Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Lead wire length symbols: 0.5 mNil(Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN CA2 CS1 For details about auto switches with pre-wire connector, refer to page 6-16-60.

Cylinder with Lock Series CNS

Load in direction of rod extension Load in direction of rod retraction m from 0.3MPa Graph 5 F from 0.4MPa Graph 6 m from 0.5MPa Graph 7 F 14 Series CNS Selection Graphs Graph 5 Graph 2 0.3MPaP<0.4MPa 0.3MPaP<0.4MPa 3000 3000 2000 2000 1000 1000 160 700 800 900 700 800 900 Load weight: m(kg) Load weight: m(kg) 140 600 600 125 P125 500 500 400 400 160 300 300 140 125 200 200 100 500 400 300

ML1

6 !7 !8 !

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filter 150/30 (8.3 2000Hz) Impact/Vibration m/s2 Grommet, L and M type plug connector Electrical Entry Check Valve 24, 12, 6, 5, 3 Coil rated voltage VDC Exhaust Silencer E -10 to +10% Allowable voltage Valve System A B 0.5 (with light: 0.55) Power consumption (W) Oxygen Output P Heat Exchanger Air Inlet Compressor Filter assembly Valve System circuit To sieve Tank 2 To sieve Tank 2 To sieve

PF2D

3 x 7.2 (= 21.6) 8-M3 OUT2 NC Sensor 36 +0.5 0 8 Load 6.4 4 OUT1 Black 7 3 Load 1 2 3 4 Brown + 6 2 +0.5 0 Blue 19.4 5 1 12 to 24 VDC Series PF2D5 5 6 7 8 PF2D301-A(-M) Do not connect the white wire of the sensor to c of the display unit.

MGP

M E k + = = 1 4 .. a Ek J M kg m kg ms ms 1 0.5m/s801000.4m/s 2 3 9. 1 2 3 3 4 5 1 5 10. 1 2 3 4 5 6 7 8 9 10 11. 1 (d=) 6 11-1. 1 1 2 3005mm 4 5 6 7 2d(MGPS1.5d MGP MGPS (d=) (d=) (mm) (mm) 7 11-1. 13 34 (mm) 3mm 20,25,32,40 16 JIS B46481.5 50,63 JIS B46482.5 80,100 JIS B4648 2 3) 12. 12-1. 2 12-2. 1) 1) 2 3) 1ISOVG32 8 4 0.7 12-3.

3 Way,3 Port Solenoid Valve NVZ Series

(L) M typ plug connector (M)

NVZseies

(L) M typ plug connector (M) World Wide QS\E Support...

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 Model L3 Model Weight (g) 6 7 8 12 13 26 31 Weight (g) 6 7 8 9 12 18 21 24 26 31 M1 d M1 D2 L2 D1 L1 L2 D2 D1 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 3.2 4 6 4 6 6 8 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

I = I + IA kgm (m to m : Mass of I to I kg) D Calculation example When d1 = 0.1m, d = 0.05m, D = 0.04m, a = 0.04m, b = 0.02m m = 1kg, m = 0.4kg, m = 0.5kg, m = 0.2kg, Gear tooth ratio = 2 Cylinder: I I = 0.2 x = 0.03 x 10 -3kg m I = 1 x = 1.25 x 10 -3 kgm 0.1 8 0.04+0.02 12 b IB = (0.13 + 0.1 + 0.03) x 10 -3= 0.26 x 10 -3 kgm 0.05 8 I = 0.4 x = 0.13 x 10 -3 kgm a IA = 2 x 0.26 x 10 -3 = 1.04

10

R R: Gripping point distance [mm] 6 MHL2 Series Construction 10 16 to 25 e r t u w y @4 @0 @1 @2 !7 !5 !8 @3 !3 e o i q @6 @7 @3 @5 !9 !0 !2 !1 !6 !4 Component Parts No. Description Material Note 1 Body Aluminum alloy Hard anodized No.

Multistage Ejector Series ZL112/212 1

For EE (ZSE4E) 24 V 12 V 6 V 5 V 3 V 5 6 V S R Lead wire length 0.5 (2.9) m NPN output Analog output PNP output 27 26 67 Lead wire length 0.5 (2.9) m Lead wire length 0.5 (2.9) m Not required for Nil, vacuum adapter (GN) and vacuum pressure gauge (G).

Profile Design ISO/VDMA Air Cylinder Series CP95

Example: Cylinder diameter: 50 mm Stroke: 600 mm Working pressure: 0.5 MPa Cycles: 5 per minute Bore size: 6 mm Piping length (between the cylinder and the valve): 2 m 6.Extend the intersection point 1 upward to a 6 piping bore size. Intersection point 2 is obtained. 7.Extend the intersection point 2 rightward or leftward.

MHF2

6 Parts list Parts list Note Material No. Description No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

2 35.8 36 Blue A 40 5 1 UNIT 12 to 24 VDC Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

3 Port Air Operated Valve Series SYJA300 1

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions.

AC Servo Motor Driver (MECHATROLINK-III type)

The minimum unit of the travel distance of the actuator should be 1 [m]. It is necessary to set it on the PLC side according to the kind of PLC. 35 - 6.3 The recommended value of the parameter [LEY] LEY25/ LEYG25 LEY25D/ LEYG25D LEY32/LEYG32 LEY32D/ LEYG32D Series Lead symbol A B C A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Parameter *1,*2 Para.

CJP

Part no. m t Snap ring D d9 3 d l D d9 3 L d l m t Snap ring L IY-P006 CT-P006 0.65 0.020 0.045 0.020 0.045 17.6 20.4 Clip type C3 Clip type C3 0.65 9 2.85 2.85 6 0.75 0.75 6.2 Data IY-P010 CT-P010 5 5 0.7 0.030 0.060 0.030 0.060 20.5 23.9 Type C 5 Type C 5 0.7 13.6 4.8 4.8 10 10 1 1 10.2 IY-P015 CT-P015 6 6 0.8 0.030 0.060 0.030 0.060 28.1 31.7 Type C 6 Type C 6 0.8 15.8 5.7 5.7 15 15 1

CJP

Part no. m t Snap ring D d9 3 D d9 3 d l L d l m t Snap ring L IY-P006 CT-P006 0.65 0.020 0.045 0.020 0.045 17.6 20.4 Clip type C3 Clip type C3 0.65 9 2.85 2.85 6 0.75 0.75 6.2 Data IY-P010 CT-P010 5 5 0.7 0.030 0.060 0.030 0.060 20.5 23.9 Type C 5 Type C 5 0.7 13.6 4.8 4.8 10 10 1 1 10.2 IY-P015 CT-P015 6 6 0.8 0.030 0.060 0.030 0.060 28.1 31.7 Type C 6 Type C 6 0.8 15.8 5.7 5.7 15 15 1

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Theoretical Output (N) Operating pressure (MPa) Rod diameter (mm) Piston area (mm) Operating direction Model 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.15 39.2 33.6 28.0 22.4 16.8 8.4 11.2 56 OUT M L 4 CXS 6 21.7 18.6 15.5 12.4 9.3 4.6 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151