Slider Type/Ball Bushing Bearing

24 40 M4 x 0.7 11 10.5 30 27 24 19 M8 x 1.0 6 40 20 3.5 16 60 17.5 85 103 77 1.0 0.5 12.5 30 60 M4 x 0.7 M8 x 1.0 8 68 26 4.3 20.5 80 PA dimensions are for split from center.

10

MPa 100 100 Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 0.5 MPa 120 120 80 80 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 60 60 0.4 MPa 0.3 MPa 80 80 0.4 MPa 0.3 MPa 40 40 0.3 MPa 0.3 MPa 0.2 MPa 40 40 0.2 MPa 0.2 MPa 20 20 0.2 MPa 20 40 60 80 100 120 0 40 80 120 160 200 0 0 0 40 80 120 160 20 40 60 80 100 120 140 Gripping point distance R [mm] Gripping point distance R [mm] Gripping point distance R

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Because 2.5 N < 48 N, it is applicable. 18 N -X 10 0 80 70 60 50 40 30 20Point of application L (mm) Data Therefore select MIW (MIS) 12.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Because 2.5 N < 48 N, it is applicable. 18 N -X 10 0 80 70 60 50 40 30 20Point of application L (mm) Data Therefore select MIW (MIS) 12.

JXCx-OMT0061CN

(P.71) * 7 4.2 (P.18) PLC CC-link LED LED PWR ALM L ERR CC-Link L RUN CC-Link LED 8. LED (P.28) (LEC)LEDL RUNLEDL ERR/PLC PLC 17. CC-Link (P.77) 4.2 (P.18)4.3 PLC (P.18)PLC 10 - 8() ()() () 9 10. (P.32) PLC 14.

Series VQ Base Mounted Metal Seal/Rubber Seal

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

43.6 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7 40-L3 4 5 01 02 M plug connector (M): SYJ7 40-M3 4 5 01 02 DIN terminal (D): SYJ7 40-D3 4 5 01 02 M8 connector (W0): SYJ7 40-W03 4 5 01 02 Applicable cable O.D. 3.5 to 7 141.8 [146.2] Approx. 300 (Lead wire length) 91 57.5 [64.5] 83.5 42.1 72.2 M8 x 1 Pg7 57.1 62 (Lead wire length) Approx. 300 44.5 68.6 [75.6] 20 20 20 20 87.6 37.6

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14) 1.2 (52) (2 x 4.2 Mounting holes) 44 (For E type) (49.5) 0.3 mm2 (42.5) 40 40 14.7 125 (39.4) 123.3 L (Lead wire length) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} 39.4 0.9 18 2 1.2 (23.9) EB P EA 39.5 13 36 2 x 2.2 (Positioning for manifold gasket) (66) L plug connector with cover (

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3.2 4 6 4 6 6 8 6 8 10 12 10 12 12.7 12.7 10 10 16.5 13.7 12.7 16.5 17 16.5 17 18 17 18 21 21 22 13.5 12.7 13.5 17 18 17 18 21 22 21 22 22.4 25.2 6.2 11.8 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 11.8 14.8 14.8 19.8 19.8 26.5

AS-FG/ASD-FG

AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03 AS431FG-N04

VQ5000

VQ550 Indicator light Indicator light 214 121.8 195 (200.5) 91.5 59.5 105.8 (Port A) 17.5 13.5 (Port B ) 2 2 73 (78.5) 122 106 59.5 (Port A) 17.5 13.5 (Port B) 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 66 40 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole G1/2 Electrical entry 18 31.5 37 41 50 98 G1/2 Electrical

MHY2/MHW2

Holding point L (mm) 120 80 160 200 20 40 60 Holding point L (mm) 80 0 20 40 60 Holding point L (mm) 80 100 120 MHW2-25D MHW2-40D MHZ2 160 50 Pressure 0.7MPa Pressure 0.7MPa 140 MHZJ2 0.6 0.6 40 120 Holding force (N) Holding force (N) 0.5 0.5 MHQ 100 30 0.4 0.4 80 0.3 MHL2 0.3 20 60 0.2 0.2 40 10 MHR 20 0 20 40 60 Holding point L (mm) 100 80 20 40 60 Holding point L (mm) 80 100 120 140 160

Mechanical Valves Series NVM, NVFM, NVZNI

Supplv Pressure 220 PSIG (15 Kgf/cm2) Operating Pressure 0-150 PSIG (0-9.9 Ksf/cm2) Operating Temperature 40-1 40"F (5-60.C) Media AirAir| AirlLiq.' AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

IIIIIII

Supplv Pressure 220 PSIG (15 Kgf/cm2) Operating Pressure 0-150 PSIG (0-9.9 Ksf/cm2) Operating Temperature 40-1 40"F (5-60.C) Media AirAir| AirlLiq.' AirlLiq' 3-5 6-8 9-11 11-12 NVFM 250 Mech. Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.

ZX

Red Diode Coil Black Light/Surge voltage suppressor Coil 13-2-40 40 Vacuum Module: Vacuum Pump System Series ZX ZX Table (1) Valve Unit/Combination of Supply Valve and Release Valve (Refer to page 13-2-42 for details specifications.) ZR Components Solenoid valve Supply valve Release valve Air operated External release N.C. (VJA314) ZX1A None None Air operated N.C. (ZX1A) N.O.

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

HRX-OM-R005

Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS060-W-20-(BJM)) HRS Series 9.4 Cooling capacity 9-7 HRX-OM-R005 Chapter 9 Documents 9.6 Pump capacity 9.6.1

70astamb1

Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22

mb1

84 94 94 114 114 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 13 14 15.5 16.5 19 19 9 6.5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5 27 32 32 37 37 10 14 18 18 22 26 4 4 5 9 M6 x 1 M14 x 1.5 10.5 M8 x 1.25 M18