CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 0.1 0.3 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 22 27 27 32 41 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 8 11 11 13 16 59 67 73 77 85 112.5 121 133 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 15 17 17 21 21 16

LX

20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 20 20 5.1 5.1 2.6 2.6 0.6 0.6 0.1 0.1 30 30 3.4 3.4 1.7 1.7 0.4 0.4 0.1 0.1 Refer

KJ

(inch) Connection thread UNF NPT H (Width across flats) Min. port size D1 Note) D2 L1 M Weight (g) Model L2 KQ2LF01-34 KQ2LF01-35 KQ2LF03-34 KQ2LF03-35 KQ2LF07-34 KQ2LF07-35 KQ2LF07-36 KQ2LF11-35 KQ2LF11-36 KQ2LF11-37 KQ2LF13-36 KQ2LF13-37 14.29 17.46 14.29 17.46 14.29 17.46 22.23 17.46 22.23 23.81 22.23 23.81 12 20 12 20 13 21 33 28 40 45 44 49 20 23.5 20.5 24 22 25.5 26 27.5 28 32 30 34

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 20 (5 Port/Body Ported Common SUP Common EXH), Stations: 20 Stations

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 20 Stations, A B Port Size: -, P R Port Thread: -

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

ZP

1.8 ZPT50 7.5 50 53 19.5 25.5 51.5 16 18 12.5 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 5 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer Connection Male thread Pad Form Bellows

CLS

20 25 47 47 53 60 60 67 43 43 43 48 48 60 31 31 36 41 46 56 14 14 14 17 17 20 19 19 22 26 26 30 19 19 19 24 24 29 14 20 20 25 25 30 Up to 1000 3 5 30 46 114 M14 x 1.5 161 78 18 160 110 146 128 212 112 255 16 64 110 Up to 1000 130 M16 x 1.5 182 95 23 180 132 169 144 236 118 275 18.5 74 120 Up to 1200 16 21 35 30 34 42 5 5.5 6 149 M18 x 1.5 204 106 36 118 200 167 195 162 265 132 320 18.5

Cylinder with Lock

Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95

Cylinder with Lock

238 20 16 72 M10 x 1.5 22 22 7.5 4 11.5 11.5 6 6 46 410 100 Up to 1000 5 M20 x 1.5 32 20 261.5 20 18 89 M10 x 1.5 22 26 9.5 4 17 17 10 3 51 443.5 With Rod Boot [mm] Bore size d e f h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 54 36 23 75 88 100 113 138 163 188 213 238 263 288 313 40 Lock unit side

MU

These are installed with double clevis style and double knuckle joint style as standard. 2.4-17 Plate Cylinder Series MU Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (mm) (mm) Applicable pin Model MUl25 MUl32 MUl40 MUl50 MUl63 Z LX RR 8.5 10 11 16 16 LD LU 11 14 15 20 20 LC 16 18 20 28 28 LB 27 31 36 46 46 Z LA 35.5 41 47 62 62 LX RR 8 10 10 16 16 LB 27 31 36 46 46 L 52.5

Modular F.R.L. Units

20 20 20 20 20 20 15 The combination of metal bowl: 2 and 8 is not available. 16 When choosing with W: Filter drain port, the drain cock of a lubricator will be with barb fittings. 17 For pipe thread type: NPT.

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

MB

20 30 35 40 45 45 55 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 22 30 35 35 40 40 up to 500 up to 500 up to 600 up to 600 up to 800 up to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 With Mounting Bracket Refer to basic mounting (B) for other dimensions and with rod boot.

10

20 D-A5l D-A6l n (Different surfaces) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 2 (Different surfaces, same surface) 20 25 25 n (Same surface) 20 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) D-A59W 1 15 25 25 2 (Different surfaces

CV/MVGQ

90 102 115 140 25 37.5 50 75 19 41 46 10-15-30 31 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 20, 25, 32, 40 How to Order RE A B Bore size Solenoid valve voltage 20 25 32 40 REC 20 mm 25 mm 32 mm 40 mm Standard Option 1 2 5 Mounting style 3 4 6 9 100 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 12 VDC Other CX Basic style Axial foot style

CV/MVGQ

19 90 102 115 140 25 37.5 50 75 41 46 10-15-30 31 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 20, 25, 32, 40 How to Order RE A B Bore size Solenoid valve voltage 20 25 32 40 REC 20 mm 25 mm 32 mm 40 mm Standard Option 1 2 5 Mounting style 3 4 6 9 100 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 12 VDC Other CX Basic style Axial foot style

VM

P.T. 20 N F.O.F. 30 O.T. 50 T.T.

ZP

-B5 ZP3-T06B;15-B5 ZP3-T06B;20-B5 38.5 46 57 64.5 10.3 10.9 12.3 13.4 38.5 46 57 64.5 10.3 10.9 12.3 13.4 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

F

~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC -20~60OC Material Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Polyurethane Courtesy of Steven Engineering, Inc. !