Air Cushion and Lock Series RLQ

Additional weight Unit: (g) 32 11 26 17 137 174 159 145 149 40 13 27 17 149 208 192 190 149 50 14 53 32 221 351 326 373 263 63 22 53 32 288 523 498 518 263 Bore size (mm) Magnet Threads Nut Rod end male threads Foot (including mounting bolt) Front flange type (including mounting bolt) Rear flange type (including mounting bolt) Auto switch mounting screw (M3 X 0.5 x 10l) Double clevis type

IZD10_eng

Use two M3 screws for mounting the sensor head(prepare separately). Recommended tightening torque for M3 screw : 0.61 to 0.63Nm. 7 Mate M3 bolt to the bolt mount surface. Mounting from the opposite side leads to cause the breakage of the sensor head. The sensor head body is common with GND due to the sensor structure.

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

x 0.5 x 12.5l and M3 x 0.5 (hexagon bolt) (hexagon nut) 6 2-M3 x 0.5 (through) 2-M5 x 0.8 thread depth 4.5 (piping port) IN 7 2-M3 x 0.5 (through) 13 + ST 2-M5 x 0.8 thread depth 4.5 (piping port) (same on reverse side) 10 2-M3 x 0.5 thread depth 4.5 (same on reverse side) 4 8 6 11 22.5 (13) (10 + 1/2ST) 4 Model ST 13 + ST 45 + ST 58.5 + ST 10 + 1/2ST CXS6-10-XB19 10 23 55 68.5 15 CXS6-20

SMC Wireless System EtherNet/IP ® compatible

Round head screw (M3 x 8) 4 pcs. EX600-ZMV2 (Specialized for the SY series) Enclosed parts: Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 2 pcs. -103No.EX-OMU0028-D 3.

SMC Wireless System PROFINET compatible

Round head screw (M3 x 8) 4 pcs. EX600-ZMV2 (Specialized for the SY series) Enclosed parts: Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 2 pcs. -114No.EX-OMW0006-D 3.

ZQ-OM01401

ZQ-OM01401-B / / ZQA No.ZQ-OM01401-B 2 1. 5 2. 9 3. 11 3.1. 11 3.2. 12 3.3. 13 3.4. 14 3.5. 16 4. 17 5. 19 6. 20 7. 21 8. 28 9. 32 10. 35 11. 37 12. 40 13. 42 1 - No.ZQ-OM01401-B /ZQA *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Since there are other applicable auto switches than listed, refer to page 9-14-11 for details.

EX500

M12 connector (for socket), 10 pcs. 4 3 Socket connector pin arrangement 11 14 Terminal no.

ML2B

Yaw moment M3 = W4 x L2 L2 YES Is there any influence of noise? (Refer to Caution on Handling on pages 6 and 7.) Install a noise filter.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Since there are other applicable auto switches than listed, refer to page 9-14-11 for details.

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

PF2D

1 q t i 16-11-40 5 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuit and wiring example 60 70 176 z to , are terminal numbers.

VZ1000

DIN Rail Manifold DIN Rail Manifold Common SUP/Common EXH Note) For more than 11 stations, supply air to both sides of 1(P) port and exhaust air from both sides of 3(R) port.

Platform Cylinder Series CXT

1.5 4 6 8.5 14.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 1 0.5 6 8 10.5 16.5 7 6 11.5 13.5 16.5 22.5 11 10.5 16 18 20.5 26.5 5 5.5 9 10 8.5 12 5 (2.5) 9 9.5 13 14 12.5 16 4.5 (2) 10 (7.5) 12 (9.5) 14.5 (12) 20.5 (18) Note 1) ( ): Denotes the values of D-A93.

Low Profile Guide Type

Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.

CXT

16 20 25 32 40 5.5 6 2.5 0.5 1 1.5 4.5 4 7.5 9.5 9 11.5 5.5 6 10 11 12 16 14.5 15 11.5 9.5 10 7.5 0 0 3.5 5.5 5 7.5 3.5 3 6.5 8.5 8 10.5 1.5 2 6 7 8 12 1.5(4) 4.5 5 9 10 11 15 2(4.5) Bore size (mm) 1.5(1) 3.5(1) 3(0.5) 5.5(3) Long stroke 12 16 20 25 32 40 1 0.5 6 8 10.5 16.5 11 10.5 16 18 20.5 26.5 9 9.5 13 14 12.5 16 5 5.5 9 10 8.5 12 7 6 11.5 13.5 16.5 22.5 5(2.5) 8 8.5 12 13 11.5 15 10

Compact Cylinder with Air Cushion Series RQ

Hs A Auto switch mounting height mm Proper auto switch mounting positions mm D-F9 D-F9V D-F9W D-F9WV D-A9V D-F9V D-F9WV D-F9BAL D-A9 D-A9V Bore size (mm) D-F9BAL Bore size (mm) Hs Hs Hs A B A B A B 20 22.5 25 22 25 9.5 3 13.5 7 12.5 6 24.5 27 24 20 32 11 5.5 15 9.5 14 8.5 27 29 26.5 25 40 12.5 4.5 16.5 8.5 15.5 7.5 30.5 32.5 30 32 50 17 7 21 11 20 10 36.5 38.5 36 40 17 12.5 21 16.5 20 15.5

Speed Controller with One-touch Fittings

AS4002F-11 AS4002F-13 AS-31B AS-32B AS-33B AS-34B AS-35B AS-34B AS-33B AS-36B AS-32B AS-37B AS-38B M3 M3 AS-34B AS-36B 4 4 AS-35B AS-37B AS-32B AS-34B AS-36B AS-38B AS-41B AS-42B AS-44B AS-45B M4 M4 4 4 AS-45B AS-42B AS-44B AS-47B AS-46B Precautions when options are ordered Threaded studs for manifold are not included when L-bracket and DIN rail mounting bracket are ordered.