Manifold Specifications

2 87 100 3 125 138 4 163 176 5 201 214 6 239 252 7 277 290 8 315 328 9 353 366 10 391 404 L1 = 38n + 11, L2 = 38n + 24 n: Station Formula for manifold weight M = 0.16n + 0.1 (kg) 4-16-4

Compact and

Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: L2 (Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: X731 (Compatible with Argon

Output Specification: L2 (IO-Link/Switch output 1 + Switch output 2), Units specification: M (SI units only), Piping Specification: 01 (R 1/8), Option 1: W (Lead Wire w/Connector, 2m Waterproof)

Output Specification: L2 (IO-Link/Switch output 1 + Switch output 2), Units specification: M (SI units only), Piping Specification: 01 (R 1/8), Option 1: W (Lead Wire w/Connector, 2m Waterproof), Option 2: A (Bracket)

Rated Flow Range: 0.5 to 50 L/min, Flow Adjustment Valve: With Flow Adjustment Valve, Straight, Port Size: Rc1/8, Output Specification: Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input, Lead Wire: Lead Wire w/Connector, Unit Specification: SI Unit Only, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made to Order: Compatible with Argon and Carbon Dioxide Mixed

V

Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L E T P O R T B Box type D Body type 06 6mm Tube 08 8mm Tube 01 Rc1/8 07 1/4 Tube 09 5/16 Tube T01 1/8NPT V A C U U M P R E S S U R E S 660mm Hg L 360mm Hg D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U N I T (ln/min) Nozzle Diameter mm Specifications

MY1

X x m x g Vertical mounting Mounting orientation Ceiling m Wall m Vertical m Note) Static load m Horizontal m M M m x g x X m x g x X m x g x Z M Static moment z y Y m x g x Y m x g x Y m x g x Z M Z m x g x X m x g x Y m x g M Note) "m" is a weight movable by thrust.

Rotary Clamp Cylinders

m.

•

L M ,. Flat type Flat with rib (mm) Flat type Flat with rib mm M~ .. 'B c l D E Model M 'B C D E F G 1:4 1:6 Y 'A Y .' 1:6 H 1:8 H F G Flat with rib H H Flat Aatwith rib Flat ZPT25g ...

CEx-OMQ0011

ML2B32 15N Va 0.25m/s 0.5MPa L1 0.05m L2 0.05m W W 1 L L1 W W W M We M3 V M1 V <> W max=60N( Va P 19) a1= W = 15 =0.25 W max 60 M 2 max=2Nm( Va P 19) a2= M = 0.75 =0.375 M max 2 <> We=1.410VaW=1.4100.2515=52.2N M max=3.5Nm( V=1.4Va) M 3 WeL 1 =52.50.05 1 =0.88Nm 3 3 a3= M 3 = 0.88 =0.25 M 3max 3.5 M max=12Nm( V=1.4Va) M 1 WeL 1 1 =52.50.05 1 =0.88Nm 3 3 a4= M 1 =

Air Cylinder

Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with ? are produced upon receipt of order. Since there are other applicable auto switches then listed above, refer to page 23 for details.

AC Servo Motor Driver (CC-Link Type)

/speed specifying system selection 0h PC31 LMPL Software limit 0 10STM m PC32 LMPH 0 10STM m PC33 LMNL Software limit PC34 LMNH (3) [I/O setting parameters (No.

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

Direct Solenoid

hd'd.3 p, (1)n at'r@. duodel l l (1) d.r 1s, (2) d.r9, {2) rbr 10, & 0 ) .rr 3 sc0001 6B &l4ilcpssy indLd6ep, (1) 6*.drcn-l@kir'9 opoErord6r r2, (r ) d6r r 5, {2) d6r 9, {2}d6t 10, & sc@02 6C &lsFrd ep *Ey indude. c.p, (1) ruhbr.c.* plugd.l 1 1, 11) hdr.iorrishtsl. dst 13 a 14, (1) (h 1s, {2) .bi 9, l2) d.t 10. & d ) de13 tld@tvos t"t sc 0@3.)o( a0 So|mij ep aEy. indld6 @p, (l ) Eesd M]oding

HRX-OM-T002

Cooling Altitude [m] 1. Max. ambient capacity temp.

HRX-OM-R026

PV SV HRSH Series 5.21Communication function 5-85 HRX-OM-R026 Chapter 6 Option Chapter 6 Option 6.1 Option M [DI water (Pure water) piping] 6.1.1 Option M [DI water (Pure water) piping] This option is for customers who use DI water (pure water) as circulating fluid.

HRX-OM-Q026

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

V

PT* Remove (N) when ordering T NPTF T Y P E 1 Body Ported 3 Manifold Type Common SUP 5 Manifold Type Individual SUP Vacuum SERIES NZM VACUUM EJECTOR MANIFOLD D I M E N S I O N S NZM VA C U U M E J E C T O R M A N I F O L D 1 10 Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W

CQS

F9BWV 3-wire (NPN) 2-wire Relay, PLC 5 V, 12 V IC circuit 3-wire (PNP) 12 V 2-wire 24 V Relay, PLC 3-wire (NPN) 3-wire (PNP) Grommet 5 V, 12 V IC circuit Diagnostic indication (2-color indication) 12V 2-wire Water resistant (2-color indication) Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced