Sine Cylinder Series REC

Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

Sine Cylinder Series REC

Up to 700 25 150 Up to 700 1500 32 150 Up to 1000 40 200 Up to 1000 Note 1) The cylinder performance may not as expected when stroke is longer than recommended stroke even they are available.

Possible to transfer a workpiece at low-speed.

150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

PFxx-OMJ0005CN

30% 60% 40% 92% 8% 0.525.0 L/min 0.526.3 L/min 026.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.520.0 L/min 0.521.0 L/min 021.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711

High performance type Step Motor Controller (Servo/24 VDC)

Controller and its peripheral devices /Specific product precautions 69 14.1 Design and selection 69 14.2 Handling 69 14.3 Installation 70 14.4 Wiring 70 14.5 Power supply 71 14.6 Ground 71 14.7 Maintenance and inspection 71 15. Troubleshooting 72 3 No.JXC-OMY0002-A JXC5H/6H Controller 1.

SFOD-OMT0009CN

/16 70/16 (2.667) (3.333) (4.375) (4.375) [mm/s] 80 100 100 100 [mm/s] 5 5 5 5 () [mm/s] 7 8 8 8 () LEHS10 LEHS20 LEHS32 LEHS40 K [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) [mm/s] 70 80 100 120 [mm/s] 5 5 5 5 () [mm/s] 8 8 9 9 () 111 No.SFOD-OMT0009CN-B Revision history 2015 9 2019 3 C 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel + 81 3 5207 8249

SFOD-OMT0010

/16 70/16 (2.667) (3.333) (4.375) (4.375) Max. speed [mm/s] 80 100 100 100 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min. speed [mm/s] 7 8 8 8 (Speed tuning control) Model LEHS10 LEHS20 LEHS32 LEHS40 Lead symbol K Lead [mm] 255/76 235/56 235/40 235/40 (3.355) (4.196) (5.875) (5.875) Max. speed [mm/s] 70 80 100 120 Min. speed [mm/s] 5 5 5 5 (Independent and interpolation) Min

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Electric actuators/Common precautions . 66 14.1 Design and selection . 66 14.2 Mounting . 67 14.3 Precautions for Use . 68 14.4 Operating environment . 69 14.5 Maintenance . 70 14.6 Precautions for electric actuator with lock . 70 15.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Do not use it in a line that is kept pressurized because it could cause the body to break. 1106 Air Suction Filter Series ZFA Dimensions: ZFA 100 200 Single unit Bracket ZA ZX ZR Cover opened-up dimensions 70 Element extracted dimensions 55 ZM ZMA ZQ 2 x 4.5 ZH ZU 2 x Port size ZL Note) The above diagram is for ZFA200. The bracket location shows L side.

PA3000/5000/PAX1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

VCS

107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold base part number.

Series VCS

107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

VXA21/22

Model/Valve Specifications Flow rate Orifice size (mm) Max. operating pressure differential (MPa) (1) Proof pressure (MPa) Weight (g) Max. system pressure (MPa) Cv Effective area (mm2) Model VXA3115-00 VXA3125-00 VXA3225-00 VXA3135-00 1.0 1.5 1.5 0.08 1.4 1.0 0.5 1.0 0.3 150 0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150 4.3 3 0.3 4 0.5 9 VXA3245-00 230 Note 1) OAdd the V type

NARM Series

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

FH99

Note 3) The material of seals (AL-128H-V to AL-137H-V) is EPDM-70. 503 A

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air Operated Type Performance Curves/Built-in Solenoid Type/Air Operated Type 1l/min = 0.035SCFM 1MPa = 145psi Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since a large quantity of liquid will be pumped out, use a suitable throttle in the discharge port if problems occur. 16 Series PB1000 Performance Curves/Built-in Solenoid Type/Air Operated Type Cycle 1Hz Cycle 5Hz Cycle 10Hz 70 70 70 60 60 60 50 50 50 40 40 40 Total lifting range m Total lifting range m Total lifting range m SUP=0.7MPa SUP=0.7MPa SUP=0.7MPa SUP=0.5MPa SUP=0.5MPa SUP=0.5MPa

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

107 1/4, 3/8 VCS41 30 50 94 41 13.5 17 36 25 23 M5 8 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 4 Direct Operated 2 Port for Steam Series VCS How to Order Manifolds How to Order Manifold Assemblies (Example) D VV2C S 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

Rotary Actuator/Vane Style Series CRB2

Refer to pages 69, 70 and 79 for details.

New

DC Specification AC Specification (Built-in Full-wave Rectifier Type) Temperature rise (oC) Note 3) Power consumption (W) Note 1) Size Apparent power (VA) Note 1) 2) Size Temperature rise (C) Note 2) Size 1 Size 1 4.5 50 7 60 Size 2 Size 2 7 55 9.5 70 Size 3 Size 3 10.5 65 12 70 Note 1) Power consumption: The value at ambient temperature of 20oC Note 1) Apparent power: The value at ambient