VCL

1/4 n-1/8 : Thread type LQ H H P = J (Pitch) 2 LVN L Dimension (mm) TI/ TIL n (stations) Model Dimensions 3 5 6 7 8 9 10 2 4 PA L1 103.5 138 172.5 207 241.5 276 310.5 345 69 VV2CL2 L2 115.5 150 184.5 219 253.5 288 322.5 357 81 PAX L3 127.5 162 196.5 231 265.5 300 334.5 369 93 L1 115.5 154 192.5 231 269.5 308 346.5 385 77 PB VV2CL3 L2 127.5 166 204.5 243 281.5 320 358.5 397 89 L3 139.5 178

VCW

(V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231 369 265.5 300 154 115.5 192.5 346.5 L1 77 231

VCW

D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 T : Thread type 2 5.5 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 (44) W T R Z (Y) L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

mm 600 mm 1000 mm 2000 mm 3000 mm L-type plug connector, without connector LO Grommet, with 0.3 m lead wire (Latching/AC type: Not applicable) G Lead wire length of the plug connector The lead wire length for a valve with a lead wire is 300 mm.

E-MY2B_E_A

Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45

Refrigerated Air dryer Series IDU/IDF

40C 13 to 15 R22 37 6100 5200 IDF37C/37C1 R 11/2 55 9000 7650 IDF55C R 2 75 12400 10500 IDF75C 2 1/2B flange 23000 IDF120D 20 120 30 IDF150D 25000 150 40C R407C 3B flange 16 to 18 38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

(V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 2 5.5 : Thread type L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231 369 265.5 300 154 115.5 192.5 346.5 L1 77 231

PF3A7xxH.eng

(For accumulated decrement) [ 150] 150 L/min (PF3A703H) [ H] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Caution Press the button once to reduce the value by one digit, press and hold to continuously reduce. [ 600] 600 L/min (PF3A712H) : If the error cannot be reset after the above measures are taken, then please contact SMC.

PF3A7xxH-L.eng

Only air, N2, are applicable. [6000] 6000 L/min (PF3A712H) [F 1] [ 150] 150 L/min (PF3A703H) The accumulated flow has exceeded the accumulated flow range. (For accumulated increment) [H_1 ] Setting of Hysteresis [ 300] 300 L/min (PF3A706H) Do not use the product in a place where static electricity is a problem. Otherwise it can cause failure or malfunction of the system.

HRX-OM-W002

(Up to 150 records will be recorded.) 10 Alarm history menu 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

HRX-OM-X071

(Up to 150 records will be recorded.) 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-X071 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

XL-OMV0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C

XL-OMY0002

800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0002 . 1 S 12 ( SUS304 M 3 M SUSU316L 8 11 SUS304 2 7 A6063 6 9 6 9 10 9 5 SUS304 4 5 10 4 10 S O S O XLD-25 XLD-40,XLD-

JXCx-OMX0009

Ctrl Comm ALM D (01-150) Cause of The abnormal LED communication station detection Alarm clear method (LRUN) error RWr0,bit F (Upper-level device) Turn on RWw0, bit 2: Reset flag, and then turn ON Ry0B: RESET.

JXCx-OMT0062

RESET Ctrl Comm ALM (1-150) D SVON Input *1) Cause of The abnormal LED communication station detection Alarm clear method error (LRUN) RWr0,bit F (Upper-level device) Turn on RWw0, bit 2: Reset flag, and then turn ON Ry0B: RESET.

CEx-OMB0060

That is, the shortest reset processing time takes 300 ms and it will be longer for longer reset signal input time. [ Reset input time: 10 ms to 100 ms ] [ Longer reset input time ] Reset processing time Reset processing time (reset input time + 150 ms) 300 ms 150 ms ON ON Reset signal Reset signal OFF 10100 ms Note 8: Reset in RS-232C communication When a reset command is received, a response

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

XLG Series

H 4 S y m b o l Initial power/ Power consumption (W) 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

VQ20/30

310.5 266.8 241 231 261.5 273 229.8 204 194 225 235.5 192.8 167 157 187.5 198 155.8 130 120 150 160.5 118.8 93 83 112.5 123 81.8 56 46 75 85.5 44.8 17-2-91 Series VQ20/30 Single Unit Option Bracket assembly (with 2 mounting screws) For fixing this solenoid valve.

MLGP

, 175, 200, 250, 300, 350 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 RLQ Manufacture of Intermediate Stroke MLU Spacer installation type Spacers are installed in the standard stroke cylinders. 20 to 32: Stroke can be modified by the 1 mm interval. 40 to 100: Stroke can be modified by the 5 mm interval.