AU AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12
Maximum load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Minimum load impedance: 50 Reduce/Increase supply pressure to within the regulating pressure range. Applied pressure error Brown DC(+) Supply pressure is below the minimum regulating pressure.
Up to 300 Up to 300 25 Without rod boot With rod boot Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75
500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F
Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F
0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load
Mounting: F (Front Flange), Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 100mm, Option: w/o Rear Plate, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: Z (5m)
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 125mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 150mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 200mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 250mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 75mm, Option: w/o Rear Plate, Auto Switch: H7A1--Solid State, Gen. Purpose, 3 Wire NPN, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 75mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: -, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 75mm, Option: w/o Rear Plate, Auto Switch: C73--Reed, DC Volt >5 <24, AC Volt <100, LED, Lead Wire, Lead Wire or Prewired Connector: 3m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
Mounting: Front Flange, Bore Size: 20mm, Port Thread: 20 & 25 Bore: M5 x0.8, 32-50 Bore: Rc Thread, Stroke: 100mm, Option: w/o Rear Plate, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -, Speed Control Type: -, Applicable Tubing: -, Suffix: -
A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P
THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N
[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.