Ozone Resistant

630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000 1000 2000 3000 1000 2000 1000 3000 5000 7000 3000 5000 7000 3000 5000 7000 20, 30 100 100 200 300 100 300 500 300 500 700 1000 2000 2500 3000 4000 4000-06 5000 6000 1000 2000 3000 4000 4000-06 2550 3050 4050 4050-06 3050 4050 4050-06 2060 2560 3060 4060 4060-06 5060 6060

VQZ100V-OMT0001

/VQZ 95 95 95 95 ,N.O. ,N.O. ,N.O. ,N.O. 3 5 3 4(A)5 4(A)2B 1 1 1 1 1 1 1 1 2 2 2 2 0 0 0 0 2 2 2 2 0 0 0 0 3 3 3 3 1 1 1 1 3 3 3 3 1 1 1 1 5 2 3 () () () (3 ) 5 3 NL R LED R 2(B),CM 10 No.VQZ100V-OMT0001 VQZ Series/ / / / DIN DIN DIN DIN DIN DIN 0.30.4Nm VQZ100 VQZ100 VQZ100 VQZ100 300 300 300 300 VQZ200 VQZ200 VQZ200 VQZ200 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000

High Vacuum Angle Valve

(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

Most sensitive position 7-9-12 13 Reed Switch Direct Mounting Style D-A90(V)/D-A93(V)/D-A96(V) For details about certified products conforming to international standards, visit us at www.smcworld.com.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

Auto Switch Guide

Data Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL Auto Switch Mounting Bracket Part No.

2–4

D-A93.

CQS

Special function Style Electrical entry Indicator Load voltage Auto switch model Wiring (Output) Applicable load 0.5 () 3 (L) 5 (Z) DC AC Perpendicular In-line 5V 12V 100V or less IC A90V A90 Yes No Yes Relay PLC Reed switch Solid state switch 2 wire 24V A93V A93 Grommet 100V 12V 3 wire (Equiv.

Table of Contents

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT () Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+)

CU

Contact protection box OUT() Brown [Red] Reed switch CD-P11 OUT( ) Blue [Black] Weights CD-P12 (g) D-A93(V) Brown [Red] D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Auto switch part no.

CY1F

Applicable load IC circuit, Relay, PLC Load voltage 24V or less 48V or less 100V or less AC DC AC DC AC DC Maximum load current 50mA 40mA 20mA Contact protection circuit None Internal resistance D-A93, D-A93V, D-A96, D-A96V (with indicator light) 1 or less (including 3m lead wire length) D-A93, D-A93V D-A96, D-A96V Auto switch part no.

e-Rodless Actuator

Auto Switch Internal Circuit D-A90 (V) Contact protection box OUT () Brown Reed switch Unit: g Weight Table CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93 (V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93/D-A96

Angle Seat Valve /

For Air 1.6 1.4 Upstream pressure of valve P1 Downstream pressure P2 [MPa] 1.5 MPa 1.6 MPa 1.2 1.3 MPa 1.4 MPa Subsonic 1.0 Critical pressure 1.2 MPa 1.1 MPa 0.8 1.0 MPa 0.9 MPa 0.8 MPa Sonic 0.6 0.7 MPa 0.6 MPa 0.5 MPa 0.4 0.4 MPa 0.3 MPa 0.2 0.2 MPa 0.1 MPa 0 VXB215A D(H) 10 12000 14000 8000 2000 4000 6000 VXB215B E(H) 16000 14000 10 12000 8000 2000 4000 6000 VXB215C F(H) 10 2000 6000 8000

Vacuum Unit

Low noise 60 ZK2A07 (Silencer exhaust) ZK2G07 (High-noise reduction silencer exhaust) 46 dB (A) 1 50 1 Nozzle size: 0.7 (Under SMCs measurement conditions) 40 Noise level [dB (A)] 30 Reduces high-frequency range from 2000 to 20 Hz. 20 10 0 200 2000 20 Frequency [Hz] Suction flow Improved by up to approx. 20% Max. suction flow [L/min (ANR)] Nozzle size Exhaust type 40 80 Approx. 20% High-noise

Fieldbus System

Note) Except SI Unit Manifold Solenoid Valves Manifold Solenoid Valves Manifold Solenoid Valves Series SY3000/5000 Series SV1000/2000/3000 Series S0700 Series VQC1000/2000/4000 IP67 IP40 IP67 IP67 Note) The SY3000/5000, S0700, and VQC1000/2000/4000 are not UL-compatible.

Secondary Batteries

03 04 1/8 1/4 3/8 1/2 Type of setting Regulating pressure range 0 Basic type (Handle) For 90-IR1000/2000 series 0 1 2 0.005 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa For 90-IR3000 series 0.01 to 0.2 MPa 0.01 to 0.4 MPa 0.01 to 0.8 MPa 0 1 2 *Specifications and dimensions for the 90-series are the same as standard products.