81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40
Qty. 1 6 11 2 7 12 3 8 13 4 9 14 5 10 15 2 port valve is specified for the gate valve and the cleaning valve. 7 valves + 1 valve + 4 valves = 12 valves 668
type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 Single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction Flow Rate of Vacuum Suction Type (Reference values) Bore size (mm) 10/15 20/25/32 6 Item 1.05
.: 0.5MPa Operating oil: Additive turbine oil Class 1 (ISO VG32) Oil piping length:1m MK/MK2 Flow control valve Flow control valve Throttle valve Throttle valve Stop valve RSQ/RSG CCVS10, 11, 12, 13 CCVS20, 21, 22, 23 CCVS02 RSH CE1 CE2 ML2B ML1C REA REC CCVS30, 31, 32, 33 CCVL20, 21, 22, 23 CCVL02 RHC MTS CC CCVL10, 11, 12, 13 eWithin the reciprocating movement of the actuator, if only the
P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283 275 498 455 15 270 31 80 230 32 15 240 80 284 42 3/4 355 300 568 485 4 6 Refrigerant HFC134a
14 10 M8 x 1.25 5 8 22 16 13 14 12 M8 x 1.25 5 10 22 16 Basic Style (mm) Bore size (mm) A B C D E F H I K L M N OA OB Q RA RB T 20 25 43 37 10 10 36 5.5 M6 x 1.0 43 8 6 22 4.5 M5 x 0.8 7.5 13 10 5 0.8 45 39 10 12 40 5.5 M6 x 1.0 48 10 6 26 4.5 M5 x 0.8 7.5 13 10 5 0.8 6 Series C55 Dimensions 32 to 63 2-G1/8 Port size Auto switch Z Q F 2 x 4-OB counterbore RB H thread effective depth C J
-11SD 17.9 31.8 43.3 21 6 3/8" 12.8 39.3 27.8 17 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 29.5 18.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 18.5 43.3 31.8 21 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 32.8 22 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21
Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.
*Refer to pages 66 to 68 for details on the auto switch mounting brackets. 21 Mechanically Jointed Rodless Cylinder Linear Guide Type 16, 20, 25, 32, 40 MY1H Series 9091How to Order M9BWL 25 300 90 MY1H Linear guide type Series compatible with secondary batteries 90 91 Material restriction With lub-retainer Number of auto switches Nil S n Linear guide type 2 pcs. 1 pc. n pcs.
Applicable Auto Switch/Refer to page 12-13-1 for further information on auto switches.
Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.
L size 19 248 18 235.5 17 223 16 210.5 15 198 14 185.5 13 173 12 160.5 11 148 No. L size 20 260.5 30 385.5 29 373 28 360.5 27 348 26 335.5 25 323 24 310.5 23 298 22 285.5 21 273 No. L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15
Actuated/ Pilot Operated Cv 1.0 13-17 NVZM 450 Mech. Actuated/ Pilot Operated Cv 0.55 13; 18-20 Materials Body Aluminum DieCast Spool, Stem, Spring Stainless Steel Seals & Poppets Buna N Weaqhtoz.
Type: 21 (Common SUP/Individual EXH), Stations: 06, Bracket: None, Thread: 00T (NPTF)
Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 04, Type: 1 (Common Exhaust), Thread: 00T (NPTF)
Series: 5 (VFA5000), Manifold: 21 (P.R Port Size 1/2), Stations: 05, Type: 1 (Common Exhaust), Thread: 00T (NPTF)
Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 3 Stations, A B Port Size: 00T (NPTF)
Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: 00T (NPTF)
Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 10 Stations, A B Port Size: 00T (NPTF)
Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 9 Stations, A B Port Size: 00T (NPTF)