DOC1001322

Status (2): The temperature is in the "High/Low range, but no TEMP READY signal is generated since Ready Time is set at 300 sec at this point. Status (3): The 300 sec count for Ready Time is reset since the temperature is now outside of the Low range. Status (4): The 300 sec count for Ready Time starts since the temperature is now within the High/Low range.

Air Cylinder

3 r i !0 !6 o !1 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Qty. Note Kit no.

CXT

YES Model selected Without shock absorber Model selected With shock absorber 8-27-5 6 Series CXT Non-rotating Accuracy of Slide Block CXTM CXTL (Slide bearing) (Ball bushing bearing) p (= y) r p (= y) r Bore size (mm) p y r 12 0.09 0.12 0.05 0.05 16 0.08 0.10 0.05 0.04 20 0.07 0.08 0.04 0.03 Pitching direction Rolling direction Yawing direction 25 0.07 0.07 0.04 0.03 32 0.08 0.07 0.04 0.03

IDX-OM-M050

When the running time exceeds 300 hours, the lamp will light up. Use this as a guideline for when to clean the filter. To turn off the lamp, press the reset switch. It will light up again 300 hours after the reset switch is pressed.

Pilot Operated

10 Series VXD21/22/23 Dimensions Normally closed (N.C.): VXD2140/2150/2260 Normally open (N.O.): VXD2142/2152/2262 Conduit: C Grommet: G Q L Approx. 280 Q L M Approx. 300 G1/2 N f N B OUT IN 1 E C F H 2-P Port size D 2 x 8.5 a b e Conduit terminal: T d K J (Q) L A (Q) L DIN terminal: D 32 (44) N N G 1/2 G1/2 Cable 6 to 12 E R (R) (mm) Grommet Conduit DIN terminal Conduit terminal Electrical

HRX-OM-Q026

HRSH250/300-A HRSH250/300-A Sets threshold detection pressure Series, Other Series, Other for Circulating fluid discharge HRSH100/150/200/250models HRSH100/150/200/250models pressure rise alarm generation.

LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

RSH/RS1H

300 -X 200 200 100 100 200 0 10 20 30 40 10 20 30 40 Data Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 10-9-19 19 Series RSA Dimensions mFX+0.2 FZ 4-N through 8-O counter bore Workpiece transfer direction L CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size

Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.

RSH/RS1H

400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MHZ

6 Lever Type C snap ring Heat treated Electroless nickel plated Stainless steel Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DA H V R T VW PW ! CV !

MHZ

6 Lever Type C snap ring Electroless nickel plated Stainless steel Heat treated Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

VT307

Air flow direction: Port P Port A , Port R Block Component Parts Operation principle Spool valve w is pushed upward by the return spring e, port P is closed, and then port A and port R are opened. Air flow direction: Port P Block, A R VT DIN terminal and terminal (with light/surge voltage suppressor) are connected inside as in the figure below.

Series VCL

V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet:

Series VCS

F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.