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VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be connected to L1 and

ISA2

250 0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure

VM

(Option) Foot bracket and manifold mounting possible. 9.9 mm2 SA Maximum frequency (Mechanical operation type) 300 c.p.m. or less Not required (Use turbine oil class 1 ISO VG32, if lubricated.)

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

VQ

Consult SMC for other voltages. 2.9-12 Series VQ100 Plug Lead Unit Manifold (VV3Q12) L1 10.8 3.5 5 L2 3 P E 8.9 P E 11 Round head screw M1.7 X 14 W (L type) 28.7 26.5 W (M type) 300 33.8 300 2-3.5 Mounting hole 4-M5 SY P, E port Manual override SYJ 11.5 P=10 300 Latching, 100V AC or more VK H (M type) U side D side n 5 4 3 2 1 300 H (L type) VZ VT VT 42.2 L type M type 36.3 VP W

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

T

Model Model L D L D TCU0805-1-N-X6 TCU0425-1-N-X6 1 N x 8 31 3 to 90 L x 5.2 + 200 N x 4 18 1 3 to 90 L x 5.9 + 200 8 5 TCU0805-2-N-X6 TCU0425-2-N-X6 2 42 3 to 40 L x 3 + 200 N x 16 L x 4.4 + 200 N x 8 2 3 to 90 4 2.5 28 TCU1065-1-N-X6 TCU0425-3-N-X6 1 52 3 to 45 L x 5 + 200 N x 10 N x 12 3 3 to 63 L x 2.9 + 200 28 10 6.5 TCU1065-2-N-X6 TCU0604-1-N-X6 2 3 to 35 N x 20 52 L x 3 + 200 N x 6

0.01

Specifications ISA2-G1 ISA2-G5 ISA2-H1 ISA2-H5 Model Detection distance Fluid Operating pressure range Recommended detection nozzle 0.01 to 0.25 mm 0.03 to 0.50 mm Dry air (filtered to 5 m) 30 to 200 kPa 1.5 5 or less 8 or less 12 or less 50 to 200 kPa 2.0 10 or less 15 or less 22 or less 50 kPa 100 kPa 200 kPa Supply pressure Consumption flow rate L/min (ANR) 12 to 24 VDC 10%, Ripple (p-p

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Terminal no. 1 5 2 Power supply cable 1 2 3 4 5 Brown White Blue Black Gray 1 2 3 4 5 3 4 3 4 Plug connector pin arrangement Reverse key Socket connector pin arrangement Connections 200 EX9-AC002-4 40.7 44.7 M12 M12 6.6 Core wire color Terminal no.

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

2-wire 24 V A73C Connector A54 100 V, 200 V Grommet Diagnosis indication (2-color) A79W A59W F79 F7NV F59 3-wire (NPN) IC circuit 5 V, 12 V F7P F7PV F5P 3-wire (PNP) Grommet J79 F7BV J59 12 V 2-wire 100 V, 200 V J51 J79C 12 V Connector 3-wire (NPN) F79W F7NWV F59W IC circuit PLC 5 V, 12 V Diagnosis indication (2-color) 3-wire (PNP) F7PW F5PW F7BWV J79W J59W F7BA F5BA 24

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

2-wire 24 V A73C Connector A54 100 V, 200 V Grommet Diagnosis indication (2-color) A79W A59W F79 F7NV F59 3-wire (NPN) IC circuit 5 V, 12 V F7P F7PV F5P 3-wire (PNP) Grommet J79 F7BV J59 12 V 2-wire 100 V, 200 V J51 J79C 12 V Connector 3-wire (NPN) F79W F7NWV F59W IC circuit PLC 5 V, 12 V Diagnosis indication (2-color) 3-wire (PNP) F7PW F5PW F7BWV J79W J59W F7BA F5BA 24

JXCx-OMT0005CN

JX C D 1 LEFS16B-100B-S1CD17S LEFS16B-100 D DeviceNet DeviceNet 1 1 DC24V S T T 7 8 DIN <> LEHZ10K2-4 < >LECPMJ SVRE 1.5 7 - 2.3 *1 DeviceNet PLC JXC-CD-TJXC-CD-S DC24V P5062-5 *1 LE-CP-LE-CP---S ENC *2 120.3 120.3 mm mm MOT 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 PWR DC24V USB A-miniB type JXC-CPW AWG200.5mm 2

SFOD-OMT0005CN

JX C 9 1 () LEFS16B-100B-S1C917 [LEFS16B-100] 9 EtherNet/IP 1 1 DC24V 7 8 DIN <> LECPMJ SVRE X1.5 -7- 2.3 *1 EtherNet/IP PLC P1P2 P5062-5 *1 () LE-CP-() LE-CP---S () LE-CP-* ENC *2 SI MOT 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 PWR DC24V USB (A-miniB type) () JXC-CPW <> ( USB ) LEC-W2 (3m) AWG20(0.5mm

JXCx-OMT0061CN

CN1(P.21) 5.2 CN2CN3: LE-CP-CN3 CN2 5.3 CN4I/O (1) CN4 (3m) 19 - (2) ( USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN4 () 5.4 CN5: CC-Link CN5 PLC (CC-LinK PLC) 20 - 6.

Table of Contents - Tubing

L* N x 4 N x 8 N x 12 N x 6 N x 12 N x 18 N x 8 N x 16 N x 10 N x 20 N x 12 N x 24 D 18 28 28 24 37 37 31 42 52 52 67 67 TCU0425-1N-X6 TCU0425-2N-X6 TCU0425-3-N-X6 TCU0604-1-N-X6 TCU0604-2-N-X6 TCU0604-3-N-X6 TCU0805-1-N-X6 TCU0805-2-N-X6 TCU1065-1-N-X6 TCU1065-2-N-X6 TCU1208 -1-N-X6 TCU1208 -2-N-X6 LX5.9 + 200 LX4.4 + 200 LX2.9 + 200 LX5.3 + 200 LX3.8 + 200 LX2.5 + 200 LX5.2 + 200 LX3 +

V

Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min 301 Max 60 ln/min 401 Max100ln/min Courtesy of Steven Engineering, Inc. !

Series SY100 3 Port Solenoid Valve Rubber Seal

27.8 (In case of AC) 25.3 21.2 VQ 9 A R 6 VQZ 5.5 3 3 9.5 5 4 VZ 19 VS 3-M3 X 0.5 (Piping port) L plug connector (L): SY1 4 (A)-lLll-M3 1 2 M plug connector (M): SY1 4 (A)-lMll-M3 1 2 (Indicator light and surge voltage suppressor) 15.6 (Indicator light and surge voltage suppressor) 45.6 (In case of AC) + P P 36 300 (Lead wire length) 300 (Lead wire length) 39.1 (In case of DC) + 27.7 (In

MGQ

Note 2) Model MGPL (Ball bushing bearing) cannot be used as a stopper. 63 600 500 400 50 300 40 200 32 100 0 10 20 30 40 Transfer speed (m/min) 8-20-6 7 Compact Guide Cylinder Series MGQ Operating Range when Used as Lifter Select the bore size so that the total load mass is bellow the theoretical output (see the table below). l l Bore size (mm) Theoretical output m m 12, 16 40% or below