TABLE OF CONTENTS

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

Model Selection 1

Values of pneumatic Kv are different from Cv because the testing method is different from each other. 3 3 Saturated aqueous vapor flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) Water flow rate Q0 [l /min] (When < when Av = 1 x 106 [m2]) 2 Upstream pressure P1 = 1MPa 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local

Prevents Micro-Bubbles

Dimensions LLAA--C Stations 4-Mounting hole for W Y Dimensions (mm) A S K Model LLA2A LLA3A LLA4A LLA5A 11.5 L1 24 L2 L3 29 Sensor (Breathing port) U 2-R 34.5 (mm) H G Station 2 3 4 5 Model C Symbol P N L1 L2 L3 L1 L2 L3 L1 L2 L3 L1 L2 L3 62 93 124 155 E V LLA2A 75 106 137 168 Pitch = B A (OUT) port n-Q 118 149 180 211 P (IN) port 2-Q 74 111 148 185 (Max.

VXP21/22/23

(117 ) 41.5 84 (94) 95(105) 106(117) 60 62 62 84 (94) 95(105) 106(117) 2 VXP2382 VXP2392 1 12 44.5 44.5 ( ): N.O. 17-3-51 10 The VX series will be revised shortly.

SMC Electronic Switch Series Variations

Water will not enter under stated conditions of pressure and time. water tight 7 Protection against indefinite immersion in water under a specified pressure. under water 8 Pressure Units Table 17 Units kPa MPa bar kgf/cm2 atm mmH2O or mmAq mmHg or Torr Pa (N/m2) PSI 1 X 103 1 X 106 1 X 105 1.0197 X 105 9.8692 X 106 1.0197 X 101 7.5006 X 103 1.4500 X 104 1 1.4503 X 101 1 X 103 1 X 103 1 X

Rotary Actuator/Vane Type

Refer to pages 102 to 106 for actuators with auto switches.

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

ZP

58.4 85.1 37 63.5 85.5 27.5 35.5 48.5 -B10 -B12 M10 x 1.5 M12 x 1.75 ZPX HB-B01-B (Female thread) 100 125 I Rc 1/8 Hexagon width across flats 27 11 70 Width across flats 60 4-M5 x 0.8 11 H G F E Y 4 40 C A B D Dimensions (mm) A B C D E G H I Y F Model ZPX100HB-B01-B10 M10 x 1.5 100 103.1 68.6 106.7 47.5 75.5 97.5 35.5 60.5 -B12 M12 x 1.75 ZPX125HB-B01-B10 M10 x 1.5 125 128.5 88.6 135 56 84 106

ZP

127 (Flat, Ball joint type) Specific Product Precautions p. 165 26 Variations Basic Pad ZP Series Vacuum inlet direction Flat type Flat type with ribs Bellows type Thin flat type Thin flat type with ribs Deep type Vacuum inlet direction Single unit p. 32 p. 51 p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106

C85

10 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 12 10 10.5 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 16 12 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 16 16 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 22 20 17 M8 x 1.25 8 G 1/8 106

MB

f l 901 to 1000 h Bore size (mm) e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 801 to 900 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 32 40 50 63 80 100 50 111 36 23 12.5 25 37.5 73 86 98 75 100 125 136 161 186 50 119 41 23 12.5 25 37.5 81 94 106

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8

10

25 37.5 50 75 100 125 150 80 68 56 29 12.5 25 37.5 50 75 100 125 150 175 200 100 76 61 29 12.5 25 37.5 50 75 100 125 150 175 200 125 82 75 27 10 20 30 40 60 80 100 120 140 160 180 200 [mm] Rubber Bumper Bore size [mm] h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 801 to 900 901 to 1000 32 73 86 98 111 136 161 186 40 81 94 106

Electric Actuators

112 106 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 110 104 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 112 106 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 114 108 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300 400 500 600 700 800 900 1000 1200 1500 LG1H202SC 156 to 500 LG1H202PA

SX

) 258-9200-www.stevenengineering.com (Pitch) 2-M5 x 0.8 (Pilot EXH port) 6-Rc 1/4 (P , EA, EB port) Stations (1) (2) (n) 2n-One-touch fittings (Pitch) (A, B port) Applicable tubing O.D.: 6 8 L plug connector (L) M plug connector (M) (Lead wire length) 300 300 (Lead wire length) 115.3(3 position) 127.0 (3 position) (mm) 2 stations 52 42 20 stations 340 330 3 68 58 4 84 74 5 100 90 6 116 106

Air Cylinder NCM Series Stainless Steel Cylinders

5 7*tA 0.50 io.95 o.62 3.84 106 (17e) 0.312 5.+24 0.50 o.6240.25 1.12 0.38 0.251 0.12 0.34 3.84 0.84 Ve-18 0.62 t.17 0.62 4.12 o.4sl1*n o?5 9.r49 &35 1.32 o.50 0.2514.25 o,41 47?

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Values of pneumatic Kv are different from Cv because the testing method is different from each other. 3 3 Saturated aqueous vapor flow rate Q0 [kg/h] (when Av = 1 x 106 [m2]) Water flow rate Q0 [l /min] (When < when Av = 1 x 106 [m2]) 2 Upstream pressure P1 = 1MPa 2 P1 = 0.8MPa 1 0.9 0.8 0.7 0.6 0.5 1 0.9 0.8 0.7 0.6 0.5 P1 = 0.6MPa Ex. 2 P1 = 0.5MPa P1 = 0.4MPa 0.4 0.4 P1 = 0.3MPa Ex. 1

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Station L1 L2 3 96 68 6 153 125 8 191 163 10 229 201 20 419 391 2 77 49 4 115 87 5 134 106 7 172 144 9 210 182 11 248 220 12 267 239 13 286 258 14 305 277 15 324 296 16 343 315 17 362 334 18 381 353 19 400 372 1.2-70 Series SYJ7000 Flat Cable Manifold SS5YJ7-21PStation 41.5 SY Manual override Depress and turn to operate and lock override.

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

l f h h + L8 + VA + Stroke Stroke range (mm) A B d11 D EE PL RT L12 KK SW G BG L8 VD VA WA WB WH ZZ E Bore size (mm) R Without rod boot With rod boot 32 40 50 63 80 100 125 32.5 146 26 7 4 4 4 94 16 12 32 30 M6 x 1 10 22 G 1/8 13 6 M10 x 1.25 47 Up to 1000 Up to 2000 38 163 30 9 5 4 4 105 16 16 37.5 35 M6 x 1 13 24 G 1/4 14 6.5 M12 x 1.25 54 Up to 1000 Up to 2000 46.5 179 37 10.5 6 4 4 106