VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5

Speed Controller with One-touch Fitting

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 M5 x 0.8 Gasket seal Note 3) AS121F-U10/32AS131F-U10/32 10-32UNF Note 3) AS221F-01 AS231F-01 1/8 Note 3) AS221F-02 AS231F-02 1/4 Note 3) Note 3) R NPT Note 1) Sealant AS321F-02 AS331F-02 1/4 AS321F-03 AS331F-03 3/8 AS421F-04 AS431F

Aluminum High Vacuum Angle Valve

M: Size 16, 25, 40 only.

SMC

16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143 MXS Air slide table 1322Dimensions / MXS16 1322Axial piping (16) MXS16-P 132253.3 Maximum 6.5 Operating port 2-M5 x 0.8 26 12 23.5 12 Other dimensions are the same

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 Model F 35 35 35 40 30 55 65 70 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 789 MXS 1322Air Slide Table Dimensions: MXS16 1322Axial piping (16) MXS16-P 1322Air Preparation Equipment Pressure Control Equipment

Battery-less

, 25 Version 3.6 (V3.6, S3.6) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 25, 32, 40 25, 32, 40 25 25 50 32, 40 Version 3.4 (V3.4, S3.4) 25, 32, 40 25, 32, 40 25, 32, 40 25, 32, 40 16, 25 JXCM1 series JXC51/61 series Version 3.5 (V3.5, S3.5) or higher 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 16, 25, 32, 40 8, 16, 25 JXCmF series All versions Blank Controller

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Model Port size Seal method Metric size Inch size Elbow type Universal type 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS AS12l1FG-M5 AS13l1FG-M5 M5 x 0.8 Gasket seal Note 3) AS-FE AS12l1FG-U10/32 AS13l1FG-U10/32 10-32UNF Note 3) KE AS22l1FG-l01 AS23l1FG-l01 1/8 Note 3) AS22l1FG-l02 AS23l1FG-l02 1/4 Note 3) Note 3) AS-FG AS-FG R NPT Note 1) Sealant AS32l1FG-l02 AS33l1FG-l02

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 Single Double Closed center Exhaust center 0.60 0.60 0.56 0.60 0.43 0.43 0.15 0.20 0.15 0.15 0.13 0.15 0.59 0.59 0.59 0.59 0.30 0.30 0.22 0.22 0.15 0.15 0.14 0.14 Body ported Base mounted (With sub-plate) 2 position Body side M5 x 0.8 3 position M5 x 0.8

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) (mm) Q1 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Size 30 50 63 80 100 Size 30 50 63 80 100 Symbol: A35 Symbol: A36 Symbol: A37 Machine female threads into the short shaft.

REA/REB

4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5 7.5 45 44 16 18 10 9 46 80 8.5 16 21.6 5 9.5 9.5 53 52 21 23 18 9 54 90 8.5 7 4 14 8 16 26.4 6.5 11 9.5 64 26.5 24.5 64 26.5 110 66 12 9.5 16 5 7 8 8 33.6 20 14 10.5 76 74 28.5 12 35 30.5 78 10 10.5 130 5 25 10 20 41.6 11.5 14 8 PA N PB PW M JK L LD P J MM NN HT Model HS REAL15 REAL20 REAL25 REAL32 REAL40 95 5.6 8 7.5 45 70 75 9.5 M8 x 1.0 M5 x 0.8

REA/REB

7.5 45 44 16 18 10 9 46 80 8.5 16 21.6 5 9.5 9.5 53 52 21 23 18 9 54 90 8.5 7 4 14 8 16 26.4 6.5 11 9.5 64 64 24.5 12 26.5 26.5 66 7 9.5 110 5 20 8 16 33.6 10.5 14 8 74 30.5 28.5 76 35 130 78 12 10.5 20 5 10 10 8 41.6 25 14 11.5 PA PB PW LD M N L JK NN P MM Model HS HT J REAL15 REAL20 REAL25 REAL32 REAL40 95 7.5 45 70 8 9.5 75 5.6 M5 x 0.8 M6 x 1.0 M5 x 0.8 M8 x 1.0 21 25 90 120 50 5.6 10

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

x 0.5 0.9 Type SS5YJ3-32-M5 0.25 0.25 0.25 0.24 0.32 0.32 0.33 0.32 0.20 0.21 0.20 0.22 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 0.19 0.18 0.26 0.21 0.25 0.28 0.29 0.27 0.25 0.27 0.25 0.34 0.060 0.059 0.060 0.057 0.081 0.079 0.082 0.079 0.048 0.050 0.048 0.057 0.32 0.30 0.29 0.27 0.33 0.35 0.34 0.34 0.10 0.21 0.19 0.10 0.25 0.27 0.15 0.18 0.19 0.24 0.17 0.24

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 1-5-16 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both

Auto Switch Guide

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 6-16-37 38 Solid State Switch Direct Mounting Style D-Y59 /D-Y69 /D-Y7P(V) A B A B For details about certified products conforming to international standards, visit us at www.smcworld.com.

SZ3000

14 185.5 175 155.5 15 198 187.5 166 16 210.5 200 176.5 17 210.5 200 187 12 223 212.5 197.5 13 235.5 225 208 14 L n 12 13 14 15 16 11 10 L n 12 13 14 15 16 11 10 L1 L2 L3 L4 L1 L2 L3 L4 235.5 225 208 14 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5 275 260.5 12.5 298 287.5 271 13.5 248 237.5 218.5 15 260.5 250 229 16 273 262.5 239.5 17 285.5 275 250 18 285.5