VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

PFxx-OMX0002

[F 30] Setting of accumulated value hold completed : The value is stored in memory every 2 or 5 minutes.

Direct Solenoid

Th cov6r cannot b rotabd on iha bodv, OBINGMANIFOLD MOUNTING PATTEBN PIPETAPIS I/E'NPTFOT 1/4" NPTF AS SPECINED BYMODEL NUMgER DIMENSIONS A B c D E F G H J K M N P R s 5.4 (128) 2.40 (61) 1.77 (4s) 0.94 (211 0.24 (6) o.a1 (8) 228 (58) 0.8:l (211 2.13 (54) o.a7 (221 1.06 en 0.98 (25) 0.39 (10) 0.79 (20) 0.98 (25) Millimeters In Parentheses PARTS LIST O.ldl n t Noi.qt rYa 316 1 Eody Al3rnbly-ri

Modular Type Lubricators Series AL

Please contact SMC regarding the bowl assembly supply for psi and F unit specifications.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

Air Slide Table/Long Stroke Type Series MXY

Table Deflection (Reference Values) Table deflection due to pitch moment load Displacement at A when load is applied F Table deflection due to yaw moment load Displacement at A when load is applied F Table deflection due to roll moment load Displacement at A when load is applied F A A F A F F L L L L dimension mm L dimension mm L dimension mm MXY6 MXY6 MXY6 100 100 100 MXY8 MXY8 MXY8 100

Air Cylinder NCM Series Stainless Steel Cylinders

3.41 1.06 %-16 0.88 1.37 0.74 15O l1%) o.437 o.75 0.749 o.38 1.56 o.25 3.3A 1.25 3a-16 0.8a 1.25 0.62 5.12 @ gtc' Series NCM Single Acting Spring Rehrrn/Spring Extend Air Cvlinder StainlesJ Steel Cylinder 250 PSr (17.5 25 PSt (1.75 40-140"F 2*20 inch/s6c 500 Standard Strolcc List O When mounting, completely flush the piping and be careful that dust and chiDs do not enler the cylinder.

High Purity Chemical Valve

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N Ammonium hydroxide compatible PPS PFA Metric sizes 03 04 06 08 10 12 19 25 Pilot port thread type 3 4 6 8 10 12 19 25 Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

VQZ1000/2000/3000

Rubber seal 25 or less 33 or less 53 or less VQZ3320 0.54 0.21 2.1 0.54 0.19 2.3 Metal seal Closed center VQZ3000 30 or less 39 or less 59 or less VQZ3321 0.62 0.33 2.4 0.66 0.30 2.7 Rubber seal 134 25 or less 33 or less 53 or less VQZ3420 0.54 0.19 2.4 0.54 0.19 2.3 Metal seal Exhaust center 3 position 30 or less 39 or less 59 or less VQZ3421 0.81 0.38 3.2 0.66 0.30 2.7 Rubber seal 25 or

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

Digital pressure switch for energy-saving control ejector

Normal output Pressure setting Sets the ON or OFF point of the switch output. -70 kPa(P_1) Hysteresis Set the hysteresis to prevent chattering. 10 kPa(H_1) [F 2] Setting of OUT2 Refer to page 25 Same setting as [F 1] OUT1.

Digital pressure switch for energy-saving control ejector

Normal output Pressure setting Sets the ON or OFF point of the switch output. -70 kPa(P_1) Hysteresis Set the hysteresis to prevent chattering. 10 kPa(H_1) [F 2] Setting of OUT2 Refer to page 25 Same setting as [F 1] OUT1.

LVQ

(mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150 60 88 10 7 20

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Plug-in/Plug Lead: Single Unit

Note Conductor resistance /km, 20C 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 10 Cable 25 cores x 24AWG AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 L For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Note) The min. bending radius of D-sub cable is 20 mm.

Series VS

A port B port P A B Pressure gauge adapter Short Long X1S X1L Pressure gauge indication unit: Bar/Psi Blanking plate: VVS8040-11A 3 Solenoid Valve (with M Connector) Comforming to ISO 15407-2 Series VSR/S8-4, 8-2 Dimensions VV801 F-MDO 4 Series VSR/S8-4, 8-2 Dimensions VV801 F-SDGN 5

45

Otherwise, air leakage may result. 1-6-80 Series SX3000/5000 Base Mounted Manifold Stacking Type DIN Rail Mounted Plug-in 45 Type How to Order Manifold How to Order Valve Manifold Assembly Ordering example (Type 45F/D-sub connector (25 pins) type) Type 45F (D-sub connector, 25 pins type) 45 SS5X 3 F D 05 U C4 Double solenoid (24 VDC) Single solenoid (24 VDC) SX3140-5LOZ Series SX3240-5LOZ

Speed Controller with One-touch Fitting

AS-F e !

ZP3

25 Wide selection of piping For 2 piping!

Magnetically Coupled

10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 5, 10, 15, 20, 25, 30, 40 1/4" 6 12 3/8" 10 20 5/8" 15 40 3/4" 20 60 1" 25 80 32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.