Mounting: Basic Style, Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 500mm, Option: Rear Plate, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Speed Control Type: Universal, Applicable Tubing: 6mm, Suffix: Required Selection w/Speed Control

Mounting: Basic Style, Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 450mm, Option: Rear Plate, Auto Switch: B54--Reed, DC Volt >5 <24, AC Volt <200, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 450mm, Option: Rear Plate, Auto Switch: B54--Reed, DC Volt >5 <24, AC Volt <200, LED, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 450mm, Option: Rear Plate, Auto Switch: B54--Reed, DC Volt >5 <24, AC Volt <200, LED, Lead Wire, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 450mm, Option: Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: Basic Style, Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 500mm, Option: Rear Plate, Auto Switch: B54--Reed, DC Volt >5 <24, AC Volt <200, LED, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 500mm, Option: R (Rear Plate), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mounting: B (Basic Style), Bore Size: 25mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 300mm, Option: R (Rear Plate), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

ZPT/ZPX

mm Connection Vertical Male thread M18 x 1.5 M18 x 1.5 M22 x 1.5 Mounting 100, 125 40 to 80 25 mm, 50 mm, 75 mm, 100 mm Buffer stroke ZR 40, 50 63, 80 100, 125 Thread dia.

ITVH

factor [% F.S.] 2.0 0.5 Set pressure [MPa] Out 1.5 0.0 1.0 0.5 0.5 Return 1.0 0.0 0 25 50 75 100 0 25 50 75 100 Input signal [% F.S.]

Thermo-chiller

75 71 Accessories Operation Manual (for installation/operation) 2 pcs.

MGF

Bore size Standard stroke (mm) 40 30, 50, 75, 100 63 30, 50, 75, 100 100 30, 50, 75, 100 Applicable auto switches Lead wire length (m) Load voltage Auto switch model no.

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

CL

CL CL1 Rod Side Flange Style Bore size (mm) MLGC B BZ FT FD FX FZ FY Rod side flange style: CLG1FN Head side flange style: CLG1GN 25 30 30 36 65 75 75 82 38 45 45 52 52 60 60 66 5.5 5.5 6.6 6.6 57.5 6 7 7 8 20 25 32 40 CNG 69 69 76 MNB For long stroke, refer to page 9-2-32.

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Standard strokes Bore size (mm) Standard stroke (mm) Long stroke (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900, 1000 Intermediate strokes and strokes of 75mm or less can also be manufactured.

LG1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil G R Y Lead screw type Ground ball screw Rolled ball screw Slide screw P N S Motor output 100W 2 Power supply voltage 100/110VAC (50/60Hz) 100/115VAC (50/60Hz) 200/220VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor 1 The tables above show the definition for each symbol only and cannot be used for actual model selection. 2 0

Series 10-MGF ø40, ø63, ø100 Guide Table

R.

Compact and Lightweight

(When using the 3 port valve, seal the R port of the release valve.) Supply valve (3 port valve) + Variable throttle + Suction filter Ex. 2 Supply/Release valve (5 port valve with 3-position) + Variable throttle Ex. 5 3 port valve 5 port valve with 3-position closed center Silencer 3 port valve is used to generate and release the vacuum.

25

75 50 50 30 Hz 0.1 Hz 30 Hz 25 25 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 422 Technical Data IZS40/41/42 Series r Flow Rate Pressure Characteristics IZS IZS With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 0.6 0.6 IZN 460 640 640 580 460 580 400 0.5 0.5 1300 1300 2320 2320 1900 1900 1600

Magnetic Separator FHM Series

(applicable fluid storage volume of 100 L/unit) Based on the elimination ratio data for the FHM-100 and the point where the 500 ppm line and flow-back count 30 line intersect (one hour after starting operation), the result is 75%.