Stations: 18 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D (DIN Rail Mounting), CE Compliant: No

Body: 5 (Base Mounted), Stations: 18 Stations, Port Size: N3T (5/32" One-touch Fitting)

Manifold Type: 42 (Base Mounted), Valve Stations: 18 Stations, A, B Port: N3T (5/32" One-touch Fitting NPTF)

Series: 1 (VQZ1000), Stations: 18 Stations, Port Size: N3T (5/32" One-touch Fitting)

Series: 2 (VQZ2000), Stations: 18 Stations, Port Size: N3T (5/32" One-touch Fitting)

Series: 2 (VQZ2000), Stations: 18 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: N (Name Plate)

Series: 2 (VQZ2000), Stations: 18 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: D0 (DIN Rail Mount w/o DIN Rail)

Series: 1 (VQZ1000), Stations: 18 Stations, Port Size: N3T (5/32" One-touch Fitting), Option: R (External Pilot)

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

LED Display 22 Specification 25 Specifications 25 Dimensions 26 End Plate Model Indication and How to Order 27 Summary of Product parts 28 Mounting and Installation 30 Wiring 30 Specification 32 Specifications 32 Dimensions 33 IO-Link Master Unit Model Indication and How to Order 40 Summary of Product parts 40 Mounting and Installation 41 Wiring 41 LED Display 42 Specification 44 Specifications

PF-OMM0004_C

13.6 2.7 14 PF3W720 3/8 1/2 78 54 30 60 40.6 15.2 27 18 39 30 18 13.6 2.7 12 PF3W740 1/2 3/4 98 71 38 68 48.6 19.2 32 28 49 35 28 16.8 2.7 12 PF3W711 3/41 124 92 46 77 57.6 23 41 42 63 48 28 18 3.5 14 S T U V W WX Y Z PF3W704 24 22 32 40 50 4.5 5 1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G

Series CE1

200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X 1.25 61.5 35 19 Rc(PT) 1/4 89.5 49 60 9 M10 X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-12

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

10 15.3 4.2 19 ZH15DS-10-03-12 22.45 AMJ 93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

HRX-OM-Y098

Alarms that allow continuous pump operation are shown in Table 5.4-18 Alarms that allow continuous pump operation (1/2) and Table 5.4-19 Alarms that allow continuous pump operation (2/2).

MHZ

Normally closed Normally open MHZL2-16S 16 12 27 145 MHW MHZL2-20S 20 18 33 290 Single MHZL2-25S 25 22 50 515 MRHQ 13 acting MHZL2-10C 10 8 70 38 MHZL2-16C 16 12 140 Single acting, Normally closed Misc. 57 MHZL2-20C 20 18 290 85 MHZL2-25C 25 22 515 DNote 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

9@0@2 MHZA-A0603C MHZA2-6C MHZA-A0607 MHZA2-6H Main body of adaptor Mounting screw for adaptor Seal kit MHZA-A0608 MHZA2-6K End boss assembly MHZA-A0609 MHZA2-6M MHZA-A0610 MHZA2-6E 12-2-18 18 Parallel Style Air Gripper Compact Series (Without Auto Switch) Series MHZA2-6/MHZAJ2-6 Construction: With Dust Cover MHZAJ2-6 Double acting/With fingers open Single acting/Normally open @2 i !

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

10 18 The body mounting reference plane should be used as a standard when mounting onto equipment.

HRX-OM-W060

Alarms that allow continuous pump operation are shown in Table 5.4-17 Alarms that allow continuous pump operation (1/2) and Table 5.4-18 Alarms that allow continuous pump operation (2/2).

Square Tube Type Air Cylinder Series MB1

Contents 32 40 50 63 80 100 MB32-PS MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS Kits include items 14 (2pcs.), 15, 16 & 18 from the table above.

Auto Switch Guide

However, there is no problem in terms of contact output, when an output signal exceeds 1 mA or more. 20D-A90V Data OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Dimensions (mm) Recommended flow m3/min (ANR) Model Port size R Effective area (mm2) Weight (g) A B C 1 8 ANB1-02 15 10 51 22 ANB1-01 22 81 25 18 35 93 30 21 94 107 46 24 175 133 50 41 462 190 74 41 612 230 74 60 871 271 86 70 1.2 or less 2.7 or less 3.8 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 1 4 ANB1-03 35 3 8 ANB1-04 60 1 2 ANB1-06 90 3 4 ANB1-10 160 1