CE2

, Z directions, 3 times each Between case and AC line: 1500 VAC for 1 min. (3 mA or less) Withstand voltage Between case and 12 VDC line: 500 VAC for 1 min. (3 mA or less) Power consumption 100 VA or less Between case and AC line: 500 VDC, 50 M or more Insulation resistance 690 g Weight Refer to operation manual of CEU2 regarding detailed positioning system.

Brake mechanism added

, Z directions, 3 times each Between case and AC line: 1500 VAC for 1 min. (3 mA or less) Withstand voltage Between case and 12 VDC line: 500 VAC for 1 min. (3 mA or less) Power consumption 100 VA or less Between case and AC line: 50 M or more (500 VDC measured via megohmmeter) Insulation resistance Weight 690 g Refer to operation manual of CEU2 regarding detailed positioning system.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

M plug connector Rated voltage 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking B type Locking C type Nil B C 240 VAC, 50/60 Hz Other Without auto switch B S 50 90 1 1 G CVRA1 B S 50 90 1

Ejector Valve Unit Series ZYY/ZYX

200 VAC 110 VAC [115VAC] 220 VAC [230VAC] Connector type Lead wire length 3 m Connector type Output specifications (Vacuum switch) Note) The connector box type and serial transmission type are only available with 5 (24 VDC).

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 1 2 3 4 5 6 7 9 Solenoid valve configuration Single solenoid Double solenoid Closed center Exhaust center Pressure center Manual override 1 2 3 4 5 24 VDC 12 VDC None Locking

CE2

, Z directions, 3 times each Between case and AC line: 1500 VAC for 1 min. (3 mA or less) Withstand voltage Between case and 12 VDC line: 500 VAC for 1 min. (3 mA or less) Power consumption 100 VA or less Between case and AC line: 500 VDC, 50 M or more Insulation resistance 690 g Weight Refer to operation manual of CEU2 regarding detailed positioning system.

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l consumption (W) 100 VAC 200/40 Initial power / Power 200 VAC 800/40 Heater assembly number XLA25-60S-1 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. H 5 100 VAC 200/40 400/70 Initial power / Power consumption (W) 200 VAC 800/40 1600/80 Note 1) Initial power and power consumption are nominal values. The heaters are PTC thermistor type design.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 200 VAC 800/40 800/50 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. H5 Initial power / Power 100 VAC 200/40 400/70 400/80 200 VAC 800/40 1600/80 1600/80 consumption (W) Note 1) Initial power and power consumption are nominal values.

Economy Valve

Lead wire color (grommet) Voltage Color SOL 100 VAC Blue Cylinder Xa Xb Xc Yb Ya Mode 200 VAC Red Upward High speed a DC Red (+), Black () Low speed b Downward High speed c How to use the needle Low speed d Rotate the needle clockwise to close, and counterclockwise to open.

Pneumatic Purification

/DC SL-WVX1/2 As above, but with SMC 1/2 NPT VXD valve and no filterstop 110 VAC* SL-WVX3/4 As above, but with 3/4 NPT VXD valve and no filterstop 110 VAC* SL-WVX1 As above, but with 1 NPT VXD valve and no filterstop 110 VAC* FS Filterstop only MK111 Timer and Cord for SL MK12 Timer for filters 0-120 minutes, fixed discharge 2 seconds * other voltages available ISO 8573.1 Filtration Classes

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

, 110 VAC, 200 VAC, 220 VAC, 24 VDC Allowable voltage range (%) 15 to +10% of rated voltage Coil insulation Class B or equivalent 50 Hz 5.6 Apparent Inrush 60 Hz 5.0 power 50 Hz 3.4 (VA) Holding 60 Hz 2.3 Power consumption (W) 1.8 Surge voltage suppressor and indicator light Available as option Note 1) Pilot pressure range should be 0.1 to 1 MPa (14.5 to 145 psi).

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

, 50/60 Hz 00 01 Without sub-plate Rc 1/8 (6A) Accessory 2 200 VAC, 50/60 Hz Without sub-plate (For manifold) 4 Indicator light (DC is possible only for DL.)

0.4

Property Item () 23 (+) SOL.a Conductor resistance /km, 20C (+) () 11 65 or less 11 stations SOL.b (+) () 24 SOL.a Withstand voltage VAC, 1 min. (+) () 12 1000 12 stations SOL.b () 25 (+) Insulation resistance M/km, 20C COM. 5 or more (+) 13 () Orange Red Positive common Negative common Note) The minimum bending inner radius of D-sub connector cable is 20 mm. specifications specifications

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

0.3 m Pre-wired connector 2-wire (14) AC magnetic field (Single-phase AC welding magnetic field) D-P4DWSE Solid state auto switch 2-color display Series C(L)KQG 24 VDC MK D-P4DWL 3 m 2-wire Grommet CKQ CLKQ Relay, PLC Note 1) D-P4DWZ 5 m 2-wire (14) 2-color display CK1 D-P79WSE 24 VDC 0.3 m Pre-wired connector Reed auto switch DC/AC magnetic field CLK2 Series C(L)KQP D-P74L 3 m 24 VDC 100 VAC

Electronic Pressure Switch Series (Separate Type)

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Set pressure range 0.1 to 0.4 MPa 0.1 to 0.7 MPa 0.02 to 0.3 MPa 0.05 to 0.7 MPa 0.1 to 1.0 MPa 7 to 100 kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) 24 to 125 VDC 100 to 250 VAC to 100 VDC to 100 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less

70pvpump

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Set pressure range 0.1 to 0.4 MPa 0.1 to 0.7 MPa 0.02 to 0.3 MPa 0.05 to 0.7 MPa 0.1 to 1.0 MPa 7 to 100 kPa 27 to 80 kPa 4.5 to 28 VDC (ZSM1-115) to 100 VDC to 100 VAC 24 to 125 VDC 100 to 250 VAC 24 to 220 VDC 100 to 550 VAC Voltage 100 VAC/DC or less