Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

CM2

101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 68 81 93 106 131 156 17 36 20 62 9 10 40 40 25 60 112 122 72 85 97 110 135 160 185 17 36 25 64 9 10 40 40 32 60 114 124 72 85 97 110 135 160 185 17 36 32 88 10 11 53 53 40 77 143.5 154 77 90 102 115 140 165 190 19 46 40 With rod boot (mm) ZZ Symbol Z l Stroke 1 to 50 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 1 to 50 51 to 100

60

Rated voltage Note) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz Rated voltage Note) Coil insulation type Note) 1 2 3 4 5 6 7 8 J 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC Nil H Class B Class H DIN terminal and DC spec. are not available.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Igm: Leakage current of the servo motor (Found from table 11.2.) 120 Leakage current [mA] 100 80 60 40 20 0 2 5.5 14 38100 3.5 8 22 60150 30 80 Cable size [mm ] 2 Fig. 11.7 Example of leakage current per km (lg1, lg2) for CV cable run in metal conduit 11 30 11.

CG1

TU TZ TX TY TV TW 8d9 10d9 12d9 14d9 16d9 18d9 18d9 22d9 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 38.3 42.1 53.8 64.6 79.2 97.2 110 130 42 42 48 56 64 74 72 93 16 20 22 30 36 46 85 100 28 28 28 30 36 46 45 60 18.1 20.7 23.6 27.3 29.7 34.3 35.8 39.8 49.4 58.4 72.4 90.4 (mm) Part No.

VZ100/300/500

(V) 24, 6, 12, 48 15 to +10% of rated voltage 1.8 (With indicator light 2.1) [24 VDC: 75 (With indicator light 87.5)] Body ported Allowable voltage fluctuation (%) Power consumption (W) [Current mA] DC Note) 4.5/50 Hz, 4.2/60 Hz 100 VAC: 45/50 Hz, 42/60 Hz 200 VAC: 22.5/50 Hz, 21/60 Hz Note) Inrush Apparent power (VA) [Current mA] AC Holding 3.5/50 Hz, 3/60 Hz 100 VAC: 35/50 Hz, 30/60 Hz

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

HRL

60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump Circulating fluid head pressure head pressure

0.55

T 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other CE-compliant Conduit terminal with indicator light TS Conduit terminal with surge voltage suppressor TZ Conduit terminal with light/surge voltage suppressor DL DIN terminal with indicator light DS DIN terminal with surge voltage suppressor DZ DIN terminal with light/surge

MGP

size (mm) Load rate 40% or less 16 50% or less 20, 25 60% or less 32 to 100 Ball Bushing Bearing Slide Bearing MGPM16 to 100 MGPL16 to 25 Under 50 stroke Under 100 stroke 100 80 63 P=0.5MPa P=0.5MPa 100 50 50 40 25 20 10 40 20 30 Load weight m (kg) Load weight m (kg) 32 2 3 4 5 25 20 16 10 5 4 16 2 3 1 1 0.2 0.3 0.4 0.5 0.5 0.2 0.3 0.4 0.1 10 100 0.1 10 100 20 30 40 200 50 50 200 20 30 40

MQQ

6 Mounting 15, 30, 45, 60, 75, 100 10 15, 30, 45, 60, 75, 100 16 Standard type Foot type Front flange type Rear flange type (except 6) Single clevis type (non-integrated type) Double clevis type B L F G C Note) 15, 30, 45, 60, 75, 100 20 15, 30, 45, 60, 75, 100 25 Strokes are available in 1mm increments by installing spacers in standard stroke cylinders.

Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

VZS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VZS3000 Rc 1 4 VZS With surge voltage suppressor (FS) Single Double 3 position (Closed center) Page VFS (Standard) 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 24 VDC 3-7-23 3 position closed center VS4 2.4 2.4 VQ7 (Option) 24 VAC, 50/60 Hz 48 VAC, 50/60 Hz 110

New

12 100 15 100 15 100 Note 1) Power consumption, Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

LEC-OM071xx

2 1 to 65535 10 reference units/s2 100 Pn80C Acceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn80D 1st Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80E 2nd Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80F Deceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn827 Linear Deceleration Constant

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

24

32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100 100 80 100 100 Load mass m [kg] Load mass m [kg] 80 80 80 100 80 10 10 80 5 10 29 30 51 50 300 200 100 5 10 29 30 51 50 300 200 100 Stroke [mm] Stroke [mm] 444 Model Selection MGP Series L L m m Horizontal Mounting Ball Bushing (19) L = 50

LG1H

(S2) 200 to 230 VAC encoder) Absolute Power supply voltage 50/60 Hz AC servo motor (S7) AC servo motor (S3) 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz AC servo motor (S6) 100 to 120 VAC Pulse input type 50/60 Hz AC servo motor (S7) (For absolute AC servo motor (S6) 200 to 230 VAC encoder) 50/60 Hz AC servo motor (S7) Dimensions LECSA 2 x 6 Mounting hole 40 135 (Bearing surface

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

VEX1

N Port size A Model B C D K N O Q R S T U E F G H I J L M P Port 2 (A),1 (P) Port 3 (R) VEX5510 VEX5511 160 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 x 1 x depth 9 116.5 50 25 10 7 25 173 80 60 98 Center , ,1 25 VEX5710 VEX5711 17 82 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 x 1 x depth 6 136.5 1 4 1 4 1,1 1 Bracket mounting dimensions Grommet