5 Port Solenoid Valve

connector: D-sub connector (25P) (Conforms to MIL-C-24308) 1/2" 1(P) port VQC 4/5 VQC 4/5 R20 (Min. bending inner radius) VQZ SMC SMC SMC SMC SMC SMC SMC 101.2 44 95.5 77.3 SQ 60 43.5 42.7 VFS 15.7 12 11.5 20.6 27.9 1/8" PE. port VFR 33.5 37.5 1/8" External pilot port VQ7 45.2 D-sub connector cable assembly (25P) AXT100-DS25-015: 1.5 m 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port

SYJ300/500/700

It is already built-in to the rectifier circuit. 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

V100

) (D, Y) VS N.C.

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C8 (ø8 One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N3 (5/32" One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C6 (ø6 One-touch Fitting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: C4 (ø4 One-touch Fitting)

SI Unit: w/o SI Unit, Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: ø4 One-touch Fitting, Mounting Method: -, US Option: -

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: EX500, 128 Points Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: Direct mounting, Port pipe connection port diameter: ø6 single-action pipe fitting (A-, B-Port) / ø10 single-action pipe fitting (P-, E-Port), Specification: Internal Pilot Specifications

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: EX500, 128 Points Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: Direct mounting, Port pipe connection port diameter: ø8 single-action pipe fitting (A-, B-Port) / ø10 single-action pipe fitting (P-, E-Port), Specification: Internal Pilot Specifications

Type: Base for Manifolds, Communication Protocol: N/A, Output Format: -, Type: EX500, 128 Points Compatible Tie-Rod Base Manifold, Number of Inputs/Outputs: -, Connector: N/A, Mounting Method: Direct mounting, Port pipe connection port diameter: ø5/32" single-action pipe fitting (A-, B-Port) / ø3/8" single-action pipe fitting (P-, E-Port), Specification: Internal Pilot

SI Unit: w/o SI Unit, Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: ø6 One-touch Fitting, Mounting Method: -, US Option: -

SI Unit: w/o SI Unit, Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: Both Sides 2~20 Stations, Pilot: Internal Pilot, A, B Port: 5/32" One-touch Fitting, Mounting Method: -, US Option: -

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(-L) 95.5 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-C8(-L) 96 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N7(-L) 92.6 2.8 depth 6.2 2.5 depth 5 2 x P Q 2 x P Q PF2M7mW-C4/C6/C8/N7(-L) A D A D 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 46.9 (Max. 53.9) 38.5 (30.9) 38.5 (30.9) 3 3 C 18 C OUT IN 18 2 x One-touch fitting Applicable tubing O.D.: 4, 6

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

Fieldbus System

Select a valve from R, U, NS or NZ when the SI Unit common is negative common. 18 Series SY3000/5000 Dimensions: Type 10/For EX600 (M12 Connector)/Series SY3000 (mm) C2 C3, N1 C4, N3 C6, N7 2 4 SS5Y3-10S6l l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Note 2) (L5) L1 ( ) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B)

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid