5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g3/8, 1/2Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

5% F.S. or less (0 to 90C, based on 25C)70 mA or less710 g1/2, 3/4Karman vortex3-digit, 7-segment LEDl/min, gal(US)/minl, gal(US)0 to 1 MPa1.5 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mA; Internal voltage drop: 1.5

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

1% F.S.30 msAir/Inert gas0 to 50C (With no condensation)0.88 MPa0.05 MPa to supply pressureSet pressure to 0.88 MPa (VY1 01)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

(Direct operated)1 to 5 VDC, 0 to 10 VDC, 4 to 20 mA DC, 0 to 20 mA DC12 VDC ? 10%, 24 VDC ? 10%, 1.8 W or lessDIN terminalCable O.D. ?

VEA

Externally set input impedance 100 k or more Externally set input voltage 0 to 5 V 1 8 External potentiometer 10 k ( W or more): not provided Step response 0.06 s or less (1 A, 95%) Dither frequency adjustable range (DITHER) 120 to 180 Hz (140 Hz when delivered) 0 to 500 mA (0 mA when delivered) Zero adjustable range (NULL) 500 mA to 1 A for input voltage 5 V (1 A when delivered) Gain adjustable

ISA2

or less Switch Output NPN open collector: one output PNP open collector: one output NPN open collector: one output PNP open collector: one output 80 mA 30 VDC (at NPN output) 1.5 V or less (at 80 mA) Yes Maximum load current Maximum load voltage Residual voltage Output protection Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

PSE540/560

Note Connector for PSE200 Description ZS-26-E-4 ZSM Voltage output type 1 to 5 V Current output type 4 to 20 mA Nil 28 1 pc. ZS-28-C 1 pc. Connector for PSE300 PF2 Specifications IF Conforms to CE marking and UL (CSA) standards.

ZSE1/ISE1

1 V or less (With load current of 80 mA) Model Output type Residual voltage Number of outputs PNP open collector 80 mA PF2 IF 1 1 2 1 to 10% of set prss.

ZSE F/ISE

OUT 1 Load current of switch output is more than 80 mA. Over current error OUT 2 Pressure is applied during the zero out operation as follows: 0.071 MPa or more with ISE50/60 7.1 kPa or more with ZSE50F/60F After displaying for 3 seconds, it will return to the measuring mode. Bring the pressure back to atmospheric pressure and try using the zero out function.

ZSM1-115/121

Indicator light IS 3 2 Lead wire R 1/8 Port size ZSM 65 g Weight PF2 IF Electrical Specifications Data ZSM1-115 Supply voltage 4.5 to 28 VDC Output (Open collector) 30 V, Max. 100 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC Operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Lead

ZX

Fluid Set pressure range Hysteresis ZX Accuracy Voltage Port size ZR Weight 50 g Output Open collector 30 V/80 mA Indicator light Light at ON state Current consumption 17 mA or less (24 VDC, at ON state) Operating temperature range 0 to 60C Max. operating pressure 0.2 MPa When using ejector system, instantaneous pressure up to 0.5 MPa will not damage the switch.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

or less 1V or less (With load current of 80 mA) -14 -15 -16 -17 Model PNP open collector 80 mA or less Switch output Residual voltage Number of outputs Hysteresis ZSM 1 1 2 1 to 10% of set press.

AS

Flow Rate and Sonic Conductance Model AS1002F-mA AS2002F-mA AS2052F-mA AS3002F-mA AS4002F-mA Tubing O.D.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

, 40 mA, 20 mA IC circuit, Relay, PLC No Reed auto switch D-A90 D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909

ZSM1-115/121

Indicator light 2 3 Lead wire R 1/8 Port size 65 g Mass Electrical Specifications ZSM1-115 Supply voltage 4.5 to 28 VDC Output (Open collector) 28 V, Max. 40 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC/DC Max. operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Vacuum switch diaphragm

25 to 85C (with no freezing and condensation)NPN open collector: Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA); Maximum applied voltage: 30 V; 2 outputsPNP open collector: Maximum load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates when output