CEx-OMP0016

Adjusting Method 35 Chapter 11: Stopping Operation 11-1. Over run 36 11-2. Dispersion of Stopping Position 36 Chapter 12: Manual Operating Procedure 37 Chapter 13: Installation / Wiring 13-1. Installation of Cylinder 3839 13-2. Electrical Wiring 40 13-3.

1.63

12.5 13 15 16 20 A 11 10.5 12 14 13.5 16.5 B 7 8.5 9 11 12 16 A 6 7.5 9.5 9 12 B 8 8.5 10.5 11.5 15.5 Hs 24.5 26 29 33 38.5 45.5 Hs Hs 22 24 26.5 30.5 36 43 A 7 6.5 8 10 9.5 12.5 20 25 32 40 50 63 20 25 32 40 50 63 32.5 35.5 39 44.5 51.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting. 514 Auto Switch Mounting MGPW Series Minimum Stroke for

20

VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98

44

19 11 19 16 25 23 31 45 38 51 75 46 59 83 1/8" (3.18) 0.086" (2.18) 1 7 8 14.5 5 1.5 M L1 KQB2 5/32" (4) 0.098" (2.5) H1 1.4 7 8 14.5 5 1.8 d KS KX 1/4" (6.35) 5/32" (3.95) 5 10 12 16.2 6 3.3 A L2 H2 KM 5/16" (8) 0.236" (6) H3 14 12 14 18.4 6.6 5.3 KF Connection thread 3/8" (9.53) 1/4" (6.35) 16 15 17 21.4 7.6 5.6 M 1/2" (12.7) 3/8" (9.53) H/DL L/LL 43 17 19 23 8.5 8.5 Reference dimensions

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103 6

Thermo-chiller

Description (The gure shows the HRS-150-A-20.) q Hose (I.D.: 0.6 in [15 mm], Length: 27.5 in [700 mm]) Relief valve set pressure: 46 psi [0.32 MPa] (The relief valve starts to open when the circulating fluid discharge pressure reaches 46 psi [0.32 MPa] .)

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

/8 (ports P) Applicable cord O.D. 4 to 6.5 78.5 Max .10 71.5 71 Light (DZtype only) 67.5 59 32 17 2 2-4.5 (mounting holes) P 19 35 P Pg.7 2-Rc(PT) 1/8 (ports P) A A A 11 20 26 49 Approx. 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc(PT) 1/8, M5 x 0.8 (port A) 19 35 n-Rc(PT) 1/8 (port R) 47.5 11 R R P = 19 19 L: Dimension table n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

PFxx-OMY0005

45 44 43 42 41 40 39 38 37 36 35 34 33 32 Item Temperature measured value (PD) Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Pressure measured value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Accumulated Accumulated System Fixed Pressure Temp.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Series ANB1 38 dB (A) 30 m Page 5-10-9 Exhaust cleaner Ensures clean plant air, reduces noise pollution by over 35 dB (A), and removes over 99.9% of all oil mist. 99.9% Series AMC Page 5-10-11 35 dB (A) 0.3 m Page 5-10-13 Precautions/Specific Product Precautions Exhaust Cleaner for Vaccum (Series AMV) Exhaust Cleaner for Clean Room (Series AMP) Page 5-10-15 Related Products 5-10-1 2 Silencer

Silencer Series AN

Fitting Connection Series AN10 to 30-C RoHS How to Order 10 C AN 20 Applicable one-touch fitting size Body size Symbol Port size Applicable model AN10 AN10 AN15 AN20 AN20 AN30 Symbol 10 15 20 30 06 07 08 10 11 12 6 1/4 8 10 3/8 Connection type 12 Symbol Connection type C One-touch fitting connection Specifications Fluid Compressed air Max. operating pressure Note 1) 145psi (1.0 MPa) Noise

Membrane Air Dryer

(For the part number of the dew point indicator, refer to pages 10 and 11.) 3.

3 Port Air Operated Valve

441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

MGQ

For details, refer to page 8-30-32. 8-20-11

Transfer

NN NN MM MM KK LL KK LL 2 x PA (Port for operating cylinder) J I J 2 x PA (Port for operating cylinder) F F F 76.5 91 110 H 73 88 106 J 40 46.5 55 K 46 58 68 M 13 15 19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5

CY1F

Refer to "Replacement Actuator (Cylinder)" on page 11 about how to order . 2.

Hydraulic Filters

16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 3.5 63 199.5 0 25 (1B) 0 1 0 1 32 (1 1/4B) 106 120 80 56 100 120 60 435 545 285 87 4 x M10 x 1.5 150 260 347 455 214 50 0 23 4.6 40 (1 1/2B) 50 (2B) 155 100 70 45 361 152 94 62 60 0 0 4 x M12 x 1.75 2 x M8 x 1.25 28 14 6.4 4.5 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x

RZQ

Rc1/4 30 17 14 3 8 5.5 71 19 63 130 102 39.5 36.5 21.5 21 45 77 16.5 15 M16 x 2.0 103 7 36 28 60 9 M10 x 1.5 14 Rc1/4 18 4.5 10.5 6.5 84 19 10-10-10 11 3 Position Cylinder Series RZQ Foot style: RZQL Foot Style (mm) B + Full stroke L Bore size (mm) A LH LS B L LD LG 32 30 107.7 82.5 18 6.6 4 66.5 Special cap bolt 40 33 92 76 117.2 18 6.6 4 50 39 96.5 73.5 126.7 22 9 5 LY RE A B 63 46 102

CNS

11 10 Since this is a guideline including hysteresis, not meant to be guaranteed.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Note 5) M and MO type connectors cannot be selected for the model with the pressure sensor or the pressure switch for vacuum. 11 - Doc. no.