Series AK1000

40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Air-hydro Unit

40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107 116 50 24 40 28 2 40 27 100 80 3/4 135 180.5 132.8 135 M6 x 1 10.5 to 12.5 CCVL2-G-S 66 107 116 50 24 40 28 1 40 27 115 100 80 3/4 135 180.5 124.9 135 CCVL3-G-S 66 66 107 107 116 116 50 50 24 40 28 28 1 40 40 27 27 115 115 100 100 80 80 3/4 135 135 180.5 124.9 135 CCVL0-S 3/4 Pitch of mounting on the wall is CA and CL

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 C95 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CA1 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 CS1 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

85 90 95 100 105 110 70 75 80 85 90 95 100 105 110 115 140 165 75 80 85 90 95 100 105 110 115 120 145 170 90 95 100 105 110 115 120 125 130 155 180 95 100 105 110 115 120 125 130 135 160 185 100 105 110 115 120 125 130 135 140 165 190 105 110 115 120 125 130 135 140 145 170 195 15D (M) 10D (M) 20D (M) 15D (M) 25D (M) 20D (M) 30D (M) 25D (M) 10 35D (M) 30D (M) 15.5 40D (M) 35D (M) 45D (M)

Compact Cylinder Series CQS

D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 D' 35 40 45 50 55 60 35 40 45 50 55 60 40 45 50 55 60 65 70 75 80 85 45 50 55 60 65 70 75 80 85 90 C C' Cylinder model Mounting bolt size Mounting bolt size CQ2 CDQSKB12-5D -10D -15D -20D -25D -30D M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x

Compact Vacuum Unit

/ZB031 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 51 psi (0.35 MPa)) Suction flow SCFM (L/min (ANR)) Air consumption SCFM (L/min (ANR)) Suction flow SCFM (L/min (ANR)) Air consumption SCFM (L/min (ANR)) 14.5 14.5 0.35 (100) (100) (10) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 11.6 Vacuum pressure 11.6 0.28 (80) (80) (8) 8.7 8.7 0.21 Air consumption (60)

REA/REB

Usable range 30 40 50 50 40 30 20 20 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REA63 REA50 50 40 30 REA40 REA32 Load weight W (kg) 20 REA25 10 1 100 200 300 Maximum speed U mm/s 4 Series REA Model Selection 3 Max

Rotary Table/Rack & Pinion Style Series MSQ

m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 274 Rotary Table/Rack & Pinion Style Series MSQ Table Displacement due to Moment Load (Reference values) 100 Arm The following graphs show the displacement at point A, which is 100 mm apart from the center of rotation, where

Air Slide Table Series MXQ

MXQ12-40 0.02 0.04 0.008 MXQ12-20 MXQ12-10 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 0 20 40 60 80 100 20 40 60 80 100 160 40 80 120 Load (N) Load (N) Load (N) 96 Air Slide Table Series MXQ The graphs below show the table displacement when the static moment load is applied to the table.

MGP

PS 24 27 GR-S-010(10g 14 30 1216 30 1216 30 2025 100 3263 100 15 17-2.

Refrigerated Air Dryers

IDF1E 0.75 Rc3/8 IDF2E 1.5 IDF3E 2.2 IDF4E 3.7 Rc1/2 IDF6E 5.5 Rc3/4 IDF8E 7.5 IDF11E 11 IDF15E1 15 Rc1 IDF22E 22 R1 IDF37E 37 R1 1/2 IDF55E 40C 0.7 MPa 55 R2 IDF75E 75 35C 0.7 MPa Model Rated inlet condition Applicable air compressor [kW] Port size IDF100F 100 R2 IDF125F 125 65 (2 1/2B) Flange IDF150F 150 80 (3B) Flange IDF190D 190 IDF240D 240 100 (4B) Flange IDFlE 40C 0.7 MPa IDF370D 35C

2–4

CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 110 135

JXCx-OMT0023

80 0 0 1 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 -500 2000 60 70 1000 1 Position 5 1000 2000 80 80 0 0 control 6 2000 1000 80 80 0 0 7 1000 1000 80 80 0 0 Position command creation USB I/F CN1 CN3 D I/O con trol Personal Servo-on Start Failure, etc. computer USB Note 1.

Rotary Gripper Series MRHQ

MRHQ25C 140 -X Pressure 0.7MPa Pressure 0.7MPa 80 120 Pressure 0.7MPa Pressure 0.7MPa 0.6MPa 0.6MPa MRHQ 100 0.6MPa 0.6MPa 0.6MPa 60 Gripping force N 0.5MPa 0.5MPa Gripping force N 80 MA 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 40 60 0.4MPa 0.4MPa D0.3MPa 0.3MPa 40 0.3MPa 0.3MPa 20 0.25MPa 0.25MPa 0.25MPa 20 0.25MPa 0.25MPa 0 20 40 60 80 100 0 20 40 60 80 100 120 Gripping point L mm Gripping point

Series PF2W Digital Flow Switch For Water

mA; Internal voltage drop: 1 V or less (with load current of 80 mA); Maximum applied voltage: 30 V; 2 outputs Note 5) Switch output Output specifications PNP open collector: Maximum load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputs NPN or PNP open collector (same as switch output) Accumulated pulse output Status LEDs Response time Hysteresis

REA/REB

80 3.

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

VZ100/300/500

It can be used in the vacuum (up to 100 kPa) or low pressure line with 0.15 MPa or less.

Air Slide Table

-75 MXQR12-50 MXQR12-40 MXQR12-30 MXQR12-20 MXQR12-10 0.10 MXQR12-100 0.020 MXQR12-100 0.04 Table displacement (mm) Table displacement (mm) Table displacement (mm) MXQR12-30 0.08 MXQR12-50 0.016 MXQR12-50 0.03 MXQR12-75 MXQR12-40 0.06 MXQR12-75 MXQR12-30 0.012 MXQR12-40 MXQR12-20 0.02 0.04 0.008 MXQR12-20 MXQR12-10 0.01 MXQR12-10 0.02 0.004 0 0 0 20 40 60 80 100 20 40 60 80 100 160 40 80

0.4

RD SD RUN POWER 120 80 10.6 4 46.2 ERR T/R RUN MODEL SB (SI No.EX124-SMB1) 0 1 DIP SW. L8 = 16n + 118.5 100 Drawing shows a SC case.