Vacuum Gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum -65 3.2 5.1 8.6 13 20 31 52 pressure -60 3.0

240

Dimensions [mm] Model L1 L2 L3 A B C D E F G J LEPS6-25 127.1 138.6 11.5 16.5 21 24.5 28 16.5 28 36 76.4 LEPS6-50 156.6 169.6 13 22 45 30 52 22 52 60 107.4 393 LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS10 D E C B 4 10 22 ( ) +0.025 0 ( ) +0.025 0 3H9 depth 3 3H9 depth 3 2 x M5 x 0.8 thread depth 10 4 x M4 x 0.7 thread depth 6 28 24 16 K 25 14 Table operating range Note 1) [1] 1

PSxx-OML0002CN

No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating

Digital Pressure Switch

The display units cannot be changed. : The unit change function is 13 not available in Japan due to a new measurement law. Product failure Replace the product. Key lock mode Check if the key lock mode is turned on. Turn off the key lock mode. The buttons cannot be operated. 14 Product failure Replace the product.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC13-02(F) 45.9 Rc1/8 pilot (12) port G1/4, Rc1/4 IN(1) port 16.5 15 2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 6 22 22 58 6 25 25 50 15 15 G1/4, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Mounting position MODEL PB1011 PROCESS PUMP 16 (78.1) SUPPLY PRESS AIR 0.2~0.7MPa VOLTAGE DC ON OFF 2-4.5 Mounting hole MADE IN JAPAN 2-M4 x 0.7 Female mounting threads Thread depth 6 Silencer (AN120-M5) Option (PB1011 built-in solenoid valve type only) AIR SUP (pilot air supply port) Rc 1/8 FLUID IN Rc 1/8 9 11 22 13 SUP IN 11 18.5 32 EXH Foot bracket Option 45 AIR EXH (pilot air exhaust

Digital Pressure Switch

M5 01 N01 C4H C6H N7H C4L C6L N7L Port size M5 x 0.8 R1/8 NPT1/8 4 mm One-touch fitting Straight type 6 mm 1/4 inch 5/32 inch 4 mm One-touch fitting Elbow type 6 mm 1/4 inch 5/32 inch Pressure-sensing part Silicon Materials in fluid contact Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR C3604 (Electroless nickel plating), SUS304, NBR part POM, SUS304, NBR, C3604 Piping

Low Profile Slide Table Series MXF

) N 2 ( 1) x 60 28 Possible to use as operating port 2 x M5 x 0.8 Note) N x M5 x 0.8 thread depth 9.5 60 (Insert) 5H9 +0.030 0 depth 5 A 12 8.5 6 78 9 64 15 22 30 33.5 25 51.5 37 5H9 depth 5 +0.030 0 92 NN x 4.2 NN x 8 26 11.5 8.5 H 2 x M5 x 0.8 thread depth 12 5.5 NN x M5 x 0.8 NN 2 ( 1) x H 13 G Section AA A M 12 Operating port 2 x M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

20 Width across flats 8 Width across flats 3 A 4-M5 x 0.8 depth 7 (Plug: M-5P) 2-M5 x 0.8 Piping port H 17 M6 x 1 10.5 26.7 11 5 5.5 34 35 8.5 4-M6 x 1 +0.030 0 depth 4 4H9 depth 4 4H9 Prepared hole diameter 5.1 A 6.5 19 320.05 +0.030 0 30 0.50.05 W B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 47 46 13 10.5 depth 2 4H9 J 8 +0.030 0 +0.030 0 depth 2 4H9 16.5 14.5 Section AA 5 Mounting

KC

(mm) <M5> <M5> Weight (g) Applicable tubing KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 M5 x 0.8 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 18 2.1 2.6 2.4 4 8 1 8 10 11.8 12 14 M5 x 0.8 10 16 14 20 27 25 34 43 48 41 Reference dimensions

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

VM

-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-30G VM

ChemicalThermo-con

-HW19 Temperature controller model HED003-C2A Part number of set HED003-W2A13 HED003-W2A19 HED003-W2B13 HED003-W2B19 HED005-W2A13 HED005-W2A19 HED005-W2B13 HED005-W2B19 HED007-W2A13 HED007-W2A19 HED007-W2B13 HED007-W2B19 HED003-C2B HED005-C2A HED005-C2B HED007-C2A HED007-C2B Heat exchanger HED H W 007 13 Cooling capacity Tube size 003 005 007 13 19 1/2" x 3/8" 3/4" x 5/8" 300 W 500 W 750

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

MRQ

13 13 12 12 11 10 9 20 25 30 2 2.5 3 23 23 22 21 21 20 19 18 16 15 2) Using the cylinder body installed vertically: To operate the rotary cylinder with the cylinder body installed vertically, the total load that is applied to the tip of the piston rod must be within the thrust of the rectilinear portion in which the load ratio is taken into consideration.

2/3 Port Valve for Various

Series VXA21/22 Dimensions (Orifice Size: 3 mm, 4.5 mm, 6 mm) VXA212/VXA213/VXA223/VXA224 Bracket Pilot port Spanner spout, hexagon Model Port size P Rc A B C D E F With bracket Port size G H I J 1 8 1 4 1 4 3 8 10 VXA21 VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth

IR1000/2000/3000

Note 1) For O-ring numbers 8 and 13, use mini-flicking type. Note 2) Replacement part numbers correspond to the item numbers in the figures. 14-5-18 18 Precision Regulator Series IR1000/2000/3000 Dimensions IRV1000-01 IRV2000-02 53 55 16.5 2.3 30 22 2.3 41 (R) F.R.L.

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0