7

For a 15 orifice (VXD242/Port size 1/2), P 0.16 MPa, for a 20 orifice (VXD252), P 0.055 MPa, for a 25 orifice (VXD262), P 0.032 MPa 1,000 Port size 2 50 Cv = 49 VX2 Port size 1 1/2 40 Cv = 31 500 400 Port size 1 1/4 35 Cv = 23 Port size 1 25 Cv = 12.5 VXK 300 Port size 3/4 20 Cv = 9.5 VXD VXD 200 VXZ Flow rate Q [L/min] Port size 1/2 15 Cv = 5.5 100 VXS Port size 3/8 15 Cv = 4.5 VXB 50

VFR

Cylinder Speed Chart Bore size Series CM Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB/CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm 20 25 32 40 40 50 63 80 100 125 140 160 Average speed (mm/s) System 800 700 600 500 400 300 200 100 Perpendicular, upward actuation A Horizontal actuation VK VZ 0 800 700 600 500

Free Mount Cylinder for Vacuum Series ZCUK

Symbol 2 to 8 10 to 16 20 to 32 40, 50 02 04 06 08 10 13 16 20 25 32 40 50 Suffix 2 4 6 8 10 13 16 20 25 32 40 50 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 B4 M4 x 0.7 Female thread Applicable cylinder model Symbol M5 x 0.8 B5 M6 x 1 B6 M8 x 1.25 B8 D R D R X11 ZC(D)UK 10 Nil ZC(D)UK 16 to 32 M10 x 1.25 B10 Material Note) -X11 pad: 2 to 8 diameter and flat style

LJ1H

Lateral 0.2 0.1 200 300 500 100 Load point distance (mm) LJ1H20 LJ1H30 10 20 10 Lateral load 100% 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 1000 Horizontal load 50% Horizontal load 100% 1000 Horizontal load 50% 500 500 200 Amount of deflection (m) Amount of deflection (m) 200 100 100 50 50 20 20 10 10 Lateral load 100% 5 Lateral load 50% 5 Horizontal empty weight deflection

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

Vacuum

units al available, wilhod magnal lor auloswilch capabiltv a10 s16-s32 i/5 x 0.8 M5 x 0.8 5-30 5 7 20 32 2 7 8 28 16.5 31 N,l5 x 0.8 1/8 (PT) 5-50 6.6 8 26 40 o l o 20 33 1 9 M5 x 0.8 1i8 (Pn 5-CU 8 32 50 10 1 0 '10 20 22 43.5 zcDUKDs2 l1/8(PT) 1/8 (PT) 5-50 1 1 . 5 10.5 40 62 5 1 2 11 't2 29 22 35 R 40 1 9 , 5 7.6 Depth 12.5 15.5 85.5 1 2 T'6 46 21 9.5 Deplh at '13,5 5 1S.5 96 33 20 M5

HRX-OM-X084

Applicable model HRR010-A/W-10/20-T1 Rated flow*1 (50/60Hz common) L/min 5 Maximum pump Pump head*2 m 35 (50/60Hz common) Output W 400 Circuit protector A 15 Recommended earth leakage breaker capacity A 15 Cooling capacity W Due to an increase in heat generation of the pump.

Thermo-con/Rack Mount Type

500 0 0 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Pump Capacity (Thermo-con Outlet) HECR002-A When high-pressure pump mounted 0.14 0.10 0.12 Discharge pressure [MPa] Discharge pressure [MPa] Tap water 0.08 Tap water 0.10 0.06 0.08 Ethylene glycol 20% Ethylene glycol 20% 0.06 0.04 0.04 0.02 0.02 0 0 1 2 3 4 0 0 1 2 3 4

RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.

RSH/RS1H

Bore size (mm) 20 32 50 63 80 Bore size (mm) 20 32 50 63 80 Contents Part no.

Compact

(1100), (1200), (1300), (1400), (1500) Page 170 2000 20 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 25 10 LEMHT Linear guide double axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000), (1100), (1200), (1300), (1400), (1500) Page 170 32 2000 20 Strokes shown in ( ) are produced upon

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

12 16 0.1 5 10 20 30 40 50 100 200 0.01 5 10 20 30 MXW Overhang L (mm) Overhang L (mm) Maximum Speed: Up to 400 (mm/s) Graph (5) Graph (2) Maximum Speed: Up to 300 (mm/s) MXJ 0.3 50 40 30 20 MXP 0.2 10 MXY 0.1 2 3 4 5 Mass W (kg) Mass W (kg) 40 32 MTS 0.04 0.05 1 0.03 0.5 0.4 0.3 0.2 25 20 8 0.02 16 12 0.01 0.1 5 10 20 30 5 10 20 30 40 50 100 200 Overhang L (mm) Overhang L (mm) Graph (3)

Water-cooledThermo-chiller

) 5 25 4 20 HRW015-H 3 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 15 2 HRW008-H 10 1 5 HRW002-H 0 10 20 30 40 50 60 70 80 90 0 0 10 20 30 40 50 60 70 80 Temperature difference t (C) (Circulating fluid temperature Facility water temperature) Circulating fluid temperature (C) When pump inverter is operating at frequency of 60 Hz (maximum).

Information

temperature [C] [60 Hz] 0 10 20 30 40 50 Circulating fluid temperature [C] HRS050-A-20 8000 7000 6000 5000 4000 3000 2000 1000 00 10 20 30 40 50 Circulating fluid temperature [C] 8000 7000 6000 5000 4000 3000 2000 1000 00 10 20 30 40 50 Circulating fluid temperature [C] Cooling capacity [W] Cooling capacity [W] 25C 25C 32C 32C Ambient Ambient temperature temperature 40C 40C [50 Hz] [60 Hz

Air Slide Table Series MXQ

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 2 Series MXQ Theoretical Output IN OUT Application of the dual rod system generates double the output of conventional cylinders.

CJ2X/CUX/CQSX/CQ2X/CM2X

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

0.4

SQ How to Order Connectors VFS Lead wire length (m) ZS-20-A ZS-20-5A-50 Without lead wire (Connector 1 pc., Socket 4 pcs.) With lead wire Nil 30 50 0.6 3 5 VFR Flow/Exhaust Characteristics of Ejector Unit VQ7 (The flow rate characteristics are for the supply pressure of 0.5 MPa.)

CV/MVGQ

Socket Hook Data 10-15-3 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVM3 20, 25, 32, 40 How to Order RE A B Bore size Solenoid valve voltage 20 25 32 40 REC 20 mm 25 mm 32 mm 40 mm Standard Option 1 2 5 Mounting style 3 4 6 9 100 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 12 VDC Other CX Basic style Axial foot style Rod side flange style Head